Abstract: A gap-filling method for a semiconductor device and method of manufacturing the semiconductor device using the same, are provided. The gap-filling method may include: preparing a substrate with a hole pattern; supplying a process gas to the substrate and applying a first VHF power source to form a pulse wave plasma to form a first silicon nitride layer in the hole pattern; and supplying the process gas to the substrate and applying a second VHF power source to form a continuous wave plasma to form a second silicon nitride layer on the first silicon nitride layer.

Abstract: A equipment front-end module (EFEM) includes: a body part; load ports in the body part and having loaded therein front opening unified pods (FOUPs), where wafers are stored; doors in the body part, movable in a first direction, and opening and closing entrances of the load ports; a fan unit on the load ports and providing an airflow in a direction opposite of the first direction; a first screen plate between the fan unit and the load ports, attached to the body part, and including a slant edge, that extends in a second direction that intersects the first direction; and second screen plates attached to the doors and extending in the first direction from upper surfaces of the doors, wherein the first screen plate changes a direction of the airflow, and the second screen plates prevent the airflow from entering the load ports.

Abstract: Disclosed are semiconductor memory devices and methods of fabricating the same. The semiconductor memory devices may include a capacitor including first and second electrodes and a dielectric layer. The dielectric layer may include a zirconium aluminum oxide layer including a first zirconium region adjacent to the first electrode, a first aluminum region, a second aluminum region adjacent to the second electrode, and a second zirconium region between the first and second aluminum regions. The first and second zirconium regions may include zirconium and oxygen and may be devoid of aluminum. The first and second aluminum regions may include aluminum and oxygen and may be devoid of zirconium. The first aluminum region and the first zirconium region may be spaced apart by a first distance, and the first aluminum region and the second zirconium region may be spaced apart by a second distance shorter than the first distance.

Abstract: Disclosed are semiconductor memory devices and methods of fabricating the same. The semiconductor memory devices may include a capacitor including first and second electrodes and a dielectric layer. The dielectric layer may include a zirconium aluminum oxide layer including a first zirconium region adjacent to the first electrode, a first aluminum region, a second aluminum region adjacent to the second electrode, and a second zirconium region between the first and second aluminum regions. The first and second zirconium regions may include zirconium and oxygen and may be devoid of aluminum. The first and second aluminum regions may include aluminum and oxygen and may be devoid of zirconium. The first aluminum region and the first zirconium region may be spaced apart by a first distance, and the first aluminum region and the second zirconium region may be spaced apart by a second distance shorter than the first distance.

Abstract: An embodiment mounting and demounting device for a wireless electronic device includes a pair of holder wings arranged symmetrically to each other and configured to press both sides of the wireless electronic device, a holder wing adjusting device configured to apply a force to adjust a gap between the holder wings using a driving force of a drive motor, a lifting implementing device configured to interlock with the holder wing adjusting device to lift the wireless electronic device upward in a case in which the holder wings are spread apart by a predetermined reference gap or more, a lower housing wrapped around a lower side of the holder wings, the holder wing adjusting device, and the lifting implementing device, and an upper housing coupled to an upper side of the lower housing and configured to allow the wireless electronic device to pass through in an up and down direction.

Abstract: A Kimchi stuffing adding device according to the present invention comprises: a Kimchi stuffing seasoning storage tank; a seasoning transport pump for receiving seasoning supplied from the Kimchi stuffing seasoning storage tank and supplying the seasoning to a transport pipe; a hopper for receiving the seasoning supplied from the transport pipe via a branch pipe that is branched from the transport pipe, and temporarily storing the seasoning; and a spray mechanism installed to be able to selectively spray the seasoning onto an end portion of the hopper. The spray mechanism can be turned ON or OFF and is provided to periodically spray a certain amount of the seasoning when turned on.

Abstract: A driver airbag module with a lighting device is proposed. The driver airbag module comprises an airbag cover, covering a driver airbag, configured to unfold toward a front space of a driver when the driver airbag is operated, wherein the airbag cover is located above the driver airbag. The airbag module further comprises the lighting device, wherein the lighting device comprises a plurality of lamps which are arranged to be spaced apart from each other, configured to emit light, located below the airbag cover, and coupled to the airbag cover such that the light emitted from the plurality of lamps is exposed to an upper space of the airbag cover. The airbag module further comprises a lighting controller configured to control flashing of the lighting device based on a driving condition of a vehicle, a charging status of a power source, and/or a driver condition.

Abstract: A system includes a vehicle operation detector, an exhaust brake operation unit, a diesel oxidation catalyst, a diesel particulate filter, an injector, and a controller for controlling the operation of the injector and the exhaust brake operation unit. A post injection control method during exhaust brake operation for the system includes: determining whether a predetermined regeneration condition of the diesel particulate filter according to the output signals of the vehicle operation detector is satisfied; performing, by the controller, regeneration by controlling the operation of the injector if the regeneration condition is satisfied; determining, by the controller, whether an exhaust brake operation condition is satisfied during regeneration based on the output signals of the vehicle operation detector; and controlling, by the controller, the operation of the injector to perform post-injection with a predetermined amount of fuel when the exhaust brake operation condition is met during the regeneration.

Abstract: The present specification relates to a device and method capable of determining a coronavirus mutation using a highly sensitive label-free terahertz electromagnetic wave metamaterial sensor, and a device for diagnosing a coronavirus disease-19, amd the device can specify the amino acids of a virus belonging to the genus coronavirus having an excellent absorption in a terahertz band, and the metamaterial can amplify the corresponding signal, and the problem of coffee ring formation, which hinders the measurement and analysis in the conventional measurement and analysis of solution-based samples, can be solved by the method in which a sample containing coronavirus is applied to the surface of a metamaterial, and the optical constant value of the sample is analyzed, so that it is possible to more quickly and accurately determine the coronavirus mutation, and furthermore, there is an excellent effect in diagnosing a coronavirus disease-19.

