Patents by Inventor Gyueng Hyuen CHOE

Gyueng Hyuen CHOE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA PROCESS SYSTEM FOR MULTI-STATION
    Publication number: 20240162006
    Abstract: According to one embodiment of the present disclosure, there can be provided a plasma processing system for multi-station, the system including a processing chamber including at least two or more stations, one plasma generator provided for each of the stations, one inverter provided for each of the plasma generators, a sensing unit configured to measure an electric characteristic of each of the plasma generators, and a controller configured to acquire sensing data from the sensing unit and control each of the inverters.
    Type: Application
    Filed: December 28, 2022
    Publication date: May 16, 2024
    Inventors: Sae Hoon UHM, Dong JEGAL, Yeonghoon SOHN, Gyueng Hyuen CHOE, Se Hong PARK, Jin HUH