Patents by Inventor Gunter Ehrler

Gunter Ehrler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20040067650
    Abstract: A method for manufacturing a housing for a chip having a micromechanical structure is primarily based on a first basis comprising a photolithograpically structurable layer on at least one partial region of a main face. The same is structured in order to obtain a cover for the micromechanical structure. Further, a chip comprising the micromechanical structure is provided, which is arranged at a main face of the chip between the first contact elements. A second photolithograpically structurable layer is applied to at least one partial region of the main face of the chip and is structured for generating a recess in the same surrounded by a wall in the region of the micromechanical structure and for exposing the first contact elements. After that, the first basis and the chip are merged such that the micromechanical structure and the cover are facing each other and are aligned with each other, so that the recess is closed by the cover. Removing the first basis leads to a chip comprising an on-chip cavity.
    Type: Application
    Filed: October 2, 2003
    Publication date: April 8, 2004
    Inventors: Frank Dache, Jochen Dangelmaier, Gunter Ehrler, Andreas Meckes, Michael Weber