Patents by Inventor Gunes NAKIBOGLU

Gunes NAKIBOGLU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20160349631
    Abstract: A lithographic apparatus including a barrier system and a device manufacturing method using such a lithographic apparatus. The barrier system is used to maintain a protected volume of gas within a barrier. The protected volume may be maintained when different components of the lithographic apparatus move relative to each other. The barrier system may be used in different locations within the lithographic apparatus. The geometry of the barrier affects how efficiently the protected volume is maintained, especially at high speeds. The geometry reduces the amount of ambient gas entering the protected volume from outside the barrier.
    Type: Application
    Filed: January 20, 2015
    Publication date: December 1, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Günes NAKIBOGLU, Martijn VAN BAREN, Frank Johannes Jacobs VAN BOXTEL, Koen CUYPERS, Jeroen Gerard GOSEN, Laurentius Johannes Adrianus VAN BOKHOVEN