Abstract: A device for depositing a thick metal nitride on a sample by supercritical fluids includes a first enclosure forming a first closed volume; a second enclosure placed in the first enclosure and delimited by internal walls transparent to electromagnetic radiation forming a second closed volume intended to include fluid under supercritical conditions; a heat transfer dielectric fluid circulating in the first volume around the second enclosure; a sample holder present in the second volume; an induction heating device surrounding the second enclosure; inlets for introducing a fluid and at least one precursor material into the second enclosure, and an outlet to purge the second volume.

Abstract: A method for cleaning at least one filter material, in particular a filter material used in the production of a respiratory protection mask (M), comprising the step of subjecting this filter material to a supercritical fluid, preferably supercritical CO2, with a density of less than 0.3 g/ml.