Patents by Inventor Gunter Klemm
Gunter Klemm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20160045934Abstract: A method of processing a flexible substrate includes providing a flexible substrate having a polymerized surface; emitting an electron beam; exposing the polymerized surface to the electron beam; modifying the polymerized surface by the exposure to the electron beam; and depositing a barrier layer on the modified surface.Type: ApplicationFiled: August 3, 2015Publication date: February 18, 2016Inventors: Gerd HOFFMANN, Günter KLEMM, Hans-Georg LOTZ, Alexander WOLFF
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Publication number: 20140227455Abstract: A method of processing a flexible substrate includes providing a flexible substrate having a polymerized surface; emitting an electron beam; exposing the polymerized surface to the electron beam; modifying the polymerized surface by the exposure to the electron beam; and depositing a barrier layer on the modified surface.Type: ApplicationFiled: July 5, 2011Publication date: August 14, 2014Applicant: APPLIED MATERIALS, INC.Inventors: Gerd Hoffmann, Günter Klemm, Hans-Georg Lotz, Alexander Wolff
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Patent number: 7808183Abstract: An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.Type: GrantFiled: March 10, 2006Date of Patent: October 5, 2010Assignees: Applied Materials GmbH & Co. KG, ALD Vacuum Technologies GmbHInventors: Günter Klemm, Andreas Thiede, Hans-Jürgen Schneider
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Publication number: 20070089676Abstract: The invention relates to an arrangement for the vapor deposition on substrates. It includes a pan as well as a cover with linearly disposed bores. Above this cover is seated a seal-off device, which also includes openings. Through the seal-off device the bores of the cover can be opened or closed, all bores being addressed simultaneously. Through the seal-off device different evaporation rates can be set within an extremely short time.Type: ApplicationFiled: June 2, 2006Publication date: April 26, 2007Inventor: Gunter Klemm
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Patent number: 7188757Abstract: An expander roller for the wrinkle-free guidance of webs in closed chambers comprises two stationary supporting bodies (7, 8) which are oriented with respect to one another at an obtuse angle in the proximity of a center plane (E—E). On both sides of the center plane (E—E) on the supporting bodies (7, 8) are disposed roller sections (12) with surfaces in the form of truncated cones with shell lines (M1, M2) and which during their rotation pass through positions in which said shell lines (M1, M2) are aligned with one another. The surfaces (12a) of the rollers are herein steplessly in line one with the other in succession and the rollers are supported via roller bearings in groups (10, 11) on the two supporting bodies (7, 8).Type: GrantFiled: March 16, 2005Date of Patent: March 13, 2007Assignee: Applied Materials GmbH & Co. KGInventors: Stefan Hein, Gunter Klemm, Wolfgang Klein
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Publication number: 20070028629Abstract: The invention relates to an evaporator arrangement with a crucible, wherein the crucible is divided into at least two zones, each of which is heated to different temperatures. The first zone is a melt-down zone and the second zone the evaporation zone proper. The evaporator arrangement is preferably for the evaporation of metals. If metals are evaporated, a metal wire is preferably guided into the melt-down zone. However, metal alloys can also be evaporated thereby that one or several metal wires comprised of different materials are guided into the melt-down zone. Between the melt-down zone and the evaporator zone a heating zone may be provided.Type: ApplicationFiled: June 8, 2006Publication date: February 8, 2007Inventors: Gunter Klemm, Marcus Bender, Ulrich Englert, Andreas Kloppel, Uwe Hoffmann, Hans-Georg Lotz, Stefan Hein, Stefan Keller
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Publication number: 20070022955Abstract: A vapor deposition device for the vapor deposition of a substrate, and specifically particular of a substrate comprising heat-sensitive substances, for example OLEDs. To keep heat away from these substances, the vapor deposition device includes an evaporator tube with a special nozzle bar. This nozzle bar, which comprises several linearly arranged openings, projects with respect to the evaporator tube in the direction toward the substrate to be coated.Type: ApplicationFiled: March 17, 2006Publication date: February 1, 2007Inventors: Marcus Bender, Uwe Hoffmann, Gunter Klemm, Dieter Haas, Ulrich Englert
