Patents by Inventor Gyeong-Hee Han

Gyeong-Hee Han has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LASER APPARATUS AND LASER MACHINING METHOD
    Publication number: 20230201969
    Abstract: A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.
    Type: Application
    Filed: February 21, 2023
    Publication date: June 29, 2023
    Inventors: Sung Yong LEE, Toshinaru SUZUKI, Seung Ho MYOUNG, Gyeong Hee HAN, Gyoo Wan HAN
  • Laser apparatus and laser machining method
    Patent number: 11612964
    Abstract: A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: March 28, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Sung Yong Lee, Toshinaru Suzuki, Seung Ho Myoung, Gyeong Hee Han, Gyoo Wan Han
  • ELECTROSTATIC CHUCK, ETCHING APPARATUS, AND METHOD OF MANUFACTURING DISPLAY DEVICE
    Publication number: 20220037186
    Abstract: The chuck for supporting a target substrate for a display device, the chuck includes: a base having a first surface to support an object and a second surface opposite the first surface, the first surface including a first area and a second area; and indentations formed in the second area and recessed from the first area in a thickness direction of the base. The indentations include a first indentation extending in a first direction and a second indentation extending in a second direction intersecting the first direction.
    Type: Application
    Filed: July 1, 2021
    Publication date: February 3, 2022
    Inventors: Hee Sun JANG, Tae Hun KIM, Do Hwan KIM, Jae Han KIM, Seung Ho MYOUNG, Dae Young OH, Gyeong Hee HAN
  • LASER APPARATUS AND LASER MACHINING METHOD
    Publication number: 20210053159
    Abstract: A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.
    Type: Application
    Filed: April 30, 2020
    Publication date: February 25, 2021
    Inventors: Sung Yong LEE, Toshinaru SUZUKI, Seung Ho MYOUNG, Gyeong Hee HAN, Gyoo Wan HAN
  • Substrate loading device
    Patent number: 9605797
    Abstract: A substrate loading device including a frame part forming a loading space in which a plurality of substrates are loaded, and having an inlet surface in which the substrates are inserted, and a rear surface opposite to the inlet surface, a main support protruding from the rear surface of the frame part to support a rear side of the loaded substrates and a sub support mounted at the inlet surface of the frame part and protruding from the inlet surface to support a front and opposite side of the loaded substrates.
    Type: Grant
    Filed: January 14, 2014
    Date of Patent: March 28, 2017
    Assignee: Samsung Display Co., Ltd.
    Inventor: Gyeong-Hee Han
  • SUBSTRATE LOADING DEVICE
    Publication number: 20140231370
    Abstract: A substrate loading device including a frame part forming a loading space in which a plurality of substrates are loaded, and having an inlet surface in which the substrates are inserted, and a rear surface opposite to the inlet surface, a main support protruding from the rear surface of the frame part to support a rear side of the loaded substrates and a sub support mounted at the inlet surface of the frame part and protruding from the inlet surface to support a front and opposite side of the loaded substrates.
    Type: Application
    Filed: January 14, 2014
    Publication date: August 21, 2014
    Inventor: Gyeong-Hee Han