Abstract: An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (9), with an actuator (5) for mechanically moving a deflecting element (10) and with a measuring element (2) for sensing the position of the deflecting element (10), where the measuring element (2) includes a flat substrate (3) having at least one sensor element (4). Furthermore, the present disclosure relates to a fast steering mirror (FSM).

Abstract: An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (9), with an actuator (5) for mechanically moving a deflecting element (10) and with a measuring element (2) for sensing the position of the deflecting element (10), where the measuring element (2) includes a flat substrate (3) having at least one sensor element (4). Furthermore, the present disclosure relates to a fast steering mirror (FSM).

Abstract: A sensor system having a distance sensor (1) for detecting the distance between two objects (3,4) that can be moved relative to one another and having a magnetic field sensor (2) for detecting a magnetic field between the objects (3,4), in particular for detecting a gap width and a magnetic field between a rotor and a stator, and having a selection device (13), wherein a measurement signal from the distance sensor (1) or a measurement signal from the magnetic field sensor (2) can be supplied for further processing via the selection device (13). Furthermore, a method for operating a sensor system is described.

Abstract: A device is disclosed for measuring the geometry of the inner wall of bores, drill holes and passages, which are optionally countersunk, and in particular for threaded, pin, and rivet connections of workpieces, said device comprising at least one optical sensor measuring towards the inner wall and capable of being introduced into the drill hole and rotated via a feed/rotating unit, wherein an auxiliary object is provided with a passage and rests on the surface of the workpiece, through which passage said sensor is inserted into the countersink and/or bore. The device is characterized in that the inner wall of the auxiliary object is provided with a structure and that the sensor scans said structure(s) while passing through the auxiliary object. The disclosure also relates to a corresponding method.

Abstract: The invention relates to a device for measuring the geometry of the inner wall of bores, drill holes and passages, which are optionally countersunk, and in particular for threaded, pin, and rivet connections of workpieces, said device comprising at least one optical sensor measuring towards the inner wall and capable of being introduced into the drill hole and rotated via a feed/rotating unit, wherein an auxiliary object is provided with a passage and rests on the surface of the workpiece, through which passage said sensor is inserted into the countersink and/or bore. The device is characterized in that the inner wall of the auxiliary object is provided with a structure and that the sensor scans said structure(s) while passing through the auxiliary object. The invention also relates to a corresponding method.

Abstract: A method for measuring the thickness on measurement objects, whereby at least one sensor measures against the object from the top and at least one other sensor measures against the object from the bottom and, at a known distance of the sensors to one another, the thickness of the object is calculated according to the formula D=Gap?(S1+S2), whereby D=the thickness of the measurement object, Gap=the distance between the sensors, S1=the distance of the top sensor to the upper side of the measurement object, and S2=the distance of the bottom sensor to the underside of the measurement object, is characterized by the compensation of a measurement error caused by tilting of the measurement object and/or by displacement of the sensors and/or by tilting of the sensors, whereby the displacement and/or the tilting is determined by calibration and the calculated thickness or the calculated thickness profile is corrected accordingly. The invention further concerns a device for applying the method.

Abstract: The invention relates to a sensor element for an inductive sensor used for a displacement or distance measurement by means of a magnetic field that varies according to the distance from the measurement object but that remains temporally constant. In said sensor, thin ferromagnetic material is integrated into a substrate. The invention also relates to a sensor comprising said sensor element and to a method for producing the sensor element.

Abstract: A method for detecting magnetic fields, particularly for detecting the position of objects with a preferably oblong, soft-magnetic element, which is connected to electronics, with via the electronics the impedance of the soft-magnetic material is measured, characterized in that a magnetic field is used in which by the position of an object which is located in an arrangement with the soft-magnetic material the magnetic field develops at the location of the soft-magnetic material, with the magnetic permeability ? of the soft-magnetic material adjusting, depending on the magnetic field and thus the position of the object. A respective device serves for applying the method according to the invention.