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Publication number: 20070022956Abstract: An evaporator device for coating substrates, in particular for applying an aluminum layer of OLEDs. To attain high evaporator tube temperatures, such as are required for example for the vaporization of materials with low vapor pressure, the heating system is placed into the interior of the evaporator tube. The thermal losses are thereby minimized and higher tube temperatures are possible at comparably coupled-in heating power.Type: ApplicationFiled: March 17, 2006Publication date: February 1, 2007Inventors: Marcus Bender, Uwe Hoffmann, Gunter Klemm, Dieter Haas, Ulrich Englert
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Publication number: 20060291825Abstract: The invention relates to an arrangement for vaporizing materials with a vaporizer crucible, in which is disposed the material to be vaporized. About the vaporizer crucible is placed a vaporizer tube, which, seen in the longitudinal direction of the vaporizer tube, comprises at least two heating circuits, spatially disposed one after the other and electrically controllable separately. Each of these heating circuits comprises at least two heating subcircuits, of which on is disposed on one side of the vaporizer tube and one on the other side of the vaporizer tube. The vaporizer tube is provided with a top portion which has its own heating circuit.Type: ApplicationFiled: December 13, 2004Publication date: December 28, 2006Inventors: Stefan Hein, Gunter Klemm, Peter Skuk
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Patent number: 7153372Abstract: Gas is introduced prior to a flooding process of a vacuum chamber of a vacuum installation, into coverings of elements, which coverings can be ventilated such that solid bodies are blown out of said coverings thereby preventing a penetration of said solid bodies into the coverings.Type: GrantFiled: February 3, 2005Date of Patent: December 26, 2006Assignee: Applied Materials GmbH & Co. KG.Inventors: Stefan Hein, Günter Klemm
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Publication number: 20060250092Abstract: An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.Type: ApplicationFiled: March 10, 2006Publication date: November 9, 2006Inventors: Gunter Klemm, Andreas Thiede, Hans-Jurgen Schneider
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Publication number: 20050211821Abstract: An expander roller for the wrinkle-free guidance of webs in closed chambers comprises two stationary supporting bodies (7, 8) which are oriented with respect to one another at an obtuse angle in the proximity of a center plane (E-E). On both sides of the center plane (E-E) on the supporting bodies (7, 8) are disposed roller sections (12) with surfaces in the form of truncated cones with shell lines (M1, M2) and which during their rotation pass through positions in which said shell lines (M1, M2) are aligned with one another. The surfaces (12a) of the rollers are herein steplessly in line one with the other in succession and the rollers are supported via roller bearings in groups (10, 11) on the two supporting bodies (7, 8).Type: ApplicationFiled: March 16, 2005Publication date: September 29, 2005Inventors: Stefan Hein, Gunter Klemm, Wolfgang Klein
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Publication number: 20050211273Abstract: Method for operating vacuum installations under pressure changes between operating pressure and ambient pressure, which comprise in a vacuum chamber (V) installed elements (13, 13a) from the group electronic components, transformers, motors, roller bearings and guide rollers, provided with ventilatable coverings, the guide rollers (12) being provided with roller bearings (24), secured within the coverings on supporting bodies (7, 8). To protect these installed elements (13,13a), including the guide rollers (12) and their roller bearings, against penetration of dust and other particles during the flooding of the vacuum chamber (V), it is proposed that before flooding the vacuum chamber (V) a gas is introduced into the coverings, through which solid bodies from the group dust and particles are blown out of the coverings and the penetration of solid bodies into the coverings is prevented.Type: ApplicationFiled: February 3, 2005Publication date: September 29, 2005Inventors: Stefan Hein, Gunter Klemm
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Patent number: 6309466Abstract: A method and apparatus for vapor depositing a release agent on a foil. The foil is wrapped around a cylindrical drum which is made of a porous material. The hollow inside of the drum forms a vapor space. The outer surface of the drum includes a thin metallic layer which has engraved or etched therein a pattern of surface passages. A vaporizer vessel provides a vaporized release agent which is conducted to the vapor space inside the drum. The release agent travels through the circumferential passages so as to be deposited in a pattern on the foil which is wrapped around the drum. A conforming body covers the circumferential surface not covered by the foil and can be heated to heat the drum.Type: GrantFiled: February 17, 2000Date of Patent: October 30, 2001Assignee: Leybold Systems GmbHInventors: Günter Klemm, Hans Neudert
