Abstract: Optical metrology apparatus, specifically a laser probe (1), includes a frame (10) comprised of a material selected to have a predetermined coefficient of thermal expansion. A beamsplitter (36) is coupled to the frame for generating a sample beam optical path (D) and a reference beam optical path (C). The beamsplitter is optically coupled to an optical fiber (12) that delivers radiation to and conveys radiation from the frame. A piezoelectric stack (48) has an excitation signal coupled thereto and includes a mirror (26) for phase modulating the reference beam optical path length in response to the excitation signal. The laser probe includes a first strain gauge (58) that is coupled to the piezoelectric stack and a second strain gauge (60) that is coupled to the frame.

Abstract: A latent image scanner 10 comprising a three-color laser-diode interferometer 11 having either thickness gauge optical geometry 12 or profiler optical geometry 12a is focused on a spot on a surface of a reference optic 14 having a latent image residue thereon. The interferometry thickness gauge 10 or profiler 10a measures and records the height and location of the spot. The scanner 10 is then focused on a new spot by moving an associated X-Y mechanical translator 13. A complete scan of the surface of the reference optic 14 results in a three dimensional data array correlating height profile to X-Y coordinates of the surface of the reference optic 14. The difference between the absolute height profile and the known height of the reference optic 14 represents the latent image.

Abstract: Optical metrology apparatus, specifically a laser probe (1), includes a frame (10) comprised of a material selected to have a predetermined coefficient of thermal expansion. A beamsplitter (36) is coupled to the frame for generating a sample beam optical path (D) and a reference beam optical path (C). The beamsplitter is optically coupled to an optical fiber (12) that delivers radiation to and conveys radiation from the frame. A piezoelectric stack (48) has an excitation signal coupled thereto and includes a mirror (26) for phase modulating the reference beam optical path length in response to the excitation signal. The laser probe includes a first strain gauge (58) that is coupled to the piezoelectric stack and a second strain gauge (60) that is coupled to the frame.