Patents by Inventor Gunther Lippert

Gunther Lippert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10347723
    Abstract: A method for manufacturing a semiconductor device includes: providing a carrier wafer and a silicon carbide wafer; forming a first graphene material on a first side of the silicon carbide wafer; bonding the first side of the silicon carbide wafer with the first graphene material to the carrier wafer; and splitting the silicon carbide wafer bonded to the carrier wafer into a silicon carbide layer thinner than the silicon carbide wafer and a residual silicon carbide wafer, the silicon carbide layer remaining bonded to the carrier wafer during the splitting.
    Type: Grant
    Filed: November 13, 2018
    Date of Patent: July 9, 2019
    Assignee: Infineon Technologies AG
    Inventors: Guenther Ruhl, Gunther Lippert, Hans-Joachim Schulze, Thomas Zimmer
  • Publication number: 20190081143
    Abstract: A method for manufacturing a semiconductor device includes: providing a carrier wafer and a silicon carbide wafer; forming a first graphene material on a first side of the silicon carbide wafer; bonding the first side of the silicon carbide wafer with the first graphene material to the carrier wafer; and splitting the silicon carbide wafer bonded to the carrier wafer into a silicon carbide layer thinner than the silicon carbide wafer and a residual silicon carbide wafer, the silicon carbide layer remaining bonded to the carrier wafer during the splitting.
    Type: Application
    Filed: November 13, 2018
    Publication date: March 14, 2019
    Inventors: Guenther Ruhl, Gunther Lippert, Hans-Joachim Schulze, Thomas Zimmer
  • Patent number: 10134848
    Abstract: A method for manufacturing a semiconductor device includes: providing a carrier wafer and a silicon carbide wafer; bonding a first side of the silicon carbide wafer to the carrier wafer; splitting the silicon carbide wafer bonded to the carrier wafer into a silicon carbide layer thinner than the silicon carbide wafer and a residual silicon carbide wafer, the silicon carbide layer remaining bonded to the carrier wafer during the splitting; and forming a graphene material on the silicon carbide layer.
    Type: Grant
    Filed: March 21, 2017
    Date of Patent: November 20, 2018
    Assignee: Infineon Technologies AG
    Inventors: Guenther Ruhl, Hans-Joachim Schulze, Thomas Zimmer, Gunther Lippert
  • Publication number: 20170278930
    Abstract: A method for manufacturing a semiconductor device includes: providing a carrier wafer and a silicon carbide wafer; bonding a first side of the silicon carbide wafer to the carrier wafer; splitting the silicon carbide wafer bonded to the carrier wafer into a silicon carbide layer thinner than the silicon carbide wafer and a residual silicon carbide wafer, the silicon carbide layer remaining bonded to the carrier wafer during the splitting; and forming a graphene material on the silicon carbide layer.
    Type: Application
    Filed: March 21, 2017
    Publication date: September 28, 2017
    Inventors: Guenther Ruhl, Hans-Joachim Schulze, Thomas Zimmer, Gunther Lippert
  • Patent number: 9590045
    Abstract: A graphene base transistor comprises on a semiconductor substrate surface an emitter pillar and an emitter-contact pillar, which extend from a pillar foundation in a vertical direction. A dielectric filling layer laterally embeds the emitter pillar and the emitter-contact pillar above the pillar foundation. The dielectric filling layer has an upper surface that is flush with a top surface of the emitter pillar and with the at least one base-contact arm of a base-contact structure. A graphene base forms a contiguous layer between a top surface of the emitter pillar and a top surface of the base-contact arm. A collector stack and the base have the same lateral extension parallel to the substrate surface and perpendicular to those edges of the top surface of the emitter pillar and the base-contact arm that face each other.
