Patents by Inventor Guenther Krauss
Guenther Krauss has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10884255Abstract: Methods, devices and systems for linear polarization of a laser beam are provided. In one aspect, a polarization system includes: a first polarizer having a first polarizer surface for linear polarization of a laser beam propagating in a first direction and striking the first polarizer surface at a first angle, a phase shifter configured to rotate a polarization direction of the linearly polarized laser beam transmitted at the first polarizer surface by a predetermined rotation angle, and a second polarizer having a second polarizer surface, the linearly polarized laser beam striking the second polarizer surface at a second angle after having passed through the phase shifter and being transmitted by the second polarizer surface. An incidence plane of the laser beam striking the second polarizer surface is rotated by the predetermined rotation angle relative to an incidence plane of the laser beam striking the first polarizer surface.Type: GrantFiled: April 12, 2018Date of Patent: January 5, 2021Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbHInventors: Guenther Krauss, Andrea Hartung
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Patent number: 10644473Abstract: Driver laser systems for EUV radiation producing apparatuses are disclosed that include a beam source for producing laser radiation propagating in a first direction, an amplifier arrangement comprising at least one optical amplifier for amplifying the laser radiation propagating in the first direction, and at least one optical isolator. The optical isolator includes a chamber filled with a gas, through which chamber the laser radiation propagating in the first direction passes, and a plasma generating device configured for the pulsed ignition of a plasma in the gas of the chamber to suppress passage of laser radiation propagating in a second direction, opposite to the first direction, through the chamber. EUV radiation producing apparatuses that include such driver laser systems are also disclosed.Type: GrantFiled: August 9, 2018Date of Patent: May 5, 2020Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbHInventors: Jens Brunne, Matthias Wissert, Guenther Krauss
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Patent number: 10186827Abstract: Systems, methods, and apparatus, including non-transitory computer-readable storage medium, for amplifying pulsed laser radiation in an EUV laser driver are provided. An example EUV laser driver includes a beam source configured to produce the pulsed laser radiation with at least one laser frequency, an amplifier arrangement with at least one optical amplifier for amplifying the pulsed laser radiation, the at least one optical amplifier having a frequency-dependent gain with a maximum gain at a maximum frequency, at least one frequency shifter configured to produce a frequency shift for the laser frequency of the pulsed laser radiation relative to the maximum frequency, and a controller configured to set the frequency shift such that a gain of the at least one optical amplifier for the pulsed laser radiation is reduced to less than a percentage, e.g., 90%, 70%, or 50%, of the maximum gain.Type: GrantFiled: January 10, 2017Date of Patent: January 22, 2019Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbHInventors: Joachim Schulz, Guenther Krauss, Matthias Wissert
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Publication number: 20180375278Abstract: Driver laser systems for EUV radiation producing apparatuses are disclosed that include a beam source for producing laser radiation propagating in a first direction, an amplifier arrangement comprising at least one optical amplifier for amplifying the laser radiation propagating in the first direction, and at least one optical isolator. The optical isolator includes a chamber filled with a gas, through which chamber the laser radiation propagating in the first direction passes, and a plasma generating device configured for the pulsed ignition of a plasma in the gas of the chamber to suppress passage of laser radiation propagating in a second direction, opposite to the first direction, through the chamber. EUV radiation producing apparatuses that include such driver laser systems are also disclosed.Type: ApplicationFiled: August 9, 2018Publication date: December 27, 2018Inventors: Jens Brunne, Matthias Wissert, Guenther Krauss
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Publication number: 20180231790Abstract: Methods, devices and systems for linear polarization of a laser beam are provided. In one aspect, a polarization system includes: a first polarizer having a first polarizer surface for linear polarization of a laser beam propagating in a first direction and striking the first polarizer surface at a first angle, a phase shifter configured to rotate a polarization direction of the linearly polarized laser beam transmitted at the first polarizer surface by a predetermined rotation angle, and a second polarizer having a second polarizer surface, the linearly polarized laser beam striking the second polarizer surface at a second angle after having passed through the phase shifter and being transmitted by the second polarizer surface. An incidence plane of the laser beam striking the second polarizer surface is rotated by the predetermined rotation angle relative to an incidence plane of the laser beam striking the first polarizer surface.Type: ApplicationFiled: April 12, 2018Publication date: August 16, 2018Inventors: Guenther Krauss, Andrea Hartung
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Patent number: 10027083Abstract: Systems, methods, and apparatus, including non-transitory computer-readable storage medium, for amplifying pulsed laser radiation in an EUV laser driver are provided. An example EUV laser driver includes a beam source configured to produce the pulsed laser radiation with at least one laser frequency, an amplifier arrangement with at least one optical amplifier for amplifying the pulsed laser radiation, the at least one optical amplifier having a frequency-dependent gain with a maximum gain at a maximum frequency, at least one frequency shifter configured to produce a frequency shift for the laser frequency of the pulsed laser radiation relative to the maximum frequency, and a controller configured to set the frequency shift such that a gain of the at least one optical amplifier for the pulsed laser radiation is reduced to less than a percentage, e.g., 90%, 70%, or 50%, of the maximum gain.Type: GrantFiled: January 10, 2017Date of Patent: July 17, 2018Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbHInventors: Joachim Schulz, Guenther Krauss, Matthias Wissert
