Patents by Inventor Guohai Zhang

Guohai Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250126889
    Abstract: The invention provides a semiconductor structure comprising a silicon-on-insulator (SOI) substrate, which comprises a silicon layer and an insulating layer stacked from bottom to top, a phosphosilicate glass (PGS) on the insulating layer, and a fluorosilicate glass (FSG) on the phosphosilicate glass. The probability of ions infiltrating into the transistor can be reduced and the yield of products can be improved.
    Type: Application
    Filed: November 8, 2023
    Publication date: April 17, 2025
    Applicant: UINTED MICROELECTRONICS CORP.
    Inventors: YUERAN QIAO, Yi Liu, Guohai Zhang, Genmao Liu, Lei Zhu
  • Publication number: 20250113605
    Abstract: A method for fabricating a radio-frequency (RF) device includes the steps of first providing a substrate comprising a core region and a non-core region, forming a shallow trench isolation (STI) in the substrate between the core region and the non-core region, forming a first gate oxide layer on the core region and the non-core region, forming a patterned mask on the non-core region and the STI, removing the first gate oxide layer on the core region, and then forming a second gate oxide layer on the core region.
    Type: Application
    Filed: October 30, 2023
    Publication date: April 3, 2025
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wan-Tien Chou, Gang Ren, Xingxing Chen, Ji Feng, Guohai Zhang
  • Publication number: 20240332067
    Abstract: A transistor structure with an air gap includes a substrate. A transistor is disposed on the substrate. An etching stop layer covers and contacts the transistor and the substrate. A first dielectric layer covers and contacts the etching stop layer. A second dielectric layer covers the first dielectric layer. A trench is disposed on the gate structure and within the first dielectric layer and the second dielectric layer. A width of the trench within the second dielectric layer is smaller than a width of the trench within the first dielectric layer. A filling layer is disposed within the trench and covers the top surface of the second dielectric layer. An air gap is formed within the filling layer.
    Type: Application
    Filed: June 11, 2024
    Publication date: October 3, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Yunfei Li, Ji Feng, Guohai Zhang, Ching Hwa Tey
  • Patent number: 12096704
    Abstract: A semiconductor memory device includes a substrate having a first interlayer dielectric layer thereon; a lower metal interconnect layer in the first interlayer dielectric layer; a conductive via disposed on the lower metal interconnect layer; a bottom electrode disposed on the conductive via; a dielectric data storage layer having variable resistance disposed on the bottom electrode; a top electrode disposed on the dielectric data storage layer; and a protective layer covering sidewalls of the top electrode, the dielectric data storage layer, and the bottom electrode. The protective layer includes an annular, upwardly protruding portion around a perimeter of the top electrode.
    Type: Grant
    Filed: October 24, 2023
    Date of Patent: September 17, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yuan Zhou, Xian Feng Du, Guoan Du, Guohai Zhang
  • Patent number: 12040224
    Abstract: A transistor structure with an air gap includes a substrate. A transistor is disposed on the substrate. An etching stop layer covers and contacts the transistor and the substrate. A first dielectric layer covers and contacts the etching stop layer. A second dielectric layer covers the first dielectric layer. A trench is disposed on the gate structure and within the first dielectric layer and the second dielectric layer. A width of the trench within the second dielectric layer is smaller than a width of the trench within the first dielectric layer. A filling layer is disposed within the trench and covers the top surface of the second dielectric layer. An air gap is formed within the filling layer.
    Type: Grant
    Filed: May 4, 2022
    Date of Patent: July 16, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yunfei Li, Ji Feng, Guohai Zhang, Ching Hwa Tey
  • Publication number: 20240057486
    Abstract: A semiconductor memory device includes a substrate having a first interlayer dielectric layer thereon; a lower metal interconnect layer in the first interlayer dielectric layer; a conductive via disposed on the lower metal interconnect layer; a bottom electrode disposed on the conductive via; a dielectric data storage layer having variable resistance disposed on the bottom electrode; a top electrode disposed on the dielectric data storage layer; and a protective layer covering sidewalls of the top electrode, the dielectric data storage layer, and the bottom electrode. The protective layer includes an annular, upwardly protruding portion around a perimeter of the top electrode.
