Abstract: An operating device for a motor vehicle, having a touch-sensitive operating element with a frame element and a central region. The touch-sensitive operating interface has a predetermined operating region at each of at least two predetermined touch positions for activating an operating function assigned to the respective operating region. The operating element is arranged to be displaceable at least partially along a translation axis that intersects the operating interface. The operating device has only one detection element, which is arranged facing an inner side of the touch-sensitive operating element that faces away from the touch-sensitive operating interface, and which is arranged to detect a displacement of each operating region along the translation axis.

Abstract: An operating device for a motor vehicle, having a touch-sensitive operating element with a frame element and a central region. The touch-sensitive operating interface has a predetermined operating region at each of at least two predetermined touch positions for activating an operating function assigned to the respective operating region. The operating element is arranged to be displaceable at least partially along a translation axis that intersects the operating interface. The operating device has only one detection element, which is arranged facing an inner side of the touch-sensitive operating element that faces away from the touch-sensitive operating interface, and which is arranged to detect a displacement of each operating region along the translation axis.

Abstract: In a motor vehicle having motor vehicle exterior lighting devices and an operator control device, the following lighting modes of the motor vehicle exterior lighting devices can be set: deactivated, parking light, daytime running light, forwarding lighting, and automatic mode in which the motor vehicle exterior lighting devices are operated by an automatic forward light controller. The operator control device further has a single monostable operator control element by which the lighting modes can be set; or the operator control device has a monostable operator control element by which the deactivated, parking light, daytime running light and forward lighting lighting modes can be set. The operator control device has a pushbutton key or a toggle lever by which the automatic mode can be set.

Abstract: In a motor vehicle having motor vehicle exterior lighting devices and an operator control device, the following lighting modes of the motor vehicle exterior lighting devices can be set: deactivated, parking light, daytime running light, forwarding lighting, and automatic mode in which the motor vehicle exterior lighting devices are operated by an automatic forward light controller. The operator control device has a single monostable operator control element by which the lighting modes can be set; or the operator control device has a monostable operator control element by which the deactivated, parking light, daytime running light and forward lighting lighting modes can be set. The operator control device has a pushbutton key or a toggle lever by which the automatic mode can be set.

Abstract: A method of manufacturing an optical component comprising a substrate and a mounting frame with plural contact portions disposed at predetermined distances from each other is provided. The method comprises providing a measuring frame separate from the mounting frame for mounting the substrate, which measuring frame comprises a number of contact portions equal to a number of the contact portions of the mounting frame, wherein respective distances between the contact portions of the measuring frame are substantially equal to the corresponding distances between those of the mounting frame, measuring a shape of the optical surface of the substrate, while the substrate is mounted on the measuring frame, and mounting the substrate on the mounting frame such that the contact portions of the mounting frame are attached to the substrate at regions which are substantially the same as contact regions at which the substrate was attached to the measuring frame.

Abstract: A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective includes a first mirror (S1), a second mirror (S2), a third mirror (S3), a fourth mirror (S4), a fifth mirror (S5), a sixth mirror (S6), a seventh mirror (S7), and an eighth mirror (S8). The light bundles includes light with a wavelength in a range of 10-30 nm. The light is provided via the eight mirrors, and in the light path exactly one intermediate image of the object field is provided.

Abstract: A mirror for use in a projection exposure apparatus is described. The mirror has a main surface extending beyond an outline of an optical surface of the main surface. The optical surface has a roughness of less than 1 nm rms, and the outline of the optical surface includes a portion where the main surface extends beyond the optical surface by less than 0.2 mm. Manufacturing the mirror may involve polishing the optical surface in regions of the main surface extending beyond the optical surface and removing material of the substrate carrying a portion of the surface extending beyond the optical surface.

Abstract: A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective includes eight mirrors. The light path is provided via the eight mirrors, and is free of obscuration.

