Patents by Inventor Gunter Kemmerer

Gunter Kemmerer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for reactive sputtering
    Publication number: 20050211550
    Abstract: A device for reactive sputtering, wherein a cathode is applied a discharge voltage for a plasma, and a working gas and a reactive gas are introduced into a sputter chamber. The total gas flow in the sputter chamber is controlled with the aid of a valve, while the ratio of the partial pressures of both gases is kept constant.
    Type: Application
    Filed: August 12, 2004
    Publication date: September 29, 2005
    Inventors: Thomas Fritz, Gunter Kemmerer