Abstract: A driver airbag module with a lighting device is proposed. The driver airbag module comprises an airbag cover, covering a driver airbag, configured to unfold toward a front space of a driver when the driver airbag is operated, wherein the airbag cover is located above the driver airbag. The airbag module further comprises the lighting device, wherein the lighting device comprises a plurality of lamps which are arranged to be spaced apart from each other, configured to emit light, located below the airbag cover, and coupled to the airbag cover such that the light emitted from the plurality of lamps is exposed to an upper space of the airbag cover. The airbag module further comprises a lighting controller configured to control flashing of the lighting device based on a driving condition of a vehicle, a charging status of a power source, and/or a driver condition.

Abstract: Disclosed are semiconductor memory devices and methods of fabricating the same. The semiconductor memory devices may include a capacitor including first and second electrodes and a dielectric layer. The dielectric layer may include a zirconium aluminum oxide layer including a first zirconium region adjacent to the first electrode, a first aluminum region, a second aluminum region adjacent to the second electrode, and a second zirconium region between the first and second aluminum regions. The first and second zirconium regions may include zirconium and oxygen and may be devoid of aluminum. The first and second aluminum regions may include aluminum and oxygen and may be devoid of zirconium. The first aluminum region and the first zirconium region may be spaced apart by a first distance, and the first aluminum region and the second zirconium region may be spaced apart by a second distance shorter than the first distance.

Abstract: Disclosed is a nanofiber-based long-term primary hepatocyte culture system and a culture method, wherein the primary hepatocyte culture system has an advantage that it can culture cells in three-dimensions in vitro to maintain the original physiological activity of low proliferative primary hepatocytes for a long time by co-culturing indirectly by separating primary hepatocytes and hepatic non-parenchymal cells with a support consisting of nanofibers therebetween without direct co-culture.

Abstract: Methods and apparatus for transmitting and receiving broadcast signals are provided. The method for transmitting a broadcast signal includes encoding mobile data for forward error correction (FEC), encoding signaling data, forming data groups including the encoded mobile data and the encoded signaling data and transmitting a signal frame that includes the data groups.

Abstract: Disclosed are semiconductor memory devices and methods of fabricating the same. The semiconductor memory devices may include a capacitor including first and second electrodes and a dielectric layer. The dielectric layer may include a zirconium aluminum oxide layer including a first zirconium region adjacent to the first electrode, a first aluminum region, a second aluminum region adjacent to the second electrode, and a second zirconium region between the first and second aluminum regions. The first and second zirconium regions may include zirconium and oxygen and may be devoid of aluminum. The first and second aluminum regions may include aluminum and oxygen and may be devoid of zirconium. The first aluminum region and the first zirconium region may be spaced apart by a first distance, and the first aluminum region and the second zirconium region may be spaced apart by a second distance shorter than the first distance.

Abstract: Disclosed are semiconductor memory devices and methods of fabricating the same. The semiconductor memory device comprises a capacitor that includes a bottom electrode, a top electrode opposite to the bottom electrode across a dielectric layer, and an interface layer between the bottom electrode and the dielectric layer. The interface layer includes a combination of niobium (Nb), titanium (Ti), oxygen (O), and nitrogen (N), and further includes a constituent of the dielectric layer.

Abstract: Provided is a guide bumper for a tailgate, including a first guide member attached to one of a vehicle body and a tailgate, and a second guide member disposed on the opposite side of the first guide member, the first guide member including at least one outer body and at least one elastic core inserted into the outer body.

Abstract: The present disclosure relates to a substrate transfer device for sensing deflection of an end-effector and a substrate processing apparatus having the same. The substrate transfer device includes: an end-effector extending in a first direction and supporting a substrate; an end-effector hand connected with one side in the first direction of the end-effector; a horizontal movement unit connected with the end-effector hand and moving the end-effector in the first direction; and a deflection sensing unit including a light emitting part and a light receiving part, which are respectively disposed at both sides of a movement path of the end-effector, and sensing deflection of the end-effector.

Abstract: A snorkeling breathing apparatus of the present invention includes a mouthpiece; an inhalation unit configured to communicate with the mouthpiece and to open upon inhalation to guide external air to the mouthpiece and close upon exhalation; and an exhalation unit configured to communicate with the mouthpiece and to close upon inhalation and open upon exhalation to discharge the exhalation.

Abstract: Disclosed is a color and luminance measuring device including a filter unit including a case which covers the entire device and has a light incident part formed on one side thereof through which measured light emitted from an object to be measured is incident, a measurement unit which measures luminance and a color by receiving the measured light in the case, and a filter unit which is disposed on a movement path of the measured light in the case to selectively control the luminance of the measured light transmitted to the measurement unit and transmit the measured light, wherein the filter unit reduces the luminance of the measured light to a predetermined level when the measured light has luminance of a predetermined level or higher and transmits the measured light to the measurement unit.

Abstract: A digital broadcast transmitting/receiving system and a method for processing data are disclosed. The method for processing data may enhance the receiving performance of the receiving system by performing additional coding and multiplexing processes on the traffic information data and transmitting the processed data. Thus, robustness is provided to the traffic information data, thereby enabling the data to respond strongly against the channel environment which is always under constant and vast change.