Abstract: A buffer unit for temporarily storing a substrate includes a housing having a space for storing a substrate therein, one or more slots disposed within the housing for placing a substrate thereon, and a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module. A substrate type sensor is stored at the holding unit.

Abstract: An apparatus for removing dust and offensive odor generated from ascon includes: a centrifugal dust collection unit which forcibly sucks offensive odor-causing materials, harmful gas and dust generated from the ascon, produced in an ascon producing unit, via a pipe so as to discharge the dust having a relatively large particle size via a hopper provided at the lower end thereof to the outside by means of a rotary valve while conveying air and relatively fine dust to a filtration-type dust collection unit via a pipe provided at the upper side thereof; the filtration-type dust collection unit for filtering the offensive odor-causing materials, harmful gas and fine dust having passed through the centrifugal dust collection unit by means of a filter while discharging the remaining fine dust or the like to the outside by a screw provided at the lower end of the hopper; a first cooling unit for condensing the harmful gas and offensive odor-causing materials of 150° C.

Abstract: An apparatus for removing dust and offensive odor generated from ascon includes: a centrifugal dust collection unit which forcibly sucks offensive odor-causing materials, harmful gas and dust generated from the ascon, produced in an ascon producing unit, via a pipe so as to discharge the dust having a relatively large particle size via a hopper provided at the lower end thereof to the outside by means of a rotary valve while conveying air and relatively fine dust to a filtration-type dust collection unit via a pipe provided at the upper side thereof; the filtration-type dust collection unit for filtering the offensive odor-causing materials, harmful gas and fine dust having passed through the centrifugal dust collection unit by means of a filter while discharging the remaining fine dust or the like to the outside by a screw provided at the lower end of the hopper; a first cooling unit for condensing the harmful gas and offensive odor-causing materials of 150° C.