    Type: Application
    Filed: October 24, 2023
    Publication date: February 15, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: YUAN ZHOU, Xian Feng Du, GUOAN DU, GUOHAI ZHANG
  • Patent number: 11844291
    Abstract: A semiconductor memory device includes a substrate having a first interlayer dielectric layer thereon; a lower metal interconnect layer in the first interlayer dielectric layer; a conductive via disposed on the lower metal interconnect layer; a bottom electrode disposed on the conductive via; a dielectric data storage layer having variable resistance disposed on the bottom electrode; a top electrode disposed on the dielectric data storage layer; and a protective layer covering sidewalls of the top electrode, the dielectric data storage layer, and the bottom electrode. The protective layer includes an annular, upwardly protruding portion around a perimeter of the top electrode.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: December 12, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yuan Zhou, Xian Feng Du, Guoan Du, Guohai Zhang
  • Publication number: 20220407006
    Abstract: A semiconductor memory device includes a substrate having a first interlayer dielectric layer thereon; a lower metal interconnect layer in the first interlayer dielectric layer; a conductive via disposed on the lower metal interconnect layer; a bottom electrode disposed on the conductive via; a dielectric data storage layer having variable resistance disposed on the bottom electrode; a top electrode disposed on the dielectric data storage layer; and a protective layer covering sidewalls of the top electrode, the dielectric data storage layer, and the bottom electrode. The protective layer includes an annular, upwardly protruding portion around a perimeter of the top electrode.
    Type: Application
    Filed: June 21, 2021
    Publication date: December 22, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: YUAN ZHOU, Xian Feng Du, GUOAN DU, GUOHAI ZHANG
  • Publication number: 20220262671
    Abstract: A transistor structure with an air gap includes a substrate. A transistor is disposed on the substrate. An etching stop layer covers and contacts the transistor and the substrate. A first dielectric layer covers and contacts the etching stop layer. A second dielectric layer covers the first dielectric layer. A trench is disposed on the gate structure and within the first dielectric layer and the second dielectric layer. A width of the trench within the second dielectric layer is smaller than a width of the trench within the first dielectric layer. A filling layer is disposed within the trench and covers the top surface of the second dielectric layer. An air gap is formed within the filling layer.
    Type: Application
    Filed: May 4, 2022
    Publication date: August 18, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Yunfei Li, JI FENG, GUOHAI ZHANG, CHING HWA TEY
  • Patent number: 11355389
    Abstract: A transistor structure with an air gap includes a substrate. A transistor is disposed on the substrate. An etching stop layer covers and contacts the transistor and the substrate. A first dielectric layer covers and contacts the etching stop layer. A second dielectric layer covers the first dielectric layer. A trench is disposed on the gate structure and within the first dielectric layer and the second dielectric layer. A width of the trench within the second dielectric layer is smaller than a width of the trench within the first dielectric layer. A filling layer is disposed within the trench and covers the top surface of the second dielectric layer. An air gap is formed within the filling layer.
    Type: Grant
    Filed: December 24, 2020
    Date of Patent: June 7, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yunfei Li, Ji Feng, Guohai Zhang, Ching Hwa Tey
  • Publication number: 20220139762
    Abstract: A transistor structure with an air gap includes a substrate. A transistor is disposed on the substrate. An etching stop layer covers and contacts the transistor and the substrate. A first dielectric layer covers and contacts the etching stop layer. A second dielectric layer covers the first dielectric layer. A trench is disposed on the gate structure and within the first dielectric layer and the second dielectric layer. A width of the trench within the second dielectric layer is smaller than a width of the trench within the first dielectric layer. A filling layer is disposed within the trench and covers the top surface of the second dielectric layer. An air gap is formed within the filling layer.
