Abstract: Active semiconductor devices in an integrated circuit are provided lateral electrical isolation by surrounding narrow deep trench isolation regions that are merged at shared portions of the narrow deep trench isolation regions. A wide deep trench isolation region laterally surrounds the merged narrow deep trench isolation regions.

Abstract: A microelectronic device includes a buried trench capacitor below an electronic component of the microelectronic device. In one embodiment, the buried trench capacitor may be formed between a silicon oxide capped p-type buried trench capacitor polysilicon region and a buried trench capacitor deep n-type region separated by buried trench capacitor liner dielectric. In a second embodiment, the buried trench capacitor may be formed by a buried trench capacitor polysilicon region and a p-type silicon epitaxial region separated by a buried trench capacitor liner dielectric. One terminal of the deep trench capacitor is made through the substrate via a deep trench substrate contact. The second terminal of the deep trench capacitor is made via a well contact that connects to the capacitor through a deep well region in one embodiment and through a polysilicon layer in a second embodiment.

Abstract: An electronic device includes a semiconductor substrate and a semiconductor surface layer having a first conductivity type, the semiconductor surface layer over the semiconductor substrate and having a top surface, a buried layer having an opposite second conductivity type between the semiconductor surface layer and the semiconductor substrate, a dielectric isolation layer that extends over and into the semiconductor surface layer, a deep trench structure that extends through the dielectric isolation layer into the semiconductor surface layer, and a silicide blocking layer on a top surface of the deep trench structure.

Abstract: An electronic device includes a semiconductor substrate and a semiconductor surface layer having a first conductivity type, as well as a buried layer, a deep trench structure and a shallow trench isolation structure, the semiconductor surface layer over the semiconductor substrate and having a top surface, the buried layer having an opposite second conductivity type between the semiconductor surface layer and the semiconductor substrate, the deep trench structure including a trench that extends through the semiconductor surface layer and into the buried layer, a dielectric liner on a sidewall of the trench from the semiconductor surface layer to the buried layer, and polysilicon that extends on the dielectric liner and fills the trench to the side of the semiconductor surface layer, the shallow trench isolation structure extends into the semiconductor surface layer, and the shallow trench isolation structure in contact with the deep trench structure.

Abstract: The present disclosure generally relates to a bird's beak profile of a field oxide region. In an example, a semiconductor device structure includes a semiconductor substrate, a dielectric oxide layer, and a field oxide region. The semiconductor substrate has a top surface. The dielectric oxide layer is over the top surface of the semiconductor substrate. The field oxide region is over the semiconductor substrate. The field oxide region is connected to the dielectric oxide layer through a bird's beak region. A lower surface of the bird's beak region interfaces with the semiconductor substrate. In a cross-section along a direction from the field oxide region to the dielectric oxide layer, the lower surface of the bird's beak region does not have a slope with a magnitude that exceeds 0.57735, where rise of the slope is in a direction normal to the top surface of the semiconductor substrate.

Abstract: An integrated circuit includes a bipolar transistor, e.g. a back-ballasted NPN, that can conduct laterally and vertically. At a low voltage breakdown and low current conduction occur laterally near a substrate surface, while at a higher voltage vertical conduction occurs in a more highly-doped channel below the surface. A relatively high-resistance region at the surface has a low doping level to guide the conduction deeper into the collector.

Abstract: In a described example, a bipolar junction transistor includes a substrate. An emitter region, a base region, and a collector region are each formed in the substrate. A gate-type structure is formed on the substrate between the base region and the emitter region. A contact is coupled to the gate-type structure, and the contact is adapted to be coupled to a source of DC voltage.

Abstract: An integrated circuit includes an extended drain MOS transistor. The substrate of the integrated circuit has a lower layer with a first conductivity type. A drain well of the extended drain MOS transistor has the first conductivity type. The drain well is separated from the lower layer by a drain isolation well having a second, opposite, conductivity type. A source region of the extended drain MOS transistor is separated from the lower layer by a body well having the second conductivity type. Both the drain isolation well and the body well contact the lower layer. An average dopant density of the second conductivity type in the drain isolation well is less than an average dopant density of the second conductivity type in the body well.

Abstract: An integrated circuit (IC) includes a second metal level located between first and third metal levels, a dielectric layer located over the metal levels, and first, second and third vias within the dielectric layer. The first via traverses the first dielectric layer from a surface of the dielectric layer to the first metal level and has a first diameter. The second via traverses the dielectric layer from the surface to the second metal level and has the first diameter. The third via traverses the dielectric layer from the surface to the third metal level and has a second diameter greater than the first diameter. In some implementations the first, second and third metal levels implement a capacitor.

Abstract: In a described example, a bipolar junction transistor includes a substrate. An emitter region, a base region, and a collector region are each formed in the substrate. A gate-type structure is formed on the substrate between the base region and the emitter region. A contact is coupled to the gate-type structure, and the contact is adapted to be coupled to a source of DC voltage.

