Patents by Inventor H. Steven Larson

H. Steven Larson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for cross-flow purge for optical components in a chamber
    Patent number: 9662688
    Abstract: An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.
    Type: Grant
    Filed: July 5, 2013
    Date of Patent: May 30, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Garry Rose, Gildardo Delgado, H. Steven Larson, Daniel R. Hennigan
  • High purity ozone generator for optics cleaning and recovery
    Patent number: 9573111
    Abstract: An apparatus for producing a high purity stream of ozone including a reaction chamber having an inlet and an outlet, a gaseous feed stream having a first purified component and an ultraviolet source. The gaseous feed stream enters the reaction chamber through the inlet, the first