Patents by Inventor Guenther Pfeiler

Guenther Pfeiler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer with optical control modules in exposure fields
    Patent number: 7538444
    Abstract: In a wafer (1) with a number of exposure fields (2), each of which exposure fields (2) comprising a number of lattice fields (3) with an IC (4) located therein, two groups (5, 7) of dicing paths (6, 8) are provided and four control module fields (A1, A2, A3, A4, B1, B2, B3, B4, C2, C4, D2, D4, E1, E3, F1, F3, G2, H1, J1) are assigned to each exposure field (2), each of which control module fields (A1, A2, A3, A4, B1, B2, B3, B4, C2, C4, D2, D4, E1, E3, F1, F3, G2, H1, J1) contains at least one optical control module (OCM-A1, OCMA2, OCM-A3, OCM-A4, OCM-B1, OCM-B2, OCM-B3, OCM-B4, OCM-C2, OCM-D4) and lies within the exposure field (2) in question and is provided in place of at least one lattice field (3) and is arranged at a mutual minimum distance (K).
    Type: Grant
    Filed: December 9, 2004
    Date of Patent: May 26, 2009
    Inventors: Heimo Scheucher, Guenther Pfeiler, Rik Wenting
  • Wafer with optical control modules in exposure fields
    Publication number: 20070152303
    Abstract: In a wafer (1) with a number of exposure fields (2), each of which exposure fields (2) comprising a number of lattice fields (3) with an IC (4) located therein, two groups (5, 7) of dicing paths (6, 8) are provided and four control module fields (A1, A2, A3, A4, B1, B2, B3, B4, C2, C4, D2, D4, E1, E3, F1, F3, G2, H1, J1) are assigned to each exposure field (2), each of which control module fields (A1, A2, A3, A4, B1, B2, B3, B4, C2, C4, D2, D4, E1, E3, F1, F3, G2, H1, J1) contains at least one optical control module (OCM-A1, OCMA2, OCM-A3, OCM-A4, OCM-B1, OCM-B2, OCM-B3, OCM-B4, OCM-C2, OCM-D4) and lies within the exposure field (2) in question and is provided in place of at least one lattice field (3) and is arranged at a mutual minimum distance (K).
    Type: Application
    Filed: December 9, 2004
    Publication date: July 5, 2007
    Inventors: Heimo Scheucher, Guenther Pfeiler, Rik Wenting