    Type: Grant
    Filed: May 23, 2014
    Date of Patent: March 7, 2017
    Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ—INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
    Inventors: Andre Wolff, Wolfgang Mehr, Grzegorz Lupina, Jaroslaw Dabrowski, Gunther Lippert, Mindaugas Lukosius, Chafik Meliani, Christian Wenger
  • Publication number: 20160104778
    Abstract: A graphene base transistor comprises on a semiconductor substrate surface an emitter pillar and an emitter-contact pillar, which extend from a pillar foundation in a vertical direction. A dielectric filling layer laterally embeds the emitter pillar and the emitter-contact pillar above the pillar foundation. The dielectric filling layer has an upper surface that is flush with a top surface of the emitter pillar and with the at least one base-contact arm of a base-contact structure. A graphene base forms a contiguous layer between a top surface of the emitter pillar and a top surface of the base-contact arm. A collector stack and the base have the same lateral extension parallel to the substrate surface and perpendicular to those edges of the top surface of the emitter pillar and the base-contact arm that face each other.
    Type: Application
    Filed: May 23, 2014
    Publication date: April 14, 2016
    Inventors: Andre Wolff, Wolfgang Mehr, Grzegorz Lupina, Jaroslaw Dabrowski, Gunther Lippert, Mindaugas Lukosius, Chafik Meliani, Christian Wenger
  • Patent number: 9040956
    Abstract: A depletion-layer transistor comprising a base, an emitter and a collector, in which the emitter contains a tunnel diode which permits a tunnel current of charge carriers from the emitter in the direction of the collector when an emitter-base voltage above a first threshold voltage is applied in the direction of current flow, and in which the base contains a graphene layer.
    Type: Grant
    Filed: December 11, 2009
    Date of Patent: May 26, 2015
    Assignee: IHP GmbH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ-INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
    Inventors: Wolfgang Mehr, Gunther Lippert
  • Patent number: 8957404
    Abstract: A hot hole transistor with a graphene base comprises on a substrate an emitter layer, a collector layer, and a base layer that comprises a graphene layer, wherein an emitter barrier layer is arranged between the base layer and the emitter layer, and a collector barrier layer is arranged between the base and the collector layers and adjacent to the graphene layer.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: February 17, 2015
    Assignee: IHP GmbH—Innovations for High Performance Microelectronics
    Inventors: Wolfgang Mehr, Jaroslaw Dabrowski, Max Lemme, Gunther Lippert, Grzegorz Lupina, Johann Christoph Scheytt
  • Patent number: 8778782
    Abstract: A method for fabricating an electronic component, comprising providing a substrate; and depositing a graphene layer; wherein the substrate is either provided with a van-der-Waals functional layer or a van-der-Waals functional layer is deposited on the substrate before depositing the graphene layer; a surface step contour is formed; and growth of the graphene layer is seeded at the step contour.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: July 15, 2014
    Assignee: IHP GmbH—Innovations for High Performance Microelectronics
    Inventors: Gunther Lippert, Jaroslaw Dabrowski, Grzegorz Lupina, Olaf Seifarth
  • Publication number: 20140027715
    Abstract: A hot hole transistor with a graphene base comprises on a substrate an emitter layer, a collector layer, and a base layer that comprises a graphene layer, wherein an emitter barrier layer is arranged between the base layer and the emitter layer, and a collector barrier layer is arranged between the base and the collector layers and adjacent to the graphene layer.
