Abstract: An optical system with optical image stabilization of the present invention comprises at least one movement determination unit determining a movement of the optical system, a control circuitry generating a movement compensation signal using the movement information of the optical system from the movement determination unit, and a Micro-Electro Mechanical System (MEMS) unit made by microfabrication technology and controlled by the control circuitry with the movement compensation signal 32C to stabilize an image of an object formed on the image plane. The MEMS unit comprises a substrate, an MEMS mirror movably connected to the substrate and configured to have a motion comprising a rotation, and at least one actuation unit configured to actuating the MEMS mirror.