Patents by Inventor Guenter Klemm
Guenter Klemm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20160045934Abstract: A method of processing a flexible substrate includes providing a flexible substrate having a polymerized surface; emitting an electron beam; exposing the polymerized surface to the electron beam; modifying the polymerized surface by the exposure to the electron beam; and depositing a barrier layer on the modified surface.Type: ApplicationFiled: August 3, 2015Publication date: February 18, 2016Inventors: Gerd HOFFMANN, Günter KLEMM, Hans-Georg LOTZ, Alexander WOLFF
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Publication number: 20140227455Abstract: A method of processing a flexible substrate includes providing a flexible substrate having a polymerized surface; emitting an electron beam; exposing the polymerized surface to the electron beam; modifying the polymerized surface by the exposure to the electron beam; and depositing a barrier layer on the modified surface.Type: ApplicationFiled: July 5, 2011Publication date: August 14, 2014Applicant: APPLIED MATERIALS, INC.Inventors: Gerd Hoffmann, Günter Klemm, Hans-Georg Lotz, Alexander Wolff
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Patent number: 8294115Abstract: A linear plasma electron source is provided. The linear plasma electron source includes a housing acting as a first electrode, the housing having side walls a slit opening in the housing for trespassing of a electron beam, the slit opening defining a length direction of the source, a second electrode being arranged within the housing and having a first side facing the slit opening, the first side being spaced from the slit opening by a first distance, wherein the length of the electron source in the length direction is at least 5 times the first distance, and at least one gas supply for providing a gas into the housing.Type: GrantFiled: November 17, 2008Date of Patent: October 23, 2012Assignee: Applied Materials, Inc.Inventors: Guenter Klemm, Volker Hacker, Hans-Georg Lotz
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Patent number: 7928411Abstract: A method of charging a web or foil is described. The method includes guiding a web or foil having a thickness of 10 ?m or larger with at least on roller; providing a linear electron source having a housing acting as an anode, the housing having side walls; a slit opening in the housing for trespassing of a linear electron beam, the slit opening defining a length direction of the source; a cathode being arranged within the housing and having a first side facing the slit opening; at least one gas supply for providing a gas into the housing; and a power supply for providing a high voltage between the anode and the cathode; and emitting the linear electron beam, wherein the high voltage is adjusted for providing an electron energy to implant electrons of the electron beam within the web or foil.Type: GrantFiled: November 24, 2008Date of Patent: April 19, 2011Assignee: Applied Materials, Inc.Inventors: Guenter Klemm, Volker Hacker, Hans-Georg Lotz
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Publication number: 20110003072Abstract: An evaporation apparatus for coating a substrate having an evaporation structure for evaporating material, the evaporation structure having an evaporation structure surface for receiving a wire; a wire feed for providing the wire; and a bending fixture with the bending fixture including a first and a second roller for giving the wire a reproducible curvature so that in operation of the evaporation apparatus the contact spot of the wire on the evaporation structure is at a desired position.Type: ApplicationFiled: July 9, 2009Publication date: January 6, 2011Applicant: APPLIED MATERIALS, INC.Inventors: Stefan KELLER, Juergen BRUCH, Guenter KLEMM, Karl-Albert KEIM, Stefan HEIN
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Patent number: 7808183Abstract: An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.Type: GrantFiled: March 10, 2006Date of Patent: October 5, 2010Assignees: Applied Materials GmbH & Co. KG, ALD Vacuum Technologies GmbHInventors: Günter Klemm, Andreas Thiede, Hans-Jürgen Schneider
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Publication number: 20090285999Abstract: A coating device for coating a flexible substrate and methods of manufacturing and operating a coating device are described. The coating device includes a roll having an axis and two or more insulating layers, wherein a first insulating layer is applied on a first area and a second insulating layer is applied on a second area on the surface of the roll, the first and second area being circumferential, and wherein at least one insulating layer is adapted to be applied as a vapor or as a fluid, and a central area between the first and second area, and a flexible substrate receiving area having two or more boundaries, wherein a first boundary lies within the first area and a second boundary lies within the second area.Type: ApplicationFiled: May 16, 2008Publication date: November 19, 2009Applicant: APPLIED MATERIALS, INC.Inventors: Wolfgang ACHTNER, Guenter KLEMM, Peter OLBRICH
