Abstract: The control system for a fiber-optic gyroscope comprises a phase modulator for modulating a phase of a light signal and a control unit for producing a control signal, by the magnitude of which the phase is modulated and which is fed to the phase modulator. Moreover, the control system comprises an integration unit for determining an integral value of an integral over an input signal. Here, the control signal assumes a first value or a second value depending on the integral value.

Abstract: The control system for a fibre-optic gyroscope comprises a phase modulator for modulating a phase of a light signal and a control unit for producing a control signal, by the magnitude of which the phase is modulated and which is fed to the phase modulator. Moreover, the control system comprises an integration unit for determining an integral value of an integral over an input signal. Here, the control signal assumes a first value or a second value depending on the integral value.

Abstract: The invention relates to a device (300) for controlling a sensor (310), comprising a converter unit (320) for converting an input signal (365) into a control signal (360) for controlling said sensor (310), and a comparison unit (330) for determining a differential signal (370) that indicates the difference between said input signal (365) and control signal (360). The device also comprises a feedback unit (340) for regulating the input signal (365) using said differential signal (370). A differential signal (370) transfer function has a zero point at a sensor (310) operating frequency which does not equal zero.

Abstract: The invention relates to a control system (100) for a fiber optic gryoscope, comprising a phase modulator (110) for modulating a phase of a light signal (115) and a control unit (120) for producing a control signal (125), by the value of which the phase is modulated and which is fed to the phase modulator (110). The control signal changes statistically and does not have an average value.

Abstract: The invention relates to a device (300) for controlling a sensor (310), comprising a converter unit (320) for converting an input signal (365) into a control signal (360) for controlling said sensor (310), and a comparison unit (330) for determining a differential signal (370) that indicates the difference between said input signal (365) and control signal (360). The device also comprises a feedback unit (340) for regulating the input signal (365) using said differential signal (370). A differential signal (370) transfer function has a zero point at a sensor (310) operating frequency which does not equal zero.

Abstract: The invention relates to a control system (100) for a fiber optic gryoscope, comprising a phase modulator (110) for modulating a phase of a light signal (115) and a control unit (120) for producing a control signal (125), by the value of which the phase is modulated and which is fed to the phase modulator (110). The control signal changes statistically and does not have an average value.

Abstract: In a method for producing a component, a first layer composite is first produced, comprising a structured layer and a trench filled with an insulating material. The structured layer is electrically conductive at least in a first region. The trench filled with an insulating material extends outwards from a first surface of the structured layer and is arranged in the first region of the structured layer. The first surface of the structured layer faces a first surface of the first layer composite. The method additionally has the step of producing a second layer composite, which has a first depression in a first surface of the second layer composite, and the step of connecting the first layer composite to the second layer composite. The first surface of the first layer composite adjoins the first surface of the second layer composite at least in some regions, said filled trench being arranged within the lateral position of the first depression.

Abstract: In a method for producing a component, a first layer composite is first produced, comprising a structured layer and a trench filled with an insulating material. The structured layer is electrically conductive at least in a first region. The trench filled with an insulating material extends outwards from a first surface of the structured layer and is arranged in the first region of the structured layer. The first surface of the structured layer faces a first surface of the first layer composite. The method additionally has the step of producing a second layer composite, which has a first depression in a first surface of the second layer composite, and the step of connecting the first layer composite to the second layer composite. The first surface of the first layer composite adjoins the first surface of the second layer composite at least in some regions, said filled trench being arranged within the lateral position of the first depression.

Abstract: A micromechanical component comprises a substrate and an active structure which can be deflected in at least one direction relative to the substrate and which has at least a first region and a second region, wherein the first region and the second region are electrically conductive and are rigidly physically connected to one another along a first axis and are electrically insulated from one another by an insulating region. In a method for operating the component, different potentials are applied to the first region and the second region, wherein charges or changes in capacitance brought about by the movement of the active structure can be detected.

Abstract: A fiber-optic Sagnac interferometer in a rotation rate sensor comprises a multifunctional integrated optical chip (MIOC) with a MIOC transfer function. A digital filter is connected upstream to the multi-functional integrated optical chip, whose filter transfer function corresponds basically to the inverse MIOC transfer function such that the MIOC transfer function is compensated by the filter transfer function. Corresponding coefficients of the filter transfer function may be determined in a main control loop.

Abstract: A fiber-optic Sagnac interferometer in a rotation rate sensor comprises a multifunctional integrated optical chip (MIOC) with a MIOC transfer function. A digital filter is connected upstream to the multi-functional integrated optical chip, whose filter transfer function corresponds basically to the inverse MIOC transfer function such that the MIOC transfer function is compensated by the filter transfer function. Corresponding coefficients of the filter transfer function may be determined in a main control loop.

