Patents by Inventor Guido Rademaker

Guido Rademaker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining misalignment between a first and a second etching zones
    Patent number: 10211162
    Abstract: This method for measuring the misalignment between a first and a second etching zone includes: producing a plasmonic antenna including a first and a second element that are separate and each delineate a cavity on one respective side, all of the elements of the plasmonic antenna that are situated on a first side of a separating plane being produced entirely inside the first zone and all of the elements of the plasmonic antenna that are situated on the second side of the separating plane being produced entirely inside the second zone, and after the production of the plasmonic antenna, the method includes: measuring the absorption rate of the plasmonic antenna, and determining the magnitude of the misalignment between the first and second zones on the basis of the measured absorption rate and of a predicted value for this absorption rate in the absence of a misalignment.
    Type: Grant
    Filed: January 25, 2018
    Date of Patent: February 19, 2019
    Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Guido Rademaker, Salim Boutami, Jonathan Pradelles
  • METHOD FOR DETERMINING MISALIGNMENT BETWEEN A FIRST AND A SECOND ETCHING ZONES
    Publication number: 20180233456
    Abstract: This method for measuring the misalignment between a first and a second etching zone includes: producing a plasmonic antenna including a first and a second element that are separate and each delineate a cavity on one respective side, all of the elements of the plasmonic antenna that are situated on a first side of a separating plane being produced entirely inside the first zone and all of the elements of the plasmonic antenna that are situated on the second side of the separating plane being produced entirely inside the second zone, and after the production of the plasmonic antenna, the method includes: measuring the absorption rate of the plasmonic antenna, and determining the magnitude of the misalignment between the first and second zones on the basis of the measured absorption rate and of a predicted value for this absorption rate in the absence of a misalignment.
    Type: Application
    Filed: January 25, 2018
    Publication date: August 16, 2018
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Guido Rademaker, Salim Boutami, Jonathan Pradelles