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Publication number: 20090159818Abstract: A method of charging a web or foil is described. The method includes guiding a web or foil having a thickness of 10 ?m or larger with at least on roller; providing a linear electron source having a housing acting as an anode, the housing having side walls; a slit opening in the housing for trespassing of a linear electron beam, the slit opening defining a length direction of the source; a cathode being arranged within the housing and having a first side facing the slit opening; at least one gas supply for providing a gas into the housing; and a power supply for providing a high voltage between the anode and the cathode; and emitting the linear electron beam, wherein the high voltage is adjusted for providing an electron energy to implant electrons of the electron beam within the web or foil.Type: ApplicationFiled: November 24, 2008Publication date: June 25, 2009Applicant: APPLIED MATERIALS, INC.Inventors: Guenter KLEMM, Volker HACKER, Hans-Georg LOTZ
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Publication number: 20090159811Abstract: A linear plasma electron source is provided. The linear plasma electron source includes a housing acting as a first electrode, the housing having side walls a slit opening in the housing for trespassing of a electron beam, the slit opening defining a length direction of the source, a second electrode being arranged within the housing and having a first side facing the slit opening, the first side being spaced from the slit opening by a first distance, wherein the length of the electron source in the length direction is at least 5 times the first distance, and at least one gas supply for providing a gas into the housing.Type: ApplicationFiled: November 17, 2008Publication date: June 25, 2009Inventors: Guenter Klemm, Volker Hacker, Hans-Georg Lotz
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Publication number: 20090161719Abstract: An evaporation apparatus for evaporating a material to be deposited is described. The evaporation apparatus includes at least one evaporation crucible having a body with an area for receiving the material to be deposited at one side; a linear electron source being positioned adjacent to the evaporation crucible for impingement of an electron beam on another side. The linear electron source includes a housing acting as a first electrode, the housing having side walls; slit opening in the housing for trespassing of a electron beam, the slit opening defining a length direction of the source; a second electrode being arranged within the housing and having a first side facing the slit opening; and at least one gas supply for providing a gas into the housing, wherein the first electrode is the anode and the second electrode is the cathode.Type: ApplicationFiled: December 22, 2008Publication date: June 25, 2009Applicant: APPLIED MATERIALS, INC.Inventors: Guenter Klemm, Volker Hacker, Hans-Georg Lotz
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Patent number: 7550927Abstract: A system and method for producing electrons and ions are disclosed. One embodiment includes an outer electrode with a discharge chamber; an inner electrode positioned inside the discharge chamber, the inner electrode positioning forming a upper portion of the discharge chamber and a lower portion of the discharge chamber; and a gas inlet positioned in the lower portion of the discharge chamber; wherein a plasma formed within the lower portion of the discharge chamber provides priming particles usable to form a plasma in the upper portion of the discharge chamber.Type: GrantFiled: November 9, 2006Date of Patent: June 23, 2009Assignee: Applied Materials, Inc.Inventors: Michael W. Stowell, Guenter Klemm, Hans-Georg Lotz, Volker Hacker
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Publication number: 20080111490Abstract: A system and method for producing electrons and ions are disclosed. One embodiment includes an outer electrode with a discharge chamber; an inner electrode positioned inside the discharge chamber, the inner electrode positioning forming a upper portion of the discharge chamber and a lower portion of the discharge chamber; and a gas inlet positioned in the lower portion of the discharge chamber; wherein a plasma formed within the lower portion of the discharge chamber provides priming particles usable to form a plasma in the upper portion of the discharge chamber.Type: ApplicationFiled: November 9, 2006Publication date: May 15, 2008Inventors: Michael W. Stowell, Guenter Klemm, Hans-Georg Lotz, Volker Hacker
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Patent number: 7153372Abstract: Gas is introduced prior to a flooding process of a vacuum chamber of a vacuum installation, into coverings of elements, which coverings can be ventilated such that solid bodies are blown out of said coverings thereby preventing a penetration of said solid bodies into the coverings.Type: GrantFiled: February 3, 2005Date of Patent: December 26, 2006Assignee: Applied Materials GmbH & Co. KG.Inventors: Stefan Hein, Günter Klemm