Abstract: A microelectromechanical sensor and operating method therefor. The sensor has at least one movable electrode. An electrode arrangement is spaced apart from the movable electrode with a plurality of electrodes that can be driven separately and to which corresponding electrode signals can be applied that can be used to electrostatically set/change the application of force, the spring constant and the read-out factor of the movable electrode. An electrode signal generation unit is connected to the electrode arrangement and can be supplied with a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be brought about with regard to the application of force, spring constant and read-out factor of the movable electrode.

Abstract: A rotation rate sensor comprises a substrate and two structures which move relative to the substrate on a design plane (x-y), with the two moving structures being coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction (x) on the design plane (x-y) as excitation mode. The coupled structure has a second oscillation mode as a detection mode which is excited by Coriolis accelerations when the first oscillation mode is excited and on rotation about a sensitive axis (z) of the rotation rate sensor. The sensitive axis is at right angles to the design plane (x-y), and the coupled structure is designed such that, subject to optimal preconditions, it does not have any oscillation mode which can be excited by linear accelerations of the rotation rate sensor in a direction parallel to the second axis.

Abstract: A method and a switch arrangement for operating a micromechanical capacitive sensor having at least one and at most two fixed electrodes and one differential capacitor formed by a movable central electrode that can be deflected by an external force, wherein the deflection of the electrode is measured. A fraction of the force acting on the central electrode, corresponding to the electrostatic restorative force, is compensated. Under closed-loop operation, a selection signal is influenced by a regulator supplementing a restore crosstalk signal so that the created capacitive restorative force acts in a compensatory manner against deflection of the central electrode.

Abstract: A digital phase modulator for a fiber-optic measurement device. A predetermined total number of electrodes of different lengths are arranged in parallel and on both sides of a light guidance path in or on an optical substrate. The electrodes are arranged in two or more triples along the light guidance path. In each case, two electrodes of successive length within a triple have the same length ratio with respect to one another. Such length ratio is chosen, in particular, to be ?=1.618. The electrode lengths of this triple are chosen such that the smallest step widths of the output value range of the phase modulator can be formed by subtraction between the values of at least two larger electrodes. This allows the resolution of the phase modulator to be increased from 9 bits to 11 bits without change in chip size.

Abstract: An operating method for a Coriolis gyro. Digital read signals are produced that represent a measure of the instantaneous amplitudes/frequencies of the stimulation oscillation/read oscillation of the gyro resonator. Force signals are applied to the resonator. The force signals are controlled as a function of the digital read signals so that the stimulation oscillation/read oscillation assume specific amplitudes/frequencies. The force signals are produced from quantized output signals from a pulse modulator. The modulator is fed with digital stimulation/compensation signals derived from the digital read signals.

Abstract: A microelectromechanical sensor and operating method therefor. The sensor has at least one movable electrode. An electrode arrangement is spaced apart from the movable electrode with a plurality of electrodes that can be driven separately and to which corresponding electrode signals can be applied that can be used to electrostatically set/change the application of force, the spring constant and the read-out factor of the movable electrode. An electrode signal generation unit is connected to the electrode arrangement and can be supplied with a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be brought about with regard to the application of force, spring constant and read-out factor of the movable electrode.

Abstract: A rotation rate sensor comprises a substrate and two structures which move relative to the substrate on a design plane (x-y), with the two moving structures being coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction (x) on the design plane (x-y) as excitation mode. The coupled structure has a second oscillation mode as a detection mode which is excited by Coriolis accelerations when the first oscillation mode is excited and on rotation about a sensitive axis (z) of the rotation rate sensor. The sensitive axis is at right angles to the design plane (x-y), and the coupled structure is designed such that, subject to optimal preconditions, it does not have any oscillation mode which can be excited by linear accelerations of the rotation rate sensor in a direction parallel to the second axis.

Abstract: A method and a switch arrangement for operating a micromechanical capacitive sensor having at least one and at most two fixed electrodes and one differential capacitor formed by a movable central electrode that can be deflected by an external force, wherein the deflection of the electrode is measured. A fraction of the force acting on the central electrode, corresponding to the electrostatic restorative force, is compensated. Under closed-loop operation, a selection signal is influenced by a regulator supplementing a restore crosstalk signal so that the created capacitive restorative force acts in a compensatory manner against deflection of the central electrode.

Abstract: A pulse modulator has a subtraction stage that produces a control error signal from the difference between a complex input signal and a feedback signal. A signal conversion stage converts the control error signal to a control signal. The control signal is multiplied by a complex mixing signal at the frequency ?0 in a first multiplication stage. At least one of the real and imaginary parts of the up-mixed control signal is then quantized by a quantization stage to produce a real pulsed signal. The pulsed signal is then employed to produce the feedback signal for the subtraction stage in a feedback unit. The pulse modulator according to the invention allows the range of reduced quantization noise to be shifted toward a desired operating frequency ?0.