Patents by Inventor Gyeong S. Cho

Gyeong S. Cho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a metal wire in a semiconductor device
    Patent number: 5573978
    Abstract: A method of forming a metal wire in a semiconductor device is disclosed. A multistage process, using the chemical vapor deposition method, with intermediate exposure to the atomsphere is to employed to deposit several layers of thin metal nitride film around and into a contact hole or via hole. Accordingly, the electrical connecting characteristic of a metal wire is enhanced.
    Type: Grant
    Filed: September 15, 1994
    Date of Patent: November 12, 1996
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventor: Gyeong S. Cho