Patents by Inventor Gyeong-Hwan OH

Gyeong-Hwan OH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck, etching apparatus, and method of manufacturing display device
    Patent number: 11990361
    Abstract: The chuck for supporting a target substrate for a display device, the chuck includes: a base having a first surface to support an object and a second surface opposite the first surface, the first surface including a first area and a second area; and indentations formed in the second area and recessed from the first area in a thickness direction of the base. The indentations include a first indentation extending in a first direction and a second indentation extending in a second direction intersecting the first direction.
    Type: Grant
    Filed: July 1, 2021
    Date of Patent: May 21, 2024
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Hee Sun Jang, Tae Hun Kim, Do Hwan Kim, Jae Han Kim, Seung Ho Myoung, Dae Young Oh, Gyeong Hee Han
  • METHOD OF WAFER EDGE EXPOSURE
    Publication number: 20070009815
    Abstract: In an embodiment, a method of wafer edge exposure includes sensing a reference position of a wafer edge exposure. A boundary for the edge exposure is set at a predetermined distance from the reference position, and then the edge region of the wafer is exposed. A first boundary for the first edge exposure can be set on the basis of the edge of the wafer, and a boundary for a next edge exposure can be set on the basis of the boundary in the previous edge exposure.
    Type: Application
    Filed: July 5, 2006
    Publication date: January 11, 2007
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Gyeong-Hwan OH, Hee-Sun CHAE