Patents by Inventor Gyorgy Fule

Gyorgy Fule has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for determining the layer thickness of semiconductor layer structures
    Patent number: 4995939
    Abstract: In a process for determining the layer thickness of semiconductor layer structures, a sample of a multilayer semi-conductor (4) is placed in contact with an electrolyte (2) then subjected to anodic etching during which the depth of etching is determined by integration of the current. During etching, the sample (4) is also excited by an electric signal and the real component of the admittance and hence the conductance of the probe at the frequency of excitation is determined, the extreme values of this component are analyzed, and the values of the depth of etching corresponding to these extremes, which characterize the junctions between the layers of the sample (4) tested, are determined.
    Type: Grant
    Filed: February 8, 1989
    Date of Patent: February 26, 1991
    Assignee: Magyar Tudomanyos Akademia Muszaki Fizikai Kutato Intezete
    Inventors: Gyorgy Ferenczi, Katalin Erdelyi, Maria Somogyi, Janos Boda, Gyorgy Fule, Gabor Aszodi