    Type: Application
    Filed: December 20, 2012
    Publication date: January 30, 2014
    Applicant: IHP GmbH - Innovations for High Performance Microelectronics
    Inventors: Wolfgang Mehr, Jaroslaw Dabrowski, Max Lemme, Gunther Lippert, Grzegorz Lupina, Johann Christoph Scheytt
  • Patent number: 8227888
    Abstract: A semiconductor component including a first integrated circuit in a substrate which is adapted to produce electrical signals with a high-frequency signal component, wherein the substrate is such that the high-frequency signal component can propagate on a substrate surface and/or in the substrate interior, a second integrated circuit in the same substrate which is such that its function can be compromised by high-frequency signals, and a countersignal circuit in the same substrate which is adapted to deliver an electrical countersignal which at least at a selected location of the substrate surface and/or the substrate interior attenuates or eliminates the high-frequency electrical signal component emanating from the first integrated circuit, wherein the countersignal circuit includes a receiver which is adapted to produce an electrical signal dependent on the instantaneous field strength of the high-frequency signal component, and a shielding transistor provided in the substrate and having a control electrode
    Type: Grant
    Filed: April 8, 2005
    Date of Patent: July 24, 2012
    Assignee: IHP GmbH—Innovations for High Performance Microelectronics
    Inventors: Gunther Lippert, Gerald Lippert
  • Publication number: 20120132885
    Abstract: A method for fabricating an electronic component, comprising providing a substrate; and depositing a graphene layer; wherein the substrate is either provided with a van-der-Waals functional layer or a van-der-Waals functional layer is deposited on the substrate before depositing the graphene layer; a surface step contour is formed; and growth of the graphene layer is seeded at the step contour.
    Type: Application
    Filed: November 29, 2011
    Publication date: May 31, 2012
    Applicants: innovative Mikroelektr
    Inventors: Gunther LIPPERT, Jaroslaw Dabrowski, Grzegorz Lupina, Olaf Seifarth
  • Publication number: 20120032150
    Abstract: Semiconductor component comprising: a silicon containing layer (1), at least one graphene layer (3, 3?, 3?, 3?41 ), and a functional layer (2, 2?, 2?, 2??) between the silicon containing layer (1) and the graphene layer (3, 3?, 3?, 3??), wherein the at least one graphene layer (3?, 3?, 3??) is deposited directly on the functional layer (2, 2?, 2?, 2??) to form a layer system (6, 6?, 6?, 6??) with the functional layer (2, 2?, 2?, 2??) , and the functional layer (2, 2?, 2?, 2??) includes at least one dielectric material having a dielectric constant k in a range between K=3 to K=400, and a conductance of the functional layer (2, 2?, 2?, 2??) in the layer system (6, 6?, 6?, 6??) is below a conductance of the graphene layer (3, 3?, 3?, 3??).
    Type: Application
    Filed: June 29, 2011
    Publication date: February 9, 2012
    Inventors: Gunther Lippert, Grzegorz Lupina, Olaf Seifarth, Marvin Zöllner, Hans-Joachim Thieme
  • Publication number: 20110309335
    Abstract: A depletion-layer transistor comprising a base, an emitter and a collector, in which the emitter contains a tunnel diode which permits a tunnel current of charge carriers from the emitter in the direction of the collector when an emitter-base voltage above a first threshold voltage is applied in the direction of current flow, and in which the base contains a graphene layer.
    Type: Application
    Filed: December 11, 2009
    Publication date: December 22, 2011
    Inventors: Wolfgang Mehr, Gunther Lippert
  • Publication number: 20110133303
    Abstract: A semiconductor component including a first integrated circuit in a substrate which is adapted to produce electrical signals with a high-frequency signal component, wherein the substrate is such that the high-frequency signal component can propagate on a substrate surface and/or in the substrate interior, a second integrated circuit in the same substrate which is such that its function can be compromised by high-frequency signals, and a countersignal circuit in the same substrate which is adapted to deliver an electrical countersignal which at least at a selected location of the substrate surface and/or the substrate interior attenuates or eliminates the high-frequency electrical signal component emanating from the first integrated circuit, wherein the countersignal circuit includes a receiver which is adapted to produce an electrical signal dependent on the instantaneous field strength of the high-frequency signal component, and a shielding transistor provided in the substrate and having a control electrode
    Type: Application
    Filed: April 8, 2005
    Publication date: June 9, 2011
    Inventors: Gunther Lippert, Gerald Lippert
  • Publication number: 20060286734
    Abstract: Disclosed is an electronic device with a layer succession of the metal-insulator-metal (MIM) or metal-insulator-semiconductor (MIS) kind. The insulator layer contains or consists of praseodymium titanate. A metal layer or both metal layers contain titanium nitride (TiN), tantalum nitride (TaN) or ruthenium oxide (RuO2) or consist of one of those materials. MIM capacitors for mixed signal and HF applications comprising titanium nitride electrodes and an SiO2/Pr2Ti2O7 layer stack as the dielectric exhibit a high capacitance density of 8 fF/?m2 at the very low VCC of ?40 ppm/V2. The guaranteed operating voltage extrapolated to 10 years is 6 V.
