Abstract: A substrate with a low-reflection surface film and structure is provided. A germanium-tin (GeSn) layer or a silicon-germanium-tin (SiGeSn) layer is arranged on an upper surface of a semiconductor substrate as a low-reflection film. A thickness of the low-reflection film is in a range of 10 nm to 10 ?m, and an upper surface of the low-reflection film is a rough surface. An electronic element formed on the substrate with a low-reflection surface film and structure has a higher absorption for a light source of the same intensity, the response of a photodetector can be improved, and the photoluminescence (PL) intensity can be enhanced.

Abstract: A normal incident guided-mode-resonance biosensor and procalcitonin detection method using the same are provided and include a light source, a first lens, a polarizer, a beam splitter, a ¼? wave plate, a second lens, a detection unit, and a processing unit. The light source provides a light beam. The first lens converts the light beam into a parallel light. The polarizer filters and removes a transverse electric field mode light wave in the parallel light. The beam splitter selectively forms a transverse magnetic field mode light wave in the parallel light. The ¼? wave plate rotates the transverse magnetic field mode light wave in the parallel light by 45°. The second lens focuses the transverse magnetic field mode light wave to the bio-sensing chip. The detection unit receives an emitted light of the bio-sensing chip and generates a sensing signal.

Abstract: A planar waveguide-based optofluidic sensor and use thereof are provided, wherein the optofluidic sensor includes a substrate, an adhesive layer, a waveguide plate, and a microfluidic module layer. The adhesive layer is disposed on both sides of the substrate, the waveguide plate s disposed on the adhesive layer to be bonded with the substrate, and a hollow gap is formed between the substrate and the waveguide plate by the adhesive layer, and the microfluidic module layer is disposed on the waveguide plate and has a microfluidic channel, a fluid sample injection port, and an output port. The optofluidic sensor may detect the refractive index of the fluid sample with high sensitivity.