Abstract: The invention relates to a device for the supply of special gas that can be mounted on a gas cylinder. The device comprises a multi-function unit housing a fluid circuit comprising a single high-pressure regulator; a purge system consisting of three low-pressure valves; a fluidic connection with the inner space of a cylinder; and an outlet enabling equipment to be supplied with gas. The invention is characterized in that the high-pressure regulator is arranged upstream of the purge system.

Abstract: The invention relates to a device for the supply of special gas, that can be mounted on a gas cylinder and comprises: a multi-function unit housing a fluid circuit comprising a single high-pressure regulator; a purge system consisting of three low-pressure valves; a means for fluidic connection towards the inner space of a cylinder; and an outlet enabling equipment to be supplied with gas. The invention is characterised in that the high-pressure regulator is arranged upstream of the purge system.

Abstract: The present invention relates to a method for distributing products, in particular pyrophoric, from a storage point to a use point. According to the invention, an inert gas is bubbled through the product, in particular pyrophoric, to be purified in the liquid state in order to generate a mixture, the mixture is preferably routed close to the use point, the product, in particular pyrophoric, is separated from the inert gas and from some light impurities, to generate a purified final product, in particular pyrophoric, in liquid or solid form. The purified product is supplied in a quantity just necessary to the use point, particularly when it is solidified in the heat exchanger after the transport of the mixture.

Abstract: The invention relates to a system for delivering gas stored in a vessel in liquefied form, said vessel having in its lower part a liquefied phase of said gas and in the upper part a gaseous phase of said gas, which vessel includes a means for connecting to a means for utilization as well as a means for heating the lower part of said vessel. In accordance with the invention, the liquefied gas and/or the shell of the vessel are electrically conductive elements and the means for heating comprises an electromagnetic induction means capable of producing an alternating magnetic field in the shell and/or the liquid so as to heat the shell in its lower part and/or the liquid in the vessel, all while limiting the heating of the gas by said means.

Abstract: Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks.

Abstract: Liquid precursor refill systems of the type typically used in the semiconductor industry. A remote precursor reservoir and a secondary vapor delivery system provide a CVD precursor to a local source. The local source contains a heat transfer means and a local CVD precursor reservoir. A delivery line connects this remote, secondary vapor delivery system and the local heat transfer means. During the constant or periodic operation, no liquid is present in the delivery line. The local CVD precursor reservoir may serve as an ampoule in a bubbler system, or may provide CVD precursor to an ampoule in a bubbler system.

Abstract: A method and an apparatus for measuring the amount of liquid in a container, and for causing the liquid to flow from the container to a point of use. The weight of the container is measured at several time intervals to determine the weight change of the liquid contained within. When the weight change is less than a predetermined fraction of either the weight of container weight and/or of the liquid originally contained in the container, a signal is generated to indicate that the container may be empty.

Abstract: The invention relates to a system for delivering gas stored in a vessel in liquefied form, said vessel having in its lower part a liquefied phase of said gas and in the upper part a gaseous phase of said gas, which vessel includes a means for connecting to a means for utilization as well as a means for heating the lower part of said vessel. In accordance with the invention, the liquefied gas and/or the shell of the vessel are electrically conductive elements and the means for heating comprises magnetic induction means capable of producing an alternating magnetic field in the shell and/or the liquid so as to heat the shell in its lower part and/or the liquid in the vessel, all while limiting the heating of the gas by the said means.

Abstract: Method for measuring the amount of liquid in a container, especially comprising means for making said liquid flow from said container to a point of use, in which the weight Pi in the container is measured at a time ti, this measurement being repeated at predetermined time intervals. The weight change &Dgr;Pi=Pi−Pi+1 of liquid between times ti and ti+1, thus i=0, 1, . . . n−1, is also measured so as to generate a signal indicating that the container may be considered as being empty when &Dgr;Pi is less than a predetermined fraction of the weight of the container and/or of the liquid initially contained in the latter.

Abstract: Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks.