Patents by Inventor Guruvayurappan S. MATHUR

Guruvayurappan S. MATHUR has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230317775
    Abstract: A method of manufacturing an integrated circuit includes forming first and second false collector regions of a first conductivity type adjacent to a surface of an epitaxial layer of semiconductor material. The first false collector region is located laterally on a first side of a base region. The base region is formed within the epitaxial layer and has a second conductivity type. The second false collector region is located laterally on a second side of the base region. The second side is opposite the first side of the base region. The base region is a base of a parasitic bipolar junction in an isolation region of an active semiconductor device.
    Type: Application
    Filed: April 28, 2022
    Publication date: October 5, 2023
    Inventors: Alexei Sadovnikov, Guruvayurappan S. Mathur
  • Publication number: 20230317774
    Abstract: A method includes implanting dopant of a first conductivity type into an epitaxial layer of semiconductor material to form first and second false collector regions adjacent to the surface of the epitaxial layer. The first false collector region is located laterally on a first side of a base region. The base region is formed within the epitaxial layer from dopant of a second conductivity type that is opposite the first conductivity type. The second false collector region is located laterally on a second side of the base region. The second side is opposite the first side of the base region. The base region is a base of a parasitic bipolar junction in an isolation region of an active semiconductor device.
    Type: Application
    Filed: March 31, 2022
    Publication date: October 5, 2023
    Inventors: Alexei SADOVNIKOV, Guruvayurappan S. MATHUR
  • Patent number: 11605587
    Abstract: In some examples, a method comprises: obtaining a substrate having at a metal interconnect layer deposited over the substrate; forming a first dielectric layer on the metal interconnect layer; forming a second dielectric layer on the first dielectric layer; forming a capacitor metal layer on the second dielectric layer; patterning and etching the capacitor metal layer and the second dielectric layer to the first dielectric layer to leave a portion of the capacitor metal layer and the second dielectric layer on the first dielectric layer; forming an anti-reflective coating to cover the portion of the capacitor metal layer and the second dielectric layer, and to cover the metal interconnect layer; and patterning the metal interconnect layer to form a first metal layer and a second metal layer.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: March 14, 2023
    Assignee: Texas Instruments Incorporated
    Inventors: Poornika Fernandes, Bhaskar Srinivasan, Scott William Jessen, Guruvayurappan S. Mathur
  • Patent number: 11587864
    Abstract: An integrated circuit (IC) includes a substrate and a first capacitor on the substrate. The first capacitor has a first width. A first dielectric layer is provided on a side of the first capacitor opposite the substrate. Further, a second capacitor is present on a side of the first dielectric layer opposite the first capacitor. The second capacitor has a second width that is smaller than the first width. The IC also has a second dielectric layer and a first metal layer. The second dielectric layer is on a side of the second capacitor opposite the first dielectric layer. The first metal layer is on a side of the second dielectric layer opposite the second capacitor.
    Type: Grant
    Filed: December 2, 2021
    Date of Patent: February 21, 2023
    Assignee: Texas Instruments Incorporated
    Inventors: Poornika Fernandes, Ye Shao, Guruvayurappan S. Mathur, John K. Arch, Paul Stulik
  • Publication number: 20220093507
    Abstract: An integrated circuit (IC) includes a substrate and a first capacitor on the substrate. The first capacitor has a first width. A first dielectric layer is provided on a side of the first capacitor opposite the substrate. Further, a second capacitor is present on a side of the first dielectric layer opposite the first capacitor. The second capacitor has a second width that is smaller than the first width. The IC also has a second dielectric layer and a first metal layer. The second dielectric layer is on a side of the second capacitor opposite the first dielectric layer. The first metal layer is on a side of the second dielectric layer opposite the second capacitor.
    Type: Application
    Filed: December 2, 2021
    Publication date: March 24, 2022
    Inventors: Poornika FERNANDES, Ye SHAO, Guruvayurappan S. MATHUR, John K. ARCH, Paul STULIK
  • Publication number: 20220069067
    Abstract: In some examples, an integrated circuit comprises a substrate; a first metal layer and a second metal layer positioned above the substrate; a first composite dielectric layer located on the first metal layer, wherein the first composite dielectric layer comprises a first anti-reflective coating; a second composite dielectric layer positioned on the second metal layer, wherein the second composite dielectric layer comprises a second anti-reflective coating; and a capacitor metal layer disposed over the first composite dielectric layer.
    Type: Application
    Filed: October 13, 2021
    Publication date: March 3, 2022
    Inventors: Poornika FERNANDES, David Matthew CURRAN, Stephen Arlon MEISNER, Bhaskar SRINIVASAN, Guruvayurappan S. MATHUR, Scott William JESSEN, Shih Chang CHANG, Russell Duane FIELDS, Thomas Terrance LYNCH
  • Patent number: 11222841
    Abstract: An integrated circuit (IC) includes a substrate and a first capacitor on the substrate. The first capacitor has a first width. A first dielectric layer is provided on a side of the first capacitor opposite the substrate. Further, a second capacitor is present on a side of the first dielectric layer opposite the first capacitor. The second capacitor has a second width that is smaller than the first width. The IC also has a second dielectric layer and a first metal layer. The second dielectric layer is on a side of the second capacitor opposite the first dielectric layer. The first metal layer is on a side of the second dielectric layer opposite the second capacitor.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: January 11, 2022
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Poornika Fernandes, Ye Shao, Guruvayurappan S. Mathur, John K. Arch, Paul Stulik
  • Patent number: 11171200
    Abstract: In some examples, an integrated circuit comprises a substrate; a first metal layer and a second metal layer positioned above the substrate; a first composite dielectric layer located on the first metal layer, wherein the first composite dielectric layer comprises a first anti-reflective coating; a second composite dielectric layer positioned on the second metal layer, wherein the second composite dielectric layer comprises a second anti-reflective coating; and a capacitor metal layer disposed over the first composite dielectric layer.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: November 9, 2021
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Poornika Fernandes, David Matthew Curran, Stephen Arion Meisner, Bhaskar Srinivasan, Guruvayurappan S. Mathur, Scott William Jessen, Shih Chang Chang, Russell Duane Fields, Thomas Terrance Lynch
  • Publication number: 20210098565
    Abstract: In some examples, an integrated circuit comprises a substrate; a first metal layer and a second metal layer positioned above the substrate; a first composite dielectric layer located on the first metal layer, wherein the first composite dielectric layer comprises a first anti-reflective coating; a second composite dielectric layer positioned on the second metal layer, wherein the second composite dielectric layer comprises a second anti-reflective coating; and a capacitor metal layer disposed over the first composite dielectric layer.
    Type: Application
    Filed: September 26, 2019
    Publication date: April 1, 2021
    Inventors: Poornika FERNANDES, David Matthew CURRAN, Stephen Arlon MEISNER, Bhaskar SRINIVASAN, Guruvayurappan S. MATHUR, Scott William JESSEN, Shih Chang CHANG, Russell Duane FIELDS, Thomas Terrance LYNCH
  • Publication number: 20210074629
    Abstract: An integrated circuit (IC) includes a substrate and a first capacitor on the substrate. The first capacitor has a first width. A first dielectric layer is provided on a side of the first capacitor opposite the substrate. Further, a second capacitor is present on a side of the first dielectric layer opposite the first capacitor. The second capacitor has a second width that is smaller than the first width. The IC also has a second dielectric layer and a first metal layer. The second dielectric layer is on a side of the second capacitor opposite the first dielectric layer. The first metal layer is on a side of the second dielectric layer opposite the second capacitor.
    Type: Application
    Filed: September 5, 2019
    Publication date: March 11, 2021
    Inventors: Poornika FERNANDES, Ye SHAO, Guruvayurappan S. MATHUR, John K. ARCH, Paul STULIK
  • Publication number: 20200411633
    Abstract: In some examples, an integrated circuit includes an isolation layer disposed on or over a semiconductor substrate. The integrated circuit also includes a first conductive plate located over the isolation layer and a composite dielectric layer located over the first conductive plate. The composite dielectric layer includes a first sublayer comprising a first chemical composition; a second sublayer comprising a second different chemical composition; and a third sublayer comprising a third chemical composition substantially similar to the first chemical composition. The integrated circuit further includes a second conductive plate located directly on the composite dielectric layer above the first conductive plate.
    Type: Application
    Filed: June 26, 2019
    Publication date: December 31, 2020
    Inventors: Guruvayurappan S. MATHUR, Abbas ALI, Poornika FERNANDES, Bhaskar Srinivasan, Darrell R. Krumme, Joao Sergio Afonso, Shih-Chang Chang, Shariq Arshad
  • Publication number: 20200328149
    Abstract: In some examples, a method comprises: obtaining a substrate having at a metal interconnect layer deposited over the substrate; forming a first dielectric layer on the metal interconnect layer; forming a second dielectric layer on the first dielectric layer; forming a capacitor metal layer on the second dielectric layer; patterning and etching the capacitor metal layer and the second dielectric layer to the first dielectric layer to leave a portion of the capacitor metal layer and the second dielectric layer on the first dielectric layer; forming an anti-reflective coating to cover the portion of the capacitor metal layer and the second dielectric layer, and to cover the metal interconnect layer; and patterning the metal interconnect layer to form a first metal layer and a second metal layer.
    Type: Application
    Filed: April 12, 2019
    Publication date: October 15, 2020
    Inventors: Poornika FERNANDES, Bhaskar SRINIVASAN, Scott William JESSEN, Guruvayurappan S. MATHUR