Patents by Inventor Gunther Hans Debra

Gunther Hans Debra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OPTICAL SYSTEM HAVING A CLEARNING ARRANGEMENT
    Publication number: 20090014666
    Abstract: A cleaning arrangement for an optical system and in particular for an optical system designed for EUV radiation. The cleaning arrangement has a gas inlet (28) for a reactive gas (29). Contaminants (23) that have deposited on the surface of optical elements (110) are detached by the reactive gas. Also provided are getter surfaces (32) that are preferably arranged opposite the surfaces to be clean and by which the contaminants detached from these surfaces are absorbed. This absorption may take place as a result of condensation on the getter surface and also by chemical reaction.
    Type: Application
    Filed: July 18, 2005
    Publication date: January 15, 2009
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.
    Inventors: Peter Zink, Gunther Hans Debra