Abstract: The method serves for the interferometric measurement of non-rotationally symmetric wavefront errors on a specimen . The specimen is brought into a number of rotational positions, at least one measurement result being determined in each of the rotational positions and a mathematical evaluation of all measurement results is performed. The measurement results (M1 . . . Mm; N1 . . . Nn) of each of the measurement series (M, N) are determined respectively in mutually equidistant rotational positions of the specimen . The measurement results (M1 . . . Mm, N1 . . . Nn) of each of the at least two measurement series (M, N) are evaluated independently of one another for non-rotationally symmetric wavefront errors (<W>m, <W>n) on the specimen, and a difference is computationally rotated m or n times and the results averaged out. At least one of the wavefront errors (<W>m, <W>n) is corrected with the result (<<W>m-<W>n>m or <<W>m-<W>n>n) averaged in this way.

Abstract: There is provided a microlithographic projector lens for EUV-lithography with a wavelegth in a range of 10–30 nm, an incident aperture diaphragm and an emergent aperture diaphragm for the transformation of an object field in an object plane into an image field in an image plane. The invention has a microlithographic projector lens that includes a first, second, third, fourth, fifth, sixth, seventh and eighth mirror, and a beam path from the object plane to the image plane that is free from obscuration.

Abstract: A method of manufacturing an optical element having an optical surface extending close to a periphery of a substrate comprises: providing a substrate having a main surface extending beyond a periphery of the optical surface and also performing a polishing of the optical surface in regions of the main surface extending beyond the optical surface. Thereafter, material of the substrate carrying a portion of the surface extending beyond the optical surface is removed.

Abstract: A method of manufacturing an optical component comprising a substrate and a mounting frame with plural contact portions disposed at predetermined distances from each other is provided. The method comprises providing a measuring frame separate from the mounting frame for mounting the substrate, which measuring frame comprises a number of contact portions equal to a number of the contact portions of the mounting frame, wherein respective distances between the contact portions of the measuring frame are substantially equal to the corresponding distances between those of the mounting frame, measuring a shape of the optical surface of the substrate, while the substrate is mounted on the measuring frame, and mounting the substrate on the mounting frame such that the contact portions of the mounting frame are attached to the substrate at regions which are substantially the same as contact regions at which the substrate was attached to the measuring frame.

Abstract: A method of processing an optical element comprises testing the optical surface of the optical element using an interferometer optics for generating a beam of measuring light; wherein the interferometer optics has a plurality of optical elements which are configured and arranged such that the measuring light is substantially orthogonally incident on a reflecting surface, at each location thereof; and wherein the method further comprises: measuring at least one property of the interferometer optics, disposing the optical surface of the optical element at a measuring position relative to the interferometer optics within the beam of measuring light, and performing at least one interferometric measurement; determining deviations of the optical surface of the first optical element from a target shape thereof, based on the interferometric measurement and the at least one measured property of the interferometer optics.

Abstract: The method serves for the interferometric measurement of non-rotationally symmetric wavefront errors on a specimen (1). The specimen (1) is brought in this case into a number of rotational positions, at least one measurement result being determined in each of the rotational positions. In conclusion, a mathematical evaluation of all measurement results is performed. The measurement is carried out in at least two measurement series (M, N). The measurement results (M1 . . . Mm; N1 . . . Nn) of each of the measurement series (M, N) are determined respectively in mutually equidistant rotational positions of the specimen (1). Each of the measurement series (M, N) comprises a specific number (m, n) of measurements. The individual numbers (m, n) are natural and mutually coprime numbers. The measurement results (M1 . . . Mm, N1 . . .

Abstract: A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective comprises a first mirror (S1), a second mirror (S2), a third mirror (S3), a fourth mirror (S4), a fifth mirror (S5), a sixth mirror (S6), a seventh mirror (S7), and an eighth mirror (S8). The light path is provided via the eight mirrors, the light bundle includes light with a wavelength in the range of 10-30 nm, and the light path is free of shading.