Patents by Inventor Guenter Kaltenbrunner

Guenter Kaltenbrunner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for rapid thermal processing
    Patent number: 5872889
    Abstract: A closable enclosure for rapid thermal processing of semiconductor wafers is presented, wherein the closable enclosure has an enclosed volume less than 10 times the volume of the wafer, and wherein the closable enclosure may be closed about the wafer while the closable enclosure is surrounded by the process gas.
    Type: Grant
    Filed: January 8, 1997
    Date of Patent: February 16, 1999
    Assignee: Steag AST
    Inventors: Guenter Kaltenbrunner, Zsolt Nenyei, Helmut Sommer
  • Method and apparatus for rapid thermal processing
    Patent number: 5861609
    Abstract: A thin visible and near IR absorbing plate is placed between the radiation source and the object to be processed in a rapid thermal processing system. The object is heated in part by the near IR and far IR radiation from the thin plate, and the material and optically induced heating inhomogeneities are reduced.
    Type: Grant
    Filed: October 2, 1995
    Date of Patent: January 19, 1999
    Inventors: Guenter Kaltenbrunner, Thomas Knarr, Zsolt Nenyei
  • Apparatus and method for rapid thermal processing
    Patent number: 5837555
    Abstract: A closable enclosure for rapid thermal processing of semiconductor wafers is presented, wherein the closable enclosure has an enclosed volume less than 10 times the volume of the wafer, and wherein the closable enclosure may closed about the wafer while the closable enclosure is surrounded by the process gas.
    Type: Grant
    Filed: April 12, 1996
    Date of Patent: November 17, 1998
    Assignee: AST Electronik
    Inventors: Guenter Kaltenbrunner, Zsolt Nenyei, Helmut Sommer