Patents by Inventor Guenther Krauss

Guenther Krauss has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10884255
    Abstract: Methods, devices and systems for linear polarization of a laser beam are provided. In one aspect, a polarization system includes: a first polarizer having a first polarizer surface for linear polarization of a laser beam propagating in a first direction and striking the first polarizer surface at a first angle, a phase shifter configured to rotate a polarization direction of the linearly polarized laser beam transmitted at the first polarizer surface by a predetermined rotation angle, and a second polarizer having a second polarizer surface, the linearly polarized laser beam striking the second polarizer surface at a second angle after having passed through the phase shifter and being transmitted by the second polarizer surface. An incidence plane of the laser beam striking the second polarizer surface is rotated by the predetermined rotation angle relative to an incidence plane of the laser beam striking the first polarizer surface.
    Type: Grant
    Filed: April 12, 2018
    Date of Patent: January 5, 2021
    Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    Inventors: Guenther Krauss, Andrea Hartung
  • Patent number: 10644473
    Abstract: Driver laser systems for EUV radiation producing apparatuses are disclosed that include a beam source for producing laser radiation propagating in a first direction, an amplifier arrangement comprising at least one optical amplifier for amplifying the laser radiation propagating in the first direction, and at least one optical isolator. The optical isolator includes a chamber filled with a gas, through which chamber the laser radiation propagating in the first direction passes, and a plasma generating device configured for the pulsed ignition of a plasma in the gas of the chamber to suppress passage of laser radiation propagating in a second direction, opposite to the first direction, through the chamber. EUV radiation producing apparatuses that include such driver laser systems are also disclosed.
    Type: Grant
    Filed: August 9, 2018
    Date of Patent: May 5, 2020
    Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    Inventors: Jens Brunne, Matthias Wissert, Guenther Krauss
  • Patent number: 10186827
    Abstract: Systems, methods, and apparatus, including non-transitory computer-readable storage medium, for amplifying pulsed laser radiation in an EUV laser driver are provided. An example EUV laser driver includes a beam source configured to produce the pulsed laser radiation with at least one laser frequency, an amplifier arrangement with at least one optical amplifier for amplifying the pulsed laser radiation, the at least one optical amplifier having a frequency-dependent gain with a maximum gain at a maximum frequency, at least one frequency shifter configured to produce a frequency shift for the laser frequency of the pulsed laser radiation relative to the maximum frequency, and a controller configured to set the frequency shift such that a gain of the at least one optical amplifier for the pulsed laser radiation is reduced to less than a percentage, e.g., 90%, 70%, or 50%, of the maximum gain.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: January 22, 2019
    Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    Inventors: Joachim Schulz, Guenther Krauss, Matthias Wissert
  • Publication number: 20180375278
    Abstract: Driver laser systems for EUV radiation producing apparatuses are disclosed that include a beam source for producing laser radiation propagating in a first direction, an amplifier arrangement comprising at least one optical amplifier for amplifying the laser radiation propagating in the first direction, and at least one optical isolator. The optical isolator includes a chamber filled with a gas, through which chamber the laser radiation propagating in the first direction passes, and a plasma generating device configured for the pulsed ignition of a plasma in the gas of the chamber to suppress passage of laser radiation propagating in a second direction, opposite to the first direction, through the chamber. EUV radiation producing apparatuses that include such driver laser systems are also disclosed.
    Type: Application
    Filed: August 9, 2018
    Publication date: December 27, 2018
    Inventors: Jens Brunne, Matthias Wissert, Guenther Krauss
  • Publication number: 20180231790
    Abstract: Methods, devices and systems for linear polarization of a laser beam are provided. In one aspect, a polarization system includes: a first polarizer having a first polarizer surface for linear polarization of a laser beam propagating in a first direction and striking the first polarizer surface at a first angle, a phase shifter configured to rotate a polarization direction of the linearly polarized laser beam transmitted at the first polarizer surface by a predetermined rotation angle, and a second polarizer having a second polarizer surface, the linearly polarized laser beam striking the second polarizer surface at a second angle after having passed through the phase shifter and being transmitted by the second polarizer surface. An incidence plane of the laser beam striking the second polarizer surface is rotated by the predetermined rotation angle relative to an incidence plane of the laser beam striking the first polarizer surface.
    Type: Application
    Filed: April 12, 2018
    Publication date: August 16, 2018
    Inventors: Guenther Krauss, Andrea Hartung
  • Patent number: 10027083
    Abstract: Systems, methods, and apparatus, including non-transitory computer-readable storage medium, for amplifying pulsed laser radiation in an EUV laser driver are provided. An example EUV laser driver includes a beam source configured to produce the pulsed laser radiation with at least one laser frequency, an amplifier arrangement with at least one optical amplifier for amplifying the pulsed laser radiation, the at least one optical amplifier having a frequency-dependent gain with a maximum gain at a maximum frequency, at least one frequency shifter configured to produce a frequency shift for the laser frequency of the pulsed laser radiation relative to the maximum frequency, and a controller configured to set the frequency shift such that a gain of the at least one optical amplifier for the pulsed laser radiation is reduced to less than a percentage, e.g., 90%, 70%, or 50%, of the maximum gain.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: July 17, 2018
    Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    Inventors: Joachim Schulz, Guenther Krauss, Matthias Wissert
  • Publication number: 20170149202
    Abstract: Systems, methods, and apparatus, including non-transitory computer-readable storage medium, for amplifying pulsed laser radiation in an EUV laser driver are provided. An example EUV laser driver includes a beam source configured to produce the pulsed laser radiation with at least one laser frequency, an amplifier arrangement with at least one optical amplifier for amplifying the pulsed laser radiation, the at least one optical amplifier having a frequency-dependent gain with a maximum gain at a maximum frequency, at least one frequency shifter configured to produce a frequency shift for the laser frequency of the pulsed laser radiation relative to the maximum frequency, and a controller configured to set the frequency shift such that a gain of the at least one optical amplifier for the pulsed laser radiation is reduced to less than a percentage, e.g., 90%, 70%, or 50%, of the maximum gain.
