Patents by Inventor Guillaume Rodriguez

Guillaume Rodriguez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11749807
    Abstract: A microelectronic device is provided, including: a support; and an electrically conductive element including in a stack and successively above a first face of the support, a first layer based on a metal and a second layer, in contact with the first layer, based on a material selected from among MoSi and WSiy. A method for manufacturing the microelectronic device is also provided.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: September 5, 2023
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Guillaume Rodriguez, Christophe Dubarry, Aomar Halimaoui, Magali Tessaire
  • Publication number: 20230216474
    Abstract: An electroacoustic device includes, stacked in a direction a silicon-based substrate, a first electrode, a piezoelectric layer with the basis of a perovskite taken from among lithium niobate LiNbO3, lithium tantalum LiTaO3, or an Li(Nb,Ta)O3 alloy, on the first electrode, a second electrode disposed on the piezoelectric layer. Advantageously, the first electrode is made of a nitride-based electrically conductive refractory material, such as TiN, VN, TaN. The invention also relates to a method for producing such a device.
    Type: Application
    Filed: December 5, 2022
    Publication date: July 6, 2023
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Florian DUPONT, Guillaume RODRIGUEZ
  • Publication number: 20230179165
    Abstract: A method for forming a lithium niobate- or lithium tantalum-based (LN/LT) layer includes providing a silicon-based substrate, forming nucleation layer on the substrate, and forming the LN/LT layer by epitaxy on the nucleation layer. The nucleation layer is chosen based upon a III-N material. The nucleation layer may be used in a surface acoustic wave device.
    Type: Application
    Filed: December 5, 2022
    Publication date: June 8, 2023
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Florian DUPONT, Guillaume RODRIGUEZ, Laura SAUZE
  • Publication number: 20210257623
    Abstract: A microelectronic device is provided, including: a support; and an electrically conductive element including in a stack and successively above a first face of the support, a first layer based on a metal and a second layer, in contact with the first layer, based on a material selected from among MoSi and WSiy. A method for manufacturing the microelectronic device is also provided.
    Type: Application
    Filed: November 13, 2020
    Publication date: August 19, 2021
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Guillaume RODRIGUEZ, Christophe DUBARRY, Aomar HALIMAOUI, Magali TESSAIRE
  • Publication number: 20200044138
    Abstract: A piezoelectric device includes at least one upper layer of piezoelectric material based on alkali metal niobate and one lower layer of metal located above a substrate, wherein it comprises a barrier layer of material that is a barrier to the diffusion of alkali metals into the metal and that is inert to the alkali metals of the niobite, the barrier material layer being located between the lower layer of metal and the upper layer of piezoelectric material. A process for producing the device is also provided.
    Type: Application
    Filed: July 31, 2019
    Publication date: February 6, 2020
    Inventors: Aomar HALIMAOUI, Cécile MOULIN, Guillaume RODRIGUEZ
  • Patent number: 10403597
    Abstract: A bonding between a first substrate and a second substrate, the method includes the steps of: a) providing the first substrate and the second substrate, b) forming a first bonding layer having tungsten oxide on the first substrate and a second bonding layer having tungsten oxide on the second substrate, at least one of the first bonding layer and of the second bonding layer including a third element M so as to form an MWxOy-type alloy, the atomic content of M in the composition of the alloy being between 0.5 and 20% and preferably between 1 and 10%, c) carrying out a direct bonding between the first bonding layer and the second bonding layer, and d) performing a heat treatment at a temperature greater than 250° C.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: September 3, 2019
    Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Paul Gondcharton, Lamine Benaissa, Bruno Imbert, Guillaume Rodriguez, Chiara Sabbione
  • Patent number: 10319806
    Abstract: The electrode for a structure of Metal-Insulator-Metal type is formed by a stack successively comprising a gold layer, a barrier layer made from electrically conducting oxide and a platinum layer. The electrically conducting oxide is advantageously a noble metal oxide, and preferentially ruthenium oxide. The electrode is arranged on a substrate. The gold layer of the electrode is separated from the substrate by an adhesion layer made from titanium dioxide. The electrode is used to fabricate a capacitor of Metal-Insulator-Metal type.
    Type: Grant
    Filed: July 27, 2016
    Date of Patent: June 11, 2019
    Assignees: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, STMICROELECTRONICS (CROLLES 2) SAS
    Inventors: Guillaume Rodriguez, Aomar Halimaoui, Laurent Ortiz
  • Publication number: 20180218999
    Abstract: A bonding between a first substrate and a second substrate, the method includes the steps of: a) providing the first substrate and the second substrate, b) forming a first bonding layer having tungsten oxide on the first substrate and a second bonding layer having tungsten oxide on the second substrate, at least one of the first bonding layer and of the second bonding layer including a third element M so as to form an MWxOy-type alloy, the atomic content of M in the composition of the alloy being between 0.5 and 20% and preferably between 1 and 10%, c) carrying out a direct bonding between the first bonding layer and the second bonding layer, and d) performing a heat treatment at a temperature greater than 250° C.
    Type: Application
    Filed: June 29, 2016
    Publication date: August 2, 2018
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Paul GONDCHARTON, Lamine BENAISSA, Bruno IMBERT, Guillaume RODRIGUEZ, Chiara SABBIONE
  • Publication number: 20170033174
    Abstract: The electrode for a structure of Metal-Insulator-Metal type is formed by a stack successively comprising a gold layer, a barrier layer made from electrically conducting oxide and a platinum layer. The electrically conducting oxide is advantageously a noble metal oxide, and preferentially ruthenium oxide. The electrode is arranged on a substrate. The gold layer of the electrode is separated from the substrate by an adhesion layer made from titanium dioxide. The electrode is used to fabricate a capacitor of Metal-Insulator-Metal type.
    Type: Application
    Filed: July 27, 2016
    Publication date: February 2, 2017
    Applicants: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, STMICROELECTRONICS (CROLLES 2) SAS
    Inventors: Guillaume RODRIGUEZ, Aomar HALIMAOUI, Laurent ORTIZ
  • Patent number: 9051173
    Abstract: A treatment method for a getter material is provided, including forming a protective layer on the thin layer getter material by performing at least one oxidation and/or nitriding step of the thin layer getter material conducted under dry atmosphere of dioxygen and/or dinitrogen, wherein the protective layer is composed of oxide and/or nitride of the thin layer getter material, and wherein a thickness of the protective layer is between approximately 1 nm and 10 nm.
    Type: Grant
    Filed: October 5, 2010
    Date of Patent: June 9, 2015
    Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
    Inventors: Xavier Baillin, Emmanuelle Lagoutte, Guillaume Rodriguez
  • Publication number: 20110079425
    Abstract: A treatment method for a getter material, comprising at least one oxidation and/or nitriding step of getter material conducted under dry atmosphere of dioxygen and/or dinitrogen at pressure greater than approximately 10?2 mbar and at a temperature between approximately 50° C. and 120° C. and over a period between approximately 1 minute and 10 minutes, forming a protective layer composed of oxide and/or nitride of getter material.
    Type: Application
    Filed: October 5, 2010
    Publication date: April 7, 2011
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
    Inventors: Xavier BAILLIN, Emmanuelle Lagoutte, Guillaume Rodriguez