Patents by Inventor H.S. Lan

H.S. Lan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030053892
    Abstract: A loadport for a semiconductor fabrication machine that is equipped with an automatic height adjustment means and a method for operating the loadport are described. The loadport consists of a moveable platform for carrying a wafer cassette thereon and supported by at least two support members capable of moving the platform in an up-and-down direction. A distance sensor is mounted on a bottom surface of the platform for measuring a height of the platform. A process controller is used to receive a first signal from the distance sensor, comparing to a pre-stored datum and then sending a second signal to the at least two support members to move the platform until the first signal equals the pre-stored datum.
    Type: Application
    Filed: September 17, 2001
    Publication date: March 20, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: H.S. Lan, Y.C. Huang, D.M. Tseng, C.D. Chang