Abstract: A semiconductor processing system includes a chamber body, a gate valve abutting the chamber body, and a controller. The controller operably connected to the gate valve and responsive to instructions recorded on a memory to open the gate valve to load a substrate into the chamber body, close the gate valve to deposit a material layer onto the loaded substrate, and open the gate valve to unload the substrate with the material layer deposited thereon. One or more load operation to load the substrate into the chamber body is executed prior to loading the substrate into the chamber body, and one or more unload operation to unload the substrate with the material layer deposited thereon is executed prior to unloading the substrate from the chamber body. Methods of loading and unloading a substrate into and out of the chamber body and computer program products are also described.

Abstract: A torque wrench is provided that includes a wrench body, wrench head, slide rod and toggle link. The wrench head includes a workpiece engaging end and an arm that extends from the workpiece engaging end, and the wrench head is pivotably connected to the wrench body such that the arm extends inwardly into the wrench body. The slide rod is disposed within the wrench body, arranged in parallel with the arm, and configured to move axially within the wrench body. The slide rod includes a roller located proximate a first end of the slide rod, and the roller is in sliding contact with an interior surface of the wrench body. The toggle link is pivotably connected to the arm and the slide rod, with the toggle link pivotably connected to the slide rod at a greater distance from the first end of the slide rod than the roller.

Abstract: Embodiments of the present disclosure provide a method and apparatus for recognizing speech. An embodiment of the method includes: in response to detecting a speech frame, converting the speech frame into a current text in real time; in response to there being no previously saved historical text, inputting the current text into a semantic parsing model to obtain a parsing result; in response to the parsing result including a valid intention slot, ending a speech endpoint detection to complete the recognition; and outputting an instruction corresponding to the valid intention slot.

Abstract: Embodiments of the present disclosure provide a method and apparatus for recognizing speech. An embodiment of the method includes: in response to detecting a speech frame, converting the speech frame into a current text in real time; in response to there being no previously saved historical text, inputting the current text into a semantic parsing model to obtain a parsing result; in response to the parsing result including a valid intention slot, ending a speech endpoint detection to complete the recognition; and outputting an instruction corresponding to the valid intention slot.