    Type: Application
    Filed: June 14, 2006
    Publication date: December 21, 2006
    Inventors: Hans-Joachim Mussig, Gunther Lippert, Christian Wenger
  • Patent number: 7019341
    Abstract: A silicon-germanium hetero bipolar transistor comprising a silicon collector layer, a boron-doped silicon-germanium base layer, a silicon emitter layer and an emitter contact area. The transistor is fabricated using an epitaxy process on a surface of pure silicon. An electrically inert material is incorporated into the epitaxial layers in order to link the defects in the semiconductor structure and to reduce the outdiffusion of the dopant. Thus, a transistor for high-frequency applications can be fabricated in two ways: to increase the dopant dose of the base region or to reduce the thickness of the base layer. In particular, the concentration profile of germanium in the base layer has a general shape of a triangle or trapezoid.
    Type: Grant
    Filed: August 30, 2002
    Date of Patent: March 28, 2006
    Assignee: IHP GmbH - Innovations for High Performance Microelectronics/Instut fur Innovative Mikroelektronik
    Inventors: Gunther Lippert, Hans-Jörg Osten, Bernd Heinemann
  • Patent number: 6800881
    Abstract: A silicon-germanium hetero bipolar transistor comprising a silicon collector layer, a boron-doped silicon-germanium base layer, a silicon emitter layer and an emitter contact area. The transistor is fabricated using an epitaxy process on a surface of pure silicon. An electrically inert material is incorporated into the epitaxial layers in order to link the defects in the semiconductor structure and to reduce the outdiffusion of the dopant. Thus, a transistor for high-frequency applications can be fabricated in two ways: to increase the dopant dose of the base region or to reduce the thickness of the base layer. In particular, an implantation or doped region having a T-shaped cross section profile is provided between the emitter layer and the emitter contact area.
    Type: Grant
    Filed: August 30, 2002
    Date of Patent: October 5, 2004
    Assignee: IHP GmbH-Innovations for High Performance Microelectronics/Institut fur Innovative Mikroelektronik
    Inventors: Gunther Lippert, Hans-Jörg Osten, Bernd Heinemann
  • Patent number: 6750484
    Abstract: A silicon-germanium hetero bipolar transistor comprising a silicon collector layer, a boron-doped silicon-germanium base layer, a silicon emitter layer and an emitter contact area. The transistor is fabricated using an epitaxy process on a surface of pure silicon. An electrically inert material is incorporated into the epitaxial layers in order to link the defects in the semiconductor structure and to reduce the outdiffusion of the dopant. Thus, a transistor for high-frequency applications can be fabricated in two ways: to increase the dopant dose of the base region or to reduce the thickness of the base layer. In particular, carbon is incorporated in the base layer and in the collector layer and/or emitter layer.
    Type: Grant
    Filed: August 30, 2002
    Date of Patent: June 15, 2004
    Assignee: Nokia Corporation
    Inventors: Gunther Lippert, Hans-Jörg Osten, Bernd Heinemann
  • Publication number: 20030071278
    Abstract: The invention relates to a silicon germanium hetero bipolar transistor and a method of fabricating the epitaxial individual layers of a silicon germanium hetero bipolar transistor.
    Type: Application
    Filed: August 30, 2002
    Publication date: April 17, 2003
    Inventors: Gunther Lippert, Hans-Jorg Osten, Bernd Heinemann