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Publication number: 20170149202Abstract: Systems, methods, and apparatus, including non-transitory computer-readable storage medium, for amplifying pulsed laser radiation in an EUV laser driver are provided. An example EUV laser driver includes a beam source configured to produce the pulsed laser radiation with at least one laser frequency, an amplifier arrangement with at least one optical amplifier for amplifying the pulsed laser radiation, the at least one optical amplifier having a frequency-dependent gain with a maximum gain at a maximum frequency, at least one frequency shifter configured to produce a frequency shift for the laser frequency of the pulsed laser radiation relative to the maximum frequency, and a controller configured to set the frequency shift such that a gain of the at least one optical amplifier for the pulsed laser radiation is reduced to less than a percentage, e.g., 90%, 70%, or 50%, of the maximum gain.Type: ApplicationFiled: January 10, 2017Publication date: May 25, 2017Inventors: Joachim Schulz, Guenther Krauss, Matthias Wissert
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Patent number: 5542906Abstract: A therapy apparatus has a source of acoustic waves which generates acoustic waves focused onto a focus and an x-ray locating means with which the subject to be treated can be irradiated from different directions, the central ray of the locating beam assuming a first direction for a first irradiation direction and comprises a second direction for a second irradiation direction. The apparatus has a positioning system with which the subject to be treated and the focus can be adjusted relative to one another. The region to be treated and the focus are adjustable relative to one another by synchronous actuation of the positioning system in two adjustment directions for at least one irradiation direction, this adjustment taking place in a direction that proceeds parallel to the direction of the central ray that belongs to the other irradiation direction.Type: GrantFiled: May 5, 1995Date of Patent: August 6, 1996Assignee: Siemens AktiengesellschaftInventors: Klaus Herrmann, Guenther Krauss
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Patent number: 5517991Abstract: A urological workstation has a patient support table with a support plate having a length which does not significantly exceed 145 cm, and an x-ray diagnostics installation that is adjustable relative to the patient support table. The x-ray diagnostics installation is adjustable relative to the patient support table such that its central ray is shifted along the longitudinal axis of the support table through positions which are parallel to each other.Type: GrantFiled: July 11, 1994Date of Patent: May 21, 1996Assignee: Siemens AktiengesellschaftInventors: Klaus Herrmann, Guenther Krauss
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Patent number: 5515415Abstract: A medical apparatus has a patient support table with a seating surface and a mounting side, the apparatus having at least one apparatus part. At least one of the apparatus part or the patient support table (or the seating surface thereof) is adjustable relative to the other so that the apparatus part and the patient support table assume a mounting position wherein those regions of the apparatus part that have a distance of less than 100 cm from the seating surface measured in vertical direction, are spaced from the edge of the patient support table that limits the mounting side no closer than 40 cm measured horizontally and transversely relative to the edge.Type: GrantFiled: June 27, 1994Date of Patent: May 7, 1996Assignee: Siemens AktiengesellschaftInventors: Klaus Herrmann, Guenther Krauss, Peter Noegel
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Patent number: 5470302Abstract: A medical apparatus has an apparatus part which is provided for application against the body surface of a patient, and a patient support mechanism and a system for adjusting the apparatus part and the patient support mechanism relative to each other. The system simultaneously adjusts the apparatus part at a first adjustment speed in a first direction and the patient support mechanism at a second adjustment speed in a second direction, with the first and second adjustment speeds having a fixed constant relationship, so that the apparatus part and the patient support mechanism are caused to execute a motion in a third direction relative to each other. The third direction can be selected to compensate for dislocations of the body of the patient which are anticipated upon the application of the apparatus part to the patient's body surface, so that the patient remains as stationary as possible.Type: GrantFiled: August 30, 1994Date of Patent: November 28, 1995Assignee: Siemens AktiengesellschaftInventors: Guenther Krauss, Klaus Herrmann
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Patent number: 5468214Abstract: A therapy apparatus for treating a subject with acoustic waves has a source of acoustic waves which is adjustable in at least one degree of freedom. The apparatus includes at least one further apparatus component, which is disposed remote from the source of acoustic waves, and which is connected to the source of acoustic waves via at least one line, which may be an electrical line or a fluid line. The apparatus component is adjustable in common with the source of acoustic waves so that the distance between the source of acoustic waves and the apparatus component does not change as a consequence of the adjustment.Type: GrantFiled: March 21, 1995Date of Patent: November 21, 1995Assignee: Siemens AktiengesellschaftInventors: Klaus Herrmann, Guenther Krauss
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Patent number: 5395299Abstract: A therapy apparatus has a source of acoustic waves which generates acoustic waves focused onto a focus and which has an x-ray-transparent region, and the focus lying in an isocenter and an x-ray locating system whose central ray proceeds through the isocenter and is adjustable relative to the source in a locating sequence such that a subject to be treated is irradiated by locating radiation from different directions, with the central ray in one of the irradiation directions proceeding through the x-ray transparent region and the acoustic wave source is maintained stationary during the sequence. A corresponding method is also disclosed.Type: GrantFiled: February 4, 1994Date of Patent: March 7, 1995Assignee: Siemens AktiengesellschaftInventors: Klaus Herrmann, Guenther Krauss
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Patent number: 5329926Abstract: A therapy station for treatment of a patient with focused acoustic waves has a source of focused acoustic waves attached to a source carrier, an x-ray carrier carrying an x-ray locating system, and a support table for the patient. The x-ray carrier is pivotably attached to the source carrier so as to be pivotable relative to the source of acoustic waves and such that the central ray of the x-ray locating system always proceeds through the focus of the focused acoustic waves, and the source carrier is adjustable relative to the support table in a plane.Type: GrantFiled: August 2, 1993Date of Patent: July 19, 1994Assignee: Siemens AktiengesellschaftInventors: Klaus Herrmann, Guenther Krauss, Peter Noegel