Patents by Inventor Guido Salmaso

Guido Salmaso has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY
    Publication number: 20230314930
    Abstract: An apparatus for reducing a partially oxidized reticle and pellicle assembly, the apparatus including: a support; a hydrogen supply; and an electron source. The support is for supporting a reticle and pellicle assembly. The hydrogen supply is operable to supply hydrogen in the vicinity of a pellicle of a reticle and pellicle assembly when supported by the support. The electron source is operable to direct electrons so as to be incident on a pellicle of a reticle and pellicle assembly when supported by the support.
    Type: Application
    Filed: July 29, 2021
    Publication date: October 5, 2023
    Inventors: Vadim Yevgenyevich BANINE, Paul Alexander VERMEULEN, Cornelis Adrianus DE MEIJERE, Johnnes Hubertus Josephina MOORS, Andrey NIKIPELOV, Guido SALMASO, Marcus Adrianus VAN DE KERKHOF, Parham YAGHOOBI
  • PELLICLE FOR EUV LITHOGRAPHY
    Publication number: 20210240070
    Abstract: A wafer including a mask on one face and at least one layer on an opposite face, wherein the mask has at least one scribeline which overlies at least a portion of the opposite face which is substantially free of the at least one layer is described. Also described is a method of preparing a pellicle, the method including: providing a wafer having a mask on one face and at least one layer on an opposite face, defining a scribeline in the mask, and selectively removing a portion of the at least one layer which at least partially overlies the scribeline as well as a method of preparing a pellicle, the method including: providing a pellicle core, and removing at least some material from at least one face of the pellicle core in a non-oxidising environment. In any aspect, the pellicle may include a metal nitride layer.
    Type: Application
    Filed: April 12, 2019
    Publication date: August 5, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Dennis DE GRAAF, Richard BEAUDRY, Maxime BIRON, Paul JANSSEN, Thijs KATER, Kevin KORNELSEN, Michael Alfred Josephus KUIJKEN, Jan Hendrik Willem KUNTZEL, Stephane MARTEL, Maxim Aleksandrovich NASALEVICH, Guido SALMASO, Pieter-Jan VAN ZWOL
  • METHOD OF FORMING A WAVELENGTH CONVERTED LIGHT EMITTING DEVICE
    Publication number: 20170331011
    Abstract: A method according to embodiments of the invention includes disposing a support layer on a surface of a wavelength converting ceramic wafer. The wavelength converting ceramic wafer and the support layer are diced to form wavelength converting members. A wavelength converting member is attached to a light emitting device. After attaching the wavelength converting member to the light emitting device, the support layer is removed.
    Type: Application
    Filed: May 26, 2017
    Publication date: November 16, 2017
    Inventors: April Dawn Schricker, Oleg Borisovich Shchekin, Kenneth Vampola, Hans-Helmut Bechtel, Guido Salmaso
  • Method of forming a wavelength converted light emitting device
    Patent number: 9666771
    Abstract: A method according to embodiments of the invention includes disposing a support layer (32) on a surface of a wavelength converting ceramic wafer (30). The wavelength converting ceramic wafer and the support layer are diced (42) to form wavelength converting members. A wavelength converting member is attached to a light emitting device. After attaching the wavelength converting member to the light emitting device, the support layer is removed.
    Type: Grant
    Filed: January 20, 2015
    Date of Patent: May 30, 2017
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: April Dawn Schricker, Oleg Borisovich Shchekin, Kenneth Vampola, Hans-Helmut Bechtel, Guido Salmaso
  • METHOD OF FORMING A WAVELENGTH CONVERTED LIGHT EMITTING DEVICE
    Publication number: 20170012183
    Abstract: A method according to embodiments of the invention includes disposing a support layer (32) on a surface of a wavelength converting ceramic wafer (30). The wavelength converting ceramic wafer and the support layer are diced (42) to form wavelength converting members. A wavelength converting member is attached to a light emitting device. After attaching the wavelength converting member to the light emitting device, the support layer is removed.
    Type: Application
    Filed: January 20, 2015
    Publication date: January 12, 2017
    Inventors: April Dawn Schricker, Oleg Borisovich Shchekin, Kenneth Vampola, Hans-Helmut Bechtel, Guido Salmaso