Abstract: In a method for reliably monitoring the speed of a moveable coordinate measuring device, a first value of the speed is calculated from measured values of the coordinate measurement system. The measured values contain information on positions of the coordinate measuring device. The measured values are further used to determine the coordinates of a measurement object. A second value of the speed is ascertained from measurement signals of at least one additional movement sensor. The measurement signals can also be used for controlling a drive device of the coordinate measuring device. A fault signal can be generated if the first value and/or the second value deviate from one another, from a predetermined value and/or a limit value according to a predefined criterion.

Abstract: A probe head having a probe head base and a stylus is provided for contacting a surface point on a workpiece. The stylus is moveable relative to the probe head base and has a defined rest position relative to the probe head base. For the contacting, the probe head is moved relative to the workpiece until the stylus touches the surface point with a defined contacting force. A correction data record representing a hysteresis behavior of the stylus with respect to the rest position is provided, and the contacting force is determined using the correction data record.

Abstract: A machine, such as a coordinate measuring machine, uses a material measure with a periodic division in order to determine spatial positions of a working or measuring head. The periodic division of the material measure is further subdivided by interpolation values. For the purpose of correcting interpolation errors, the head is moved to a plurality of positions and a plurality of position data is determined. The plurality of position data represents a position curve of the head. A periodic component in the position curve is determined, which periodic component corresponds approximately to the periodic division of the material measure. Correction values are determined and the interpolation values are corrected using the correction values such that the periodic component is substantially reduced or largely eliminated.

Abstract: In order to determine spatial coordinates of a multiplicity of measurement points along a contour of a measurement object, a probe head is provided with a probe element that is movably supported on the probe head. During movement of the probe head along the contour, position measuring values of the probe head and deflections of the probe element relative to the probe head are determined. Spatial coordinates for the measurement points along the contour are determined from the position measuring values and deflections. The probe element is kept in contact with the contour during movement of the probe head by using an actuator to produce a defined contact force. The contact force is set as a function of a differential acceleration of the probe element relative to the probe head.

Abstract: In a coordinate measuring machine or any other kind of machine having at least one translational movement axis, correction values are determined by moving the mobile head of the machine along a defined path of movement. First and second position data are recorded by means of first and second position measuring devices. The first position data originate from position measuring devices of the machine. The second position data result from a reference measurement. The correction values are determined as a function of the first and second position data. A defined number of correction values is determined for each section of the path of movement, with the defined number varying in the sections as a function of the error profile defined by the correction values.

Abstract: In a method for operating a coordinate measuring machine and to a coordinate measuring machine, a coordinate measuring device, of the coordinate measuring machine is moved in at least one direction while being driven by an electric motor. An electrical drive current which flows through the electric motor for moving the electric motor and, move the coordinate measuring device is measured. A limit value for the electrical drive current is determined on the basis of a desired speed and/or on the basis of a desired acceleration with which the electric motor or the coordinate measuring device is intended to move. If the electrical drive current reaches the limit value determined and/or if the electrical drive current exceeds the limit value determined, the coordinate measuring device is changed to a predefined state, by virtue of the computer or the microcontroller switching off one of the switches disposed in the current path.

Abstract: In order to determine spatial coordinates of a multiplicity of measurement points along a contour of a measurement object, a probe head is provided with a probe element that is movably supported on the probe head. During movement of the probe head along the contour, position measuring values of the probe head and deflections of the probe element relative to the probe head are determined. Spatial coordinates for the measurement points along the contour are determined from the position measuring values and deflections. The probe element is kept in contact with the contour during movement of the probe head by using an actuator to produce a defined contact force. The contact force is set as a function of a differential acceleration of the probe element relative to the probe head.

Abstract: A measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports. An actual difference value between the displacement positions of a first and a second support is determined. A static difference value representing is provided and subtracted from the actual difference, in order to obtain a dynamic difference value representing a static difference between the first and the second displacement positions is subtracted from the actual difference value in order to obtain a dynamic difference value. The space coordinate of the measurement point is determined as a function of the dynamic difference value.

Abstract: For determining a space coordinate of a measurement point on a measuring object, the measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports movable parallel to one another. Each support is moved by its own drive. The space coordinate of the measurement point is determined as a function of the respective displacement position of the supports. The two drives are controlled by a common regulator.

