Patents by Inventor Gwang-Ui Yun

Gwang-Ui Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for manufacturing semiconductor devices with a moveable shield
    Patent number: 6939807
    Abstract: An apparatus for manufacturing semiconductor devices includes a supporter portion on which a semiconductor substrate is placed, a nozzle portion for injecting a fluid to an edge of the substrate placed on the supporter portion, a shielding cover for preventing the fluid injected from the nozzle portion from flowing to a shielding portion among a pattern-formed portion, and a shielding cover moving portion device for moving the shielding cover up and down. The apparatus makes it possible to prevent a chemical solution injected to the edge of a wafer from flowing to a shielding portion of the wafer when the wafer edge is etched.
    Type: Grant
    Filed: August 1, 2003
    Date of Patent: September 6, 2005
    Assignee: Semes Co., Ltd.
    Inventors: Gwang-Ui Yun, Jae-Sun Han
  • Apparaus for manufacturing semiconductor devices
    Publication number: 20040077159
    Abstract: An apparatus for manufacturing semiconductor devices includes a supporter portion on which a semiconductor substrate is placed, a nozzle portion for injecting a fluid to an edge of the substrate placed on the supporter portion, a shielding cover for preventing the fluid injected from the nozzle portion from flowing to a shielding portion among a pattern-formed portion, and a shielding cover moving portion device for moving the shielding cover up and down. The apparatus makes it possible to prevent a chemical solution injected to the edge of a wafer from flowing to a shielding portion of the wafer when the wafer edge is etched.
    Type: Application
    Filed: August 1, 2003
    Publication date: April 22, 2004
    Inventors: Gwang-Ui Yun, Jae-Sun Han