Abstract: An integrated circuit includes an extended drain MOS transistor. The substrate of the integrated circuit has a lower layer with a first conductivity type. A drain well of the extended drain MOS transistor has the first conductivity type. The drain well is separated from the lower layer by a drain isolation well having a second, opposite, conductivity type. A source region of the extended drain MOS transistor is separated from the lower layer by a body well having the second conductivity type. Both the drain isolation well and the body well contact the lower layer. An average dopant density of the second conductivity type in the drain isolation well is less than an average dopant density of the second conductivity type in the body well.

Abstract: Disclosed examples provide fabrications methods and integrated circuits with back ballasted NPN bipolar transistors which include an n-type emitter in a P doped region, a p-type base with a first side facing the emitter, and an n-type collector laterally spaced from a second side of the base, where the collector includes a first side facing the second side of the base, an opposite second side, a silicided first collector portion and a silicide blocked second collector portion covered with a non-conductive dielectric that extends laterally between the first collector portion and the second side of the collector to provide back side ballasting for lateral breakdown and low current conduction via a deep N doped region while the vertical NPN turns on at a high voltage.

Abstract: An integrated circuit includes an extended drain MOS transistor. The substrate of the integrated circuit has a lower layer with a first conductivity type. A drain well of the extended drain MOS transistor has the first conductivity type. The drain well is separated from the lower layer by a drain isolation well having a second, opposite, conductivity type. A source region of the extended drain MOS transistor is separated from the lower layer by a body well having the second conductivity type. Both the drain isolation well and the body well contact the lower layer. An average dopant density of the second conductivity type in the drain isolation well is less than an average dopant density of the second conductivity type in the body well.

Abstract: Disclosed examples provide fabrications methods and integrated circuits with back ballasted NPN bipolar transistors which include an n-type emitter in a P doped region, a p-type base with a first side facing the emitter, and an n-type collector laterally spaced from a second side of the base, where the collector includes a first side facing the second side of the base, an opposite second side, a silicided first collector portion and a silicide blocked second collector portion covered with a non-conductive dielectric that extends laterally between the first collector portion and the second side of the collector to provide back side ballasting for lateral breakdown and low current conduction via a deep N doped region while the vertical NPN turns on at a high voltage.

Abstract: An integrated circuit (IC) includes a semiconductor surface layer on a substrate including functional circuitry having circuit elements configured together with a metal-to-polysilicon capacitor on the semiconductor surface layer for realizing at least one circuit function. The metal-to-polysilicon capacitor includes a bottom plate including polysilicon, a capacitor dielectric including at least one capacitor dielectric layer on the bottom plate, a top plate on the capacitor dielectric, and contacts through a pre-metal dielectric layer that contact the top plate and contact the bottom plate. In lateral regions relative to the capacitor the capacitor dielectric layer has a thickness in a range between about 5% and about 50% of a thickness of the capacitor dielectric of the metal-to-polysilicon capacitor.

Abstract: An integrated circuit (IC) includes a semiconductor surface layer on a substrate including functional circuitry having circuit elements configured together with a metal-to-polysilicon capacitor on the semiconductor surface layer for realizing at least one circuit function. The metal-to-polysilicon capacitor includes a bottom plate including polysilicon, a capacitor dielectric including at least one capacitor dielectric layer on the bottom plate, a top plate on the capacitor dielectric, and contacts through a pre-metal dielectric layer that contact the top plate and contact the bottom plate. In lateral regions relative to the capacitor the capacitor dielectric layer has a thickness in a range between about 5% and about 50% of a thickness of the capacitor dielectric of the metal-to-polysilicon capacitor.

Abstract: An integrated circuit (IC) includes a second metal level located between first and third metal levels, a dielectric layer located over the metal levels, and first, second and third vias within the dielectric layer. The first via traverses the first dielectric layer from a surface of the dielectric layer to the first metal level and has a first diameter. The second via traverses the dielectric layer from the surface to the second metal level and has the first diameter. The third via traverses the dielectric layer from the surface to the third metal level and has a second diameter greater than the first diameter. In some implementations the first, second and third metal levels implement a capacitor.

Abstract: An integrated circuit (IC) includes a substrate having a semiconductor surface layer, at least one capacitor above the semiconductor surface layer including a bottom plate, a capacitor dielectric over the bottom plate, and a top plate over the capacitor dielectric, functional circuitry in the semiconductor surface layer includes a core region having transistors configured together with the capacitor for realizing at least one circuit function. Electrically conductive metal filled contacts are through the dielectric layer that contact the top plate, the bottom plate, and the core region, including a first filled contact hole having a first depth and a first width that reach the top capacitor plate, and second filled contact hole having a second depth and a second width that reach the core region. The second depth is deeper than the first depth, and the first width is at least ten (10) % larger than the second width.

Abstract: Disclosed examples provide fabrications methods and integrated circuits with back ballasted NPN bipolar transistors which include an n-type emitter in a P doped region, a p-type base with a first side facing the emitter, and an n-type collector laterally spaced from a second side of the base, where the collector includes a first side facing the second side of the base, an opposite second side, a silicided first collector portion and a silicide blocked second collector portion covered with a non-conductive dielectric that extends laterally between the first collector portion and the second side of the collector to provide back side ballasting for lateral breakdown and low current conduction via a deep N doped region while the vertical NPN turns on at a high voltage.