    Type: Application
    Filed: December 24, 2020
    Publication date: May 5, 2022
    Inventors: Yunfei Li, JI FENG, GUOHAI ZHANG, CHING HWA TEY
  • Patent number: 11202979
    Abstract: A device for reducing pressure fluctuation of a pressure filter frame and a pressure filter. The device includes a pressure filter frame that is a cylindrical housing. An inner wall of the pressure filter frame is further provided with a buffer plate. A plurality of openings are provided in the buffer plate. A gap is remained between the buffer plate and the inner wall of the pressure filter frame. A plurality of supporting posts are disposed in the gap, which fixedly connect the inner wall of the pressure filter frame with the buffer plate.
    Type: Grant
    Filed: July 24, 2017
    Date of Patent: December 21, 2021
    Assignee: TIANHUA INSTITUTE OF CHEMICAL MACHINERY AND AUTOMATION CO., LTD
    Inventors: Xu Zhao, Zhongxin Sun, Wanyao Zhang, Xiangnan Zhai, Guohai Zhang, Yu Guo, Xiaopeng Feng
  • Patent number: 11201134
    Abstract: A method of manufacturing a semiconductor device includes the following steps. A device wafer having a product-obtaining part and an edge part surrounding the product-obtaining part is provided. A passivation layer is formed to cover the device wafer. A first oxide cap layer is formed to cover the passivation layer. An edge trimming process is performed to polish an edge part of the first oxide cap layer, an edge part of the passivation layer and the edge part of the device wafer. A removing process is performed to remove the first oxide cap layer after the edge trimming process is performed. A second oxide cap layer is formed to cover the first oxide cap layer and the edge part of the device wafer.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: December 14, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yonghui Gao, Yi Liu, Guohai Zhang
  • Publication number: 20210327849
    Abstract: A method of manufacturing a semiconductor device includes the following steps. A device wafer having a product-obtaining part and an edge part surrounding the product-obtaining part is provided. A passivation layer is formed to cover the device wafer. A first oxide cap layer is formed to cover the passivation layer. An edge trimming process is performed to polish an edge part of the first oxide cap layer, an edge part of the passivation layer and the edge part of the device wafer. A removing process is performed to remove the first oxide cap layer after the edge trimming process is performed. A second oxide cap layer is formed to cover the first oxide cap layer and the edge part of the device wafer.
    Type: Application
    Filed: April 20, 2020
    Publication date: October 21, 2021
    Inventors: YONGHUI GAO, YI LIU, GUOHAI ZHANG
  • Patent number: 11127621
    Abstract: A method of forming a semiconductor device includes following steps. Firstly, a substrate is provided and the substrate has a first semiconductor layer formed thereon. Next, an isolating structure is formed in the first semiconductor layer, and a sacrificial layer is formed on the first semiconductor layer by consuming a top portion of the first semiconductor layer. Then, the sacrificial layer is removed to form a second semiconductor layer, and a portion of the isolating structure is also removed to form a shallow trench isolation (STI), with a top surface of the shallow trench isolation being substantially coplanar with a top surface of the second semiconductor layer.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: September 21, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ji Feng, Yunfei Li, Guohai Zhang, Ching Hwa Tey, Jingling Wang
  • Patent number: 11099114
    Abstract: A testing device, a testing method, and a design method for a rotary pressure filter. The device includes a stabilizer tank; a buffer tank connected to the stabilizer tank; a filter frame disposed beneath the buffer tank, and connected to the buffer tank; a liquid receiving tank disposed beneath the filter frame; an electronic balance disposed at bottom of the liquid receiving tank; and a seconds counter. The testing method includes adding a certain calculated amount of testing slurry into the filter frame, introducing a gas with a certain pressure into the stabilizer tank, filling the filter frame through the buffer tank, opening a valve at bottom of the filter frame, measuring a mass of the expelled filtrate expelled from the filter frame, measuring time of the filtering process, sampling and analyzing the filter cake and the expelled filtrate according to actual needs; and perform cleaning and drying processes sequentially.
