Patents by Inventor Gyeong Ryeong BAK

Gyeong Ryeong BAK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

METAL CONTAINING PHOTORESIST DEVELOPER COMPOSITION, AND METHOD OF FORMING PATTERNS INCLUDING STEP OF DEVELOPING USING THE COMPOSITION

Publication number: 20240019784

Abstract: A metal-containing photoresist developer composition includes an organic solvent, and at least one additive selected from a phosphorous acid-based compound, a hypophosphorous acid-based compound, a sulfurous acid-based compound, and a hydroxamic acid-based compound, wherein the additive is included in an amount of about 0.0001 wt % to less than about 1.0 wt %. A method of forming patterns includes step of developing a metal-containing photoresist film using the metal-containing photoresist developer composition.

Type: Application

Filed: May 22, 2023

Publication date: January 18, 2024

Inventors: Ryunmin HEO, Jin-Hee BAE, Hyungrang MOON, Taeksoo KWAK, Gyeong Ryeong BAK, Chungheon LEE, Byeonggyu HWANG
Composition for depositing thin film, manufacturing method for thin film using the composition, thin film manufactured from the composition, and semiconductor device including the thin film

Patent number: 11482593

Abstract: Disclosed are a composition for depositing a thin film including an organometallic compound including strontium, barium, or a combination thereof; and at least one unshared electron pair-containing compound represented by Chemical Formula 1, a method of manufacturing a thin film using the composition for depositing the thin film, and the thin film manufactured from the composition for depositing the thin film, and a semiconductor device including the thin film.

Type: Grant

Filed: October 6, 2020

Date of Patent: October 25, 2022

Assignee: Samsung SDI Co., Ltd.

Inventors: Yong Tae Kim, Bukeun Oh, Gyeong Ryeong Bak, Taegeun Seong, Sangkyun Im, Seol Hee Lim, Hwansung Cheon
ORGANIC METAL COMPOUND, COMPOSITION FOR DEPOSITING THIN FILM COMPRISING THE ORGANIC METAL COMPOUND, MANUFACTURING METHOD FOR THIN FILM USING THE COMPOSITION, THIN FILM MANUFACTURED FROM THE COMPOSITION, AND SEMICONDUCTOR DEVICE INCLUDING THE THIN FILM

Publication number: 20210193459

Abstract: An organometallic compound represented by Chemical Formula 1 may be used in a composition for depositing a thin film including the organometallic compound, where A is derived from a compound represented by Chemical Formula 2: Embodiments of the present disclosure include the thin film, a manufacturing method for the thin film using the composition for depositing the thin film, and a semiconductor device including the thin film.

Type: Application

Filed: December 1, 2020

Publication date: June 24, 2021

Inventors: Sangkyun IM, Gyeong Ryeong BAK, Yong Tae KIM, Taegeun SEONG, Bukeun OH, Seol Hee LIM
COMPOSITION FOR DEPOSITING THIN FILM, MANUFACTURING METHOD FOR THIN FILM USING THE COMPOSITION, THIN FILM MANUFACTURED FROM THE COMPOSITION, AND SEMICONDUCTOR DEVICE INCLUDING THE THIN FILM

Publication number: 20210111244

Abstract: Disclosed are a composition for depositing a thin film including an organometallic compound including strontium, barium, or a combination thereof; and at least one unshared electron pair-containing compound represented by Chemical Formula 1, a method of manufacturing a thin film using the composition for depositing the thin film, and the thin film manufactured from the composition for depositing the thin film, and a semiconductor device including the thin film.

Type: Application

Filed: October 6, 2020

Publication date: April 15, 2021

Inventors: Yong Tae KIM, Bukeun OH, Gyeong Ryeong BAK, Taegeun SEONG, Sangkyun IM, Seol Hee LIM, Hwansung CHEON

METAL CONTAINING PHOTORESIST DEVELOPER COMPOSITION, AND METHOD OF FORMING PATTERNS INCLUDING STEP OF DEVELOPING USING THE COMPOSITION

Composition for depositing thin film, manufacturing method for thin film using the composition, thin film manufactured from the composition, and semiconductor device including the thin film

ORGANIC METAL COMPOUND, COMPOSITION FOR DEPOSITING THIN FILM COMPRISING THE ORGANIC METAL COMPOUND, MANUFACTURING METHOD FOR THIN FILM USING THE COMPOSITION, THIN FILM MANUFACTURED FROM THE COMPOSITION, AND SEMICONDUCTOR DEVICE INCLUDING THE THIN FILM

COMPOSITION FOR DEPOSITING THIN FILM, MANUFACTURING METHOD FOR THIN FILM USING THE COMPOSITION, THIN FILM MANUFACTURED FROM THE COMPOSITION, AND SEMICONDUCTOR DEVICE INCLUDING THE THIN FILM