Abstract: Disclosed herein is a flat panel display manufacturing apparatus in a predetermined process is performed using plasma generated therein. In such a flat panel display manufacturing apparatus, a process gas is supplied into a chamber in an evenly diffused state to generate even plasma inside a symmetrical interior space of the chamber. Consequently, the flat panel display manufacturing apparatus can appropriately control flow rate of the plasma, thereby being capable of performing even processing on a large-scale substrate. In the flat panel display manufacturing apparatus, a substrate pedestal thereof is provided with a combination of vertical and horizontal shielding members, thereby being entirely protected from attack of the plasma, resulting in an increased life-span.

Abstract: The present invention relates to a transfer chamber for a flat display device manufacturing apparatus, and more particularly, to a transfer chamber for a flat display device manufacturing apparatus, having a combination of functions of transfer and load-lock chambers, in which a robot is provided aside from a center of the transfer chamber, a buffer is provided to be driven without interference of the robot, and a aligner is provided to adjust a position of a substrate mounted on the buffer. In order to achieve the aforementioned objects, there is provided a transfer chamber for a flat display device manufacturing apparatus, wherein a robot is provided aside from a center of the transfer chamber. In addition, in order to drive the robot, a sealing member is provided to seal a hole formed at a predetermined portion of the transfer chamber, and an aligner for adjusting the substrate in the transfer chamber and a buffer where the substrate is mounted on are provided.

Abstract: Disclosed herein is a flat panel display manufacturing apparatus that is capable of performing a predetermined process, such as deposition or etching on a substrate under vacuum. The flat panel display manufacturing apparatus comprises a pin supporting member disposed at the outside of the flat panel display manufacturing apparatus. The pin supporting member is connected to a plurality of lift pins, which lift a substrate from a lower substrate or put the substrate on the lower substrate, for driving the lift pins upward or downward at the same time. Consequently, the inside volume of the flat panel display manufacturing apparatus is decreased as compared to the conventional flat panel display manufacturing apparatus, and thus time for carrying out a pumping operation to apply high-vacuum to the inside of the flat panel display manufacturing apparatus is considerably reduced.