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Patent number: 6189806Abstract: A metallizing device for vacuum metallizing arrangements is disclosed having a vaporizer (3) heated by an electrical heating rod (8). This vaporizer (3) is connected to a nozzle element (1) in the form of a hollow body. For the purpose of vaporizing a substrate, vapor flows out of the vaporizer (3) into the nozzle element (1) and from there out of a nozzle gap (2) toward the substrate.Type: GrantFiled: September 23, 1999Date of Patent: February 20, 2001Assignee: Leybold Systems GmbHInventors: Günter Klemm, Hans Neudert, Wolfgang Achtner
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Patent number: 5788769Abstract: A flat, elongate, trough-shaped part (8) made of an electrically conductive ceramic can be heated by the direct passage of current between clamping points at opposite ends. The trough-shaped part (8) being provided with openings (12) for reducing cross sectional area where increased ohmic heating is desired, such as near the clamping points and between individual areas where wire is fed for melting in the trough.Type: GrantFiled: February 21, 1997Date of Patent: August 4, 1998Assignee: Balzers und Leybold Deutschland Holding AGInventors: Wolfgang Achtner, Gunter Klemm
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Patent number: 5652022Abstract: An area of an insulating strip (3) which is to remain free of metal is covered by an endless cover strip (4), which rests on the insulating strip (3) and travels along with it at the same speed. Before it enters a vapor deposition zone (5), the cover strip is provided with a film of oil on the side facing the metal evaporator (6) and, after the cover strip (4) has passed through the vapor deposition zone (5) and after the cover strip (4) and the insulating strip (3) have been separated from each other, the oil which has been deposited from the vapor phase onto the cover strip (4) is removed by heating the cover strip (4) with a heater (7) installed in the immediate vicinity of the cover strip (4).Type: GrantFiled: July 22, 1996Date of Patent: July 29, 1997Assignee: Balzers Und Leybold Deutschland Holding AGInventors: Wolfgang Achtner, Thomas Vogt, Gunter Klemm, Detlef Eller
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Patent number: 4840238Abstract: In a scavenger is supplied through a scavenging pipe (26) to the internal pipe string (11), the scavenging pipe (25) extending through a bore (27) of the hammer piston (17) of the hammer drill. Due to a rotary drive (14), the drilling strings (10,11) are rotated which are connected to the shank (13) extending into the rotary drive (14). The scavenger is conducted through the scavenging pipe (26) into the shank (23) and from there into the internal pipe string (11). The external diameter of the scavenging pipe (26) is inferior to the inner diameter of the bore (27) of the hammer piston (17), and of the scavenging bore (23). Sealing between the scavenging pipe (26) and the scavenging bore (23) is effected by a thick head piece (33) at the end of the scavenging pipe. Said head piece (33) contains a seal rubbing along the cylindrical scavenging bore wall if the hammer piston (17) strikes on the shank (13).Type: GrantFiled: August 9, 1988Date of Patent: June 20, 1989Assignee: Ing. Gunter Klemm Spezialunternehmen fur BohrtechnikInventor: Gunter Klemm
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Patent number: 4719978Abstract: To rotate a pipe (17) to be urged into the ground, a rotary disk (20) clamped at said pipe (17) is pivotable on a table (19) which carries two groups of driving cylinders (40, 41). While the first group is operative to carry out the working stroke in order to turn the rotary disk (20) the return stroke is performed by the second group thus ensuring a continuous rotation of the rotary disk (20) or a standstill in one sense of rotation.Type: GrantFiled: December 2, 1986Date of Patent: January 19, 1988Assignee: Ing. Gunter Klemm Spezialunternehmen fur BohrtechnikInventor: Gunter Klemm
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Patent number: 4527641Abstract: In a percussion tool for rock drilling there is used in place of the conventional, large bore crown a hammer body (18) carrying a great number of interchangeable small bore crowns (26a,26b). The impact of a hammer piston (22) is transferred to the hammer body (18) which contains a radially projecting thicker head (25) to which the bore crowns (26a,26b) are secured. If individual bore crowns are worn or damaged, they can be interchanged individually. Moreover, the bore crowns can be rotated so as to position corresponding other hard metal elements (33) into the marginal area of the percussion tool.Type: GrantFiled: May 1, 1984Date of Patent: July 9, 1985Assignee: Hydroc Gesteinsbohrtechnik GmbHInventor: Gunter Klemm