Abstract: A machine part (12) is guided along a defined movement path (28) over a workpiece surface (23). The machine part (12) is held at a defined distance (50) from the workpiece surface (23) during this movement. For that purpose, a distance sensor (14) is provided that runs ahead of the machine part (12) with a defined lead (18). A plurality of distance values between the distance sensor (14) and the workpiece surface (23) are determined. A plurality of control values for adjusting the defined distance (50) are determined as a function of the distance values. The defined distance (50) is repeatedly adjusted by means of the control values. In accordance with one aspect of the invention, the distance values along the movement path (28) are determined by means of a first grid spacing (46). The control values are determined along the movement path (28) with a second grid spacing (44). The first and the second grid spacings (46, 44) are different.

Abstract: A machine part, such as a laser, is moved along at least one axis of movement relative to a workpiece. Position pulses are generated by means of an incremental encoder, with the number of position pulses in a position pulse train being representative of the movement position of the machine part. A trigger signal for the machine part is generated when the current number of position pulses corresponds to a predefined number of pulses. In a preferred embodiment, the current number of position pulses and the defined number of pulses are compared remote from a higher-level drive control circuit.

Abstract: A probe head having a probe head base and a stylus is provided for contacting a surface point on a workpiece. The stylus is moveable relative to the probe head base and has a defined rest position relative to the probe head base. For the contacting, the probe head is moved relative to the workpiece until the stylus touches the surface point with a defined contacting force. A correction data record representing a hysteresis behavior of the stylus with respect to the rest position is provided, and the contacting force is determined using the correction data record.

Abstract: A machine part is guided along a defined movement path over a workpiece surface. The machine part is held at a defined distance from the workpiece surface during this movement. For that purpose, at least one distance sensor is provided that runs ahead of the machine part with a defined lead. A plurality of distance values indicative of a distance between the distance sensor and the workpiece surface are determined along the movement path. A plurality of control values are determined as a function of the distance values. The defined distance is repeatedly adjusted by means of the control values. In accordance with a first aspect, the distance values are determined at measurement points distributed with a first grid spacing along the movement path, while the control values are determined for actuating points distributed with a second grid spacing along the movement path, the first and the second grid spacings being different.

Abstract: A machine, such as a coordinate measuring machine, uses a material measure with a periodic division in order to determine spatial positions of a working or measuring head. The periodic division of the material measure is further subdivided by means of interpolation values. For the purpose of correcting interpolation errors, the head is moved to a plurality of positions and a plurality of position data is determined. The plurality of position data represents a position curve of the head. A periodic component in the position curve is determined, which periodic component corresponds approximately to the periodic division of the material measure. Correction values for correcting the interpolation values are determined such that the periodic component is at least reduced.

Abstract: In a coordinate measuring machine or any other kind of machine having at least one translational movement axis, correction values are determined by moving the mobile head of the machine along a defined path of movement. First and second position data are recorded by means of first and second position measuring devices. The first position data originate from position measuring devices of the machine. The second position data result from a reference measurement. The correction values are determined as a function of the first and second position data. A defined number of correction values is determined for each section of the path of movement, with the defined number varying in the sections as a function of the error profile defined by the correction values.

Abstract: A measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports. An actual difference value between the displacement positions of a first and a second support is determined. A static difference value representing is provided and subtracted from the actual difference, in order to obtain a dynamic difference value representing a static difference between the first and the second displacement positions is subtracted from the actual difference value in order to obtain a dynamic difference value. The space coordinate of the measurement point is determined as a function of the dynamic difference value.

Abstract: For determining a space coordinate of a measurement point on a measuring object, the measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports movable parallel to one another. Each support is moved by its own drive. The space coordinate of the measurement point is determined as a function of the respective displacement position of the supports. The two drives are controlled by a common regulator.

Abstract: Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.

Abstract: A method for correcting errors in a coordinate measuring machine having a measuring head which is adapted to move in at least two different spatial directions. Measuring scales and measuring lines are assigned to each spatial direction. The measuring lines of different spatial directions intersect, and correction values are determined along the measuring lines at predetermined values of the scales in order to correct for elastic and/or geometric errors of the scales and/or of the guiding mechanism for moving the measuring head. According to one aspect of the invention, the correction values determined along a measuring line of a first spatial direction are modified such that the modified correction value of this measuring line assumes a predetermined value at the point of intersection with a first measuring line of a second spatial direction.

Abstract: Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.