    Type: Grant
    Filed: May 15, 2017
    Date of Patent: August 24, 2021
    Assignee: TIANHUA INSTITUTE OF CHEMICAL MACHINERY AND AUTOMATION CO., LTD
    Inventors: Xu Zhao, Wanyao Zhang, Yongpeng Tan, Tianbao Wang, Xiangnan Zhai, Yanshun Shen, Guohai Zhang, Yu Guo, Xiaopeng Feng, Yuanyue Liang, Xiaoling Xie
  • Publication number: 20210134653
    Abstract: A method of forming a semiconductor device includes following steps. Firstly, a substrate is provided and the substrate has a first semiconductor layer formed thereon. Next, an isolating structure is formed in the first semiconductor layer, and a sacrificial layer is formed on the first semiconductor layer by consuming a top portion of the first semiconductor layer. Then, the sacrificial layer is removed to form a second semiconductor layer, and a portion of the isolating structure is also removed to form a shallow trench isolation (STI), with a top surface of the shallow trench isolation being substantially coplanar with a top surface of the second semiconductor layer.
    Type: Application
    Filed: November 4, 2019
    Publication date: May 6, 2021
    Inventors: JI FENG, Yunfei Li, GUOHAI ZHANG, CHING HWA TEY, JINGLING WANG
  • Patent number: 10906858
    Abstract: The present invention relates to a method for processing acetic acid solvent in Crude Terephthalic Acid (CTA) in an oxidized unit of a pure terephthalic acid (PTA) industrial apparatus. In the present invention, a filter cake in CTA is washed by means of a two-stage-three-step method. The present invention further shortens the production process of solvent exchanging technique of CTA pressure filters, improves production capacity of a device, reduces investment of the device, reduces energy consumption of a system, and solves the shortcomings of the existing CTA solvent exchanging technique of the pressure filters.
    Type: Grant
    Filed: May 15, 2017
    Date of Patent: February 2, 2021
    Assignee: Tianhua Institute of Chemical Machinery and Automation Co., Ltd
    Inventors: Xu Zhao, Zhongxin Sun, Wanyao Zhang, Tianbao Wang, Xiangnan Zhai, Yongpeng Tan, Guohai Zhang, Yu Guo, Xiaoling Xie
  • Publication number: 20200164291
    Abstract: A device for reducing pressure fluctuation of a pressure filter frame and a pressure filter. The device includes a pressure filter frame that is a cylindrical housing. An inner wall of the pressure filter frame is further provided with a buffer plate. A plurality of openings are provided in the buffer plate. A gap is remained between the buffer plate and the inner wall of the pressure filter frame. A plurality of supporting posts are disposed in the gap, which fixedly connect the inner wall of the pressure filter frame with the buffer plate.
    Type: Application
    Filed: July 24, 2017
    Publication date: May 28, 2020
    Inventors: Xu ZHAO, Zhongxin SUN, Wanyao ZHANG, Xiangnan ZHAI, Guohai ZHANG, Yu GUO, Xiaopeng FENG
  • Publication number: 20200157034
    Abstract: The present invention relates to a method for processing acetic acid solvent in Crude Terephthalic Acid (CTA) in an oxidized unit of a pure terephthalic acid (PTA) industrial apparatus. In the present invention, a filter cake in CTA is washed by means of a two-stage-three-step method. The present invention further shortens the production process of solvent exchanging technique of CTA pressure filters, improves production capacity of a device, reduces investment of the device, reduces energy consumption of a system, and solves the shortcomings of the existing CTA solvent exchanging technique of the pressure filters.
    Type: Application
    Filed: May 15, 2017
    Publication date: May 21, 2020
    Inventors: Xu ZHAO, Zhongxin SUN, Wanyao ZHANG, Tianbao WANG, Xiangnan ZHAI, Yongpeng TAN, Guohai ZHANG, Yu GUO, Xiaoling XIE