Patents by Inventor Guojing MA

Guojing MA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lifting-off method and method for manufacturing TFT array substrate
    Patent number: 8618001
    Abstract: A lifting-off method and a manufacturing method for a thin film transistor (TFT) array substrate using the same are provided. A lifting-off method comprises forming a cavitation jet flow by using a lifting-off solution, and impacting a to-be-lifted-off surface of a substrate by means of the cavitation jet flow to remove a photoresist and a film deposited on the photoresist over the to-be-lifted-off surface. The disclosure may be applied to manufacturing processes for semiconductor devices or TFT array substrate.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: December 31, 2013
    Assignees: Boe Technology Group Co., Ltd., Beijing Boe Display Technology Co., Ltd.
    Inventors: Yongzhi Song, Zhaohui Hao, Xu Wang, Huiyue Luo, Guojing Ma
  • LIFTING-OFF METHOD AND METHOD FOR MANUFACTURING TFT ARRAY SUBSTRATE
    Publication number: 20120135570
    Abstract: A lifting-off method and a manufacturing method for a thin film transistor (TFT) array substrate using the same are provided. A lifting-off method comprises forming a cavitation jet flow by using a lifting-off solution, and impacting a to-be-lifted-off surface of a substrate by means of the cavitation jet flow to remove a photoresist and a film deposited on the photoresist over the to-be-lifted-off surface. The disclosure may be applied to manufacturing processes for semiconductor devices or TFT array substrate.
    Type: Application
    Filed: November 29, 2011
    Publication date: May 31, 2012
    Applicants: BEIJING BOE DISPLAY TECHNOLOGY CO., LTD, BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Yongzhi SONG, Zhaohui HAO, Xu WANG, Huiyue LUO, Guojing MA