Abstract: The present disclosure provides a sputtering reaction chamber and a process assembly of the sputtering reaction chamber. The process assembly includes a liner, and the liner includes an integrally formed body member and a cover member. The cover member may extend from a bottom of the body member to an inner side of the body member and may be configured to press an edge of a to-be-processed workpiece when a process is performed. A cooling channel may be arranged in the cover member and the body member and may be configured to cool the cover member and the body member by transferring coolant. The process assembly of the sputtering reaction chamber and the sputtering reaction chamber provided by the present disclosure can reduce heat radiation of the process assembly to the to-be-processed workpiece and released gases and impurities to effectively reduce a whisker defect and improve a product yield.

Abstract: A method for recognizing time information from speech data includes: obtaining text information corresponding to speech data; identifying a first time feature contained in the speech data based on the text information; searching within a respective configuration file corresponding to the first time feature to obtain a corresponding time identifier for the first time feature; assigning the corresponding time identifier to a field that is in intermediate time data and that corresponds to the respective configuration file in which the first time feature is located, the intermediate time data comprising multiple fields, and each field being corresponding to a respective configuration file of a plurality of configuration files, each of the plurality of configuration files corresponding a respective category related to time; and obtaining, according to content of one or more fields in the intermediate time data, system time data corresponding to the time information contained in the speech data.

Abstract: A method for recognizing time information from speech data includes: obtaining text information corresponding to speech data; identifying a first time feature contained in the speech data based on the text information; searching within a respective configuration file corresponding to the first time feature to obtain a corresponding time identifier for the first time feature; assigning the corresponding time identifier to a field that is in intermediate time data and that corresponds to the respective configuration file in which the first time feature is located, the intermediate time data comprising multiple fields, and each field being corresponding to a respective configuration file of a plurality of configuration files, each of the plurality of configuration files corresponding a respective category related to time; and obtaining, according to content of one or more fields in the intermediate time data, system time data corresponding to the time information contained in the speech data.