Abstract: A method for measuring the thickness on measurement objects, whereby at least one sensor measures against the object from the top and at least one other sensor measures against the object from the bottom and, at a known distance of the sensors to one another, the thickness of the object is calculated according to the formula D=Gap?(S1+S2), whereby D=the thickness of the measurement object, Gap=the distance between the sensors, S1=the distance of the top sensor to the upper side of the measurement object, and S2=the distance of the bottom sensor to the underside of the measurement object, is characterized by the compensation of a measurement error caused by tilting of the measurement object and/or by displacement of the sensors and/or by tilting of the sensors, whereby the displacement and/or the tilting is determined by calibration and the calculated thickness or the calculated thickness profile is corrected accordingly. The invention further concerns a device for applying the method.

Abstract: The invention relates to a sensor element for an inductive sensor used for a displacement or distance measurement by means of a magnetic field that varies according to the distance from the measurement object but that remains temporally constant. In said sensor, thin ferromagnetic material is integrated into a substrate. The invention also relates to a sensor comprising said sensor element and to a method for producing the sensor element.

Abstract: A method for calibration of a thickness gauge is provided in which the thickness gauge measures the thickness of a measured object in a stipulated measurement direction with at least one displacement sensor, operating contactless or by scanning, a reference object with known thickness and shape being brought into at least one partial area of the measurement field of the at least one displacement sensor.

Abstract: A method for detecting magnetic fields, particularly for detecting the position of objects with a preferably oblong, soft-magnetic element, which is connected to electronics, with via the electronics the impedance of the soft-magnetic material is measured, characterized in that a magnetic field is used in which by the position of an object which is located in an arrangement with the soft-magnetic material the magnetic field develops at the location of the soft-magnetic material, with the magnetic permeability ? of the soft-magnetic material adjusting, depending on the magnetic field and thus the position of the object. A respective device serves for applying the method according to the invention.

Abstract: An inductively operating sensor, particularly for measuring distances and positions of a metallic object, comprising at least a coil, a ferromagnetic or ferritic core and perhaps a housing comprising a sensor element, with the core being embedded in a single or multi-layered ceramic and jointly with the ceramic forming a coil body and with the coil body and the core being connected to each other in a form-fitting fashion. Furthermore, a method is suggested for producing such a sensor.

Abstract: A method for calibrating a thickness gauge, wherein the thickness gauge measures the thickness of a measurement object in a predefinable measuring direction (Z), comprising at least one displacement sensor (1, 2) operating in a contactless or scanning manner, wherein a reference object (3) having a known thickness and shape is moved into at least a partial region of the measurement field of the at least one displacement sensor (1, 2), comprises the following steps with respect to particularly precise and simple calibration. First, at least two independent measurement values are recorded by the at least one displacement sensor (1, 2) in at least two predefinable sites on a first surface of the reference object (3) at predefinable times tj, or as a function of predefinable positions pj of the reference object (3) in the measurement field, where j=1, 2 . . . .

Abstract: The invention relates to a contactlessly working eddy current sensor, particularly for detecting essentially flat test objects, comprising at least one sensor coil, eddy currents being able to be induced in the test object. The invention is characterized in that the coil, when passing by the test object, is aligned in such a manner that the coil axis is oriented essentially parallel to a line normal to a surface to the test object, and that the test object can be moved past the sensor coil essentially parallel to the coil axis or the sensor coil can be moved past the test object. A corresponding method is carried out so that an eddy current can occur only once when the test object or coil is passed by.

Abstract: A device and a method for detecting the position of an object (1), such as an armature (2) of an inlet or outlet valve (3), with the device comprising at least two coils (4, 5), preferably two magnet coils, which can be energized for moving the object (1) between the two coils (4, 5), or used with an evaluation circuit for detecting the position of the object (1). The two coils (4, 5) are alternately used for moving the object (1) between the coils (4, 5) and for detecting the position of the object (1).