    Type: Application
    Filed: January 10, 2017
    Publication date: May 25, 2017
    Inventors: Joachim Schulz, Guenther Krauss, Matthias Wissert
  • Patent number: 5542906
    Abstract: A therapy apparatus has a source of acoustic waves which generates acoustic waves focused onto a focus and an x-ray locating means with which the subject to be treated can be irradiated from different directions, the central ray of the locating beam assuming a first direction for a first irradiation direction and comprises a second direction for a second irradiation direction. The apparatus has a positioning system with which the subject to be treated and the focus can be adjusted relative to one another. The region to be treated and the focus are adjustable relative to one another by synchronous actuation of the positioning system in two adjustment directions for at least one irradiation direction, this adjustment taking place in a direction that proceeds parallel to the direction of the central ray that belongs to the other irradiation direction.
    Type: Grant
    Filed: May 5, 1995
    Date of Patent: August 6, 1996
    Assignee: Siemens Aktiengesellschaft
    Inventors: Klaus Herrmann, Guenther Krauss
  • Patent number: 5517991
    Abstract: A urological workstation has a patient support table with a support plate having a length which does not significantly exceed 145 cm, and an x-ray diagnostics installation that is adjustable relative to the patient support table. The x-ray diagnostics installation is adjustable relative to the patient support table such that its central ray is shifted along the longitudinal axis of the support table through positions which are parallel to each other.
    Type: Grant
    Filed: July 11, 1994
    Date of Patent: May 21, 1996
    Assignee: Siemens Aktiengesellschaft
    Inventors: Klaus Herrmann, Guenther Krauss
  • Patent number: 5515415
    Abstract: A medical apparatus has a patient support table with a seating surface and a mounting side, the apparatus having at least one apparatus part. At least one of the apparatus part or the patient support table (or the seating surface thereof) is adjustable relative to the other so that the apparatus part and the patient support table assume a mounting position wherein those regions of the apparatus part that have a distance of less than 100 cm from the seating surface measured in vertical direction, are spaced from the edge of the patient support table that limits the mounting side no closer than 40 cm measured horizontally and transversely relative to the edge.
    Type: Grant
    Filed: June 27, 1994
    Date of Patent: May 7, 1996
    Assignee: Siemens Aktiengesellschaft
    Inventors: Klaus Herrmann, Guenther Krauss, Peter Noegel
  • Patent number: 5470302
    Abstract: A medical apparatus has an apparatus part which is provided for application against the body surface of a patient, and a patient support mechanism and a system for adjusting the apparatus part and the patient support mechanism relative to each other. The system simultaneously adjusts the apparatus part at a first adjustment speed in a first direction and the patient support mechanism at a second adjustment speed in a second direction, with the first and second adjustment speeds having a fixed constant relationship, so that the apparatus part and the patient support mechanism are caused to execute a motion in a third direction relative to each other. The third direction can be selected to compensate for dislocations of the body of the patient which are anticipated upon the application of the apparatus part to the patient's body surface, so that the patient remains as stationary as possible.
    Type: Grant
    Filed: August 30, 1994
    Date of Patent: November 28, 1995
    Assignee: Siemens Aktiengesellschaft
    Inventors: Guenther Krauss, Klaus Herrmann
  • Patent number: 5468214
    Abstract: A therapy apparatus for treating a subject with acoustic waves has a source of acoustic waves which is adjustable in at least one degree of freedom. The apparatus includes at least one further apparatus component, which is disposed remote from the source of acoustic waves, and which is connected to the source of acoustic waves via at least one line, which may be an electrical line or a fluid line. The apparatus component is adjustable in common with the source of acoustic waves so that the distance between the source of acoustic waves and the apparatus component does not change as a consequence of the adjustment.
    Type: Grant
    Filed: March 21, 1995
    Date of Patent: November 21, 1995
    Assignee: Siemens Aktiengesellschaft
    Inventors: Klaus Herrmann, Guenther Krauss
  • Patent number: 5395299
    Abstract: A therapy apparatus has a source of acoustic waves which generates acoustic waves focused onto a focus and which has an x-ray-transparent region, and the focus lying in an isocenter and an x-ray locating system whose central ray proceeds through the isocenter and is adjustable relative to the source in a locating sequence such that a subject to be treated is irradiated by locating radiation from different directions, with the central ray in one of the irradiation directions proceeding through the x-ray transparent region and the acoustic wave source is maintained stationary during the sequence. A corresponding method is also disclosed.
    Type: Grant
    Filed: February 4, 1994
    Date of Patent: March 7, 1995
    Assignee: Siemens Aktiengesellschaft
    Inventors: Klaus Herrmann, Guenther Krauss
  • Patent number: 5329926
    Abstract: A therapy station for treatment of a patient with focused acoustic waves has a source of focused acoustic waves attached to a source carrier, an x-ray carrier carrying an x-ray locating system, and a support table for the patient. The x-ray carrier is pivotably attached to the source carrier so as to be pivotable relative to the source of acoustic waves and such that the central ray of the x-ray locating system always proceeds through the focus of the focused acoustic waves, and the source carrier is adjustable relative to the support table in a plane.
    Type: Grant
    Filed: August 2, 1993
    Date of Patent: July 19, 1994
    Assignee: Siemens Aktiengesellschaft
    Inventors: Klaus Herrmann, Guenther Krauss, Peter Noegel