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Patent number: 6568615Abstract: The breaker comprises two breaker jaws (17, 19) adapted to be opened and closed hydraulically, with which building parts, concrete parts, brick walls and the like may be clamped. A hydraulic pulse hammer device (25) is mounted to at least one breaker leg (17), which, by means of a piston (29) strikes on the object in the holding area of the breaker and breaks or splits the same. Thus, the efficiency of the breaker is substantially increased.Type: GrantFiled: July 23, 2001Date of Patent: May 27, 2003Inventor: Guenter Klemm
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Patent number: 6557652Abstract: Two working pistons (AK1, AK2) strike on the anvil (10) of a drill device or a rock breaking device. One working piston (AK1) is a solid piston, while the other (AK2) is an annular piston. Both working pistons can work at the same or substantially the same rate. In general, the percussion rate acting on the anvil (10) can be doubled with two working pistons. The working pistons can be controlled in common or independent from each other. In a synchronous mode with equal phase, the impact energy is multiplied; in an asynchronous mode or a mode with opposite phases, the percussion rate is increased.Type: GrantFiled: May 15, 2001Date of Patent: May 6, 2003Inventor: Guenter Klemm
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Publication number: 20020008169Abstract: The breaker comprises two breaker jaws (17, 19) adapted to be opened and closed hydraulically, with which building parts, concrete parts, brick walls and the like may be clamped. A hydraulic pulse hammer device (25) is mounted to at least one breaker leg (17), which, by means of a piston (29) strikes on the object in the holding area of the breaker and breaks or splits the same. Thus, the efficiency of the breaker is substantially increased.Type: ApplicationFiled: July 23, 2001Publication date: January 24, 2002Inventor: Guenter Klemm
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Publication number: 20020008420Abstract: Two working pistons (AK1, AK2) strike on the anvil (10) of a drill device or a rock breaking device. One working piston (AK1) is a solid piston, while the other (AKZ) is an annular piston. Both working pistons can work at the same or substantially the same rate. In general, the percussion rate acting on the anvil (10) can be doubled with two working pistons. The working pistons can be controlled in common or independent from each other. In a synchronous mode with equal phase, the impact energy is multiplied; in an asynchronous mode or a mode with opposite phases, the percussion rate is increased.Type: ApplicationFiled: May 15, 2001Publication date: January 24, 2002Inventor: Guenter Klemm
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Patent number: 6309466Abstract: A method and apparatus for vapor depositing a release agent on a foil. The foil is wrapped around a cylindrical drum which is made of a porous material. The hollow inside of the drum forms a vapor space. The outer surface of the drum includes a thin metallic layer which has engraved or etched therein a pattern of surface passages. A vaporizer vessel provides a vaporized release agent which is conducted to the vapor space inside the drum. The release agent travels through the circumferential passages so as to be deposited in a pattern on the foil which is wrapped around the drum. A conforming body covers the circumferential surface not covered by the foil and can be heated to heat the drum.Type: GrantFiled: February 17, 2000Date of Patent: October 30, 2001Assignee: Leybold Systems GmbHInventors: Günter Klemm, Hans Neudert
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Patent number: 6290005Abstract: A pneumatic impact damping device for a drill column comprises a first connection member for connection with the rear part of a drill column and a second connection member for connection with the front part of the drill column. Both connection members define a pneumatic cylinder chamber through which a bushing extends. The bushing has a passage moving Into and closed by a seal when an axial thrust force is exerted on the drill column. Thus, pressurized air is trapped and compressed in the cylinder chamber. In this manner, impacts applied to the front connection member by a deep-hole hammer drill are damped and prevented from acting on the rear part of the drill rod.Type: GrantFiled: December 14, 1999Date of Patent: September 18, 2001Inventor: Guenter Klemm
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Patent number: 6189806Abstract: A metallizing device for vacuum metallizing arrangements is disclosed having a vaporizer (3) heated by an electrical heating rod (8). This vaporizer (3) is connected to a nozzle element (1) in the form of a hollow body. For the purpose of vaporizing a substrate, vapor flows out of the vaporizer (3) into the nozzle element (1) and from there out of a nozzle gap (2) toward the substrate.Type: GrantFiled: September 23, 1999Date of Patent: February 20, 2001Assignee: Leybold Systems GmbHInventors: Günter Klemm, Hans Neudert, Wolfgang Achtner