Patents by Inventor Guido do Boer

Guido do Boer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INTERFEROMETER MODULE
    Publication number: 20120250026
    Abstract: The invention relates to a differential interferometer module adapted for measuring a direction of displacement between a reference mirror and a measurement mirror. In an embodiment the differential interferometer module is adapted for emitting three reference beams towards a first mirror and three measurement beams towards a second mirror for determining a displacement between said first and second mirror. In a preferred embodiment the same module is adapted for measuring a relative rotation around two perpendicular axes as well. The present invention further relates to a lithography system comprising such a interferometer module and a method for measuring such a displacement and rotations.
    Type: Application
    Filed: March 30, 2012
    Publication date: October 4, 2012
    Inventors: Guido do Boer, Thomas Adrian Ooms, Niels Vergeer, Godefridus Cornelius Antonius Couweleers