Patents by Inventor Guy Patrick Tucker

Guy Patrick Tucker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for treating a semi-conductor substrate
    Patent number: 7923383
    Abstract: This invention relates to a method of treating a semiconductor wafer and in particular, but not exclusively, to planarisation. The method consists of depositing a liquid short-chain polymer formed from a silicon containing bas or vapour. Subsequently water and OH are removed and the layer is stabilised.
    Type: Grant
    Filed: March 28, 2003
    Date of Patent: April 12, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Knut Beekmann, Guy Patrick Tucker
  • Method and apparatus for treating a semi-conductor substrate
    Publication number: 20040043631
    Abstract: This invention relates to a method of treating a semiconductor wafer and in particular, but not exclusively, to planarisation. The method consists of depositing a liquid short-chain polymer formed from a silicon containing bas or vapour. Subsequently water and OH are removed and the layer is stabilised.
    Type: Application
    Filed: March 28, 2003
    Publication date: March 4, 2004
    Inventors: Knut Beekmann, Guy Patrick Tucker