Patents by Inventor Gyehoon Kwak

Gyehoon Kwak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR FABRICATION APPARATUS AND FABRICATION METHOD
    Publication number: 20230045027
    Abstract: A semiconductor fabrication apparatus comprises a process chamber, an ozone supply that provides the process chamber with ozone, an oxygen supply that provides the ozone supply with a source gas of the ozone, and a plurality of impurity detectors disposed between the oxygen supply and the ozone supply. The impurity detectors detect an inactive gas in the source gas.
    Type: Application
    Filed: April 14, 2022
    Publication date: February 9, 2023
    Inventors: Myoung-Kyu Oh, Gyehoon Kwak, Junguk KIM, Hyeonju KIM