Abstract: The present disclosure provides a deflection device (100, 200, 300, 400) for use in a scanner. The deflection device (100, 200, 300, 400) includes a substrate (102, 202), a mirror (106, 206, 304, 404) and actuator means (110). The mirror (106, 206, 304, 404) arranged in a recess (104, 204, 306, 406) in the substrate (102, 202) by connector means (108) in such a way that it can rotate about at least two axes in an oscillatory manner. The actuator means (110) causes the mirror (106, 206, 304, 404) to oscillate. The actuator means (110) are arranged in one or more trenches (112A-D) in the substrate (102, 202) surrounding the recess (104, 204, 306, 406), in such a way that a change of shape of the actuator means (110) will cause a movement in the substrate (102, 202), thereby inducing oscillatory movement of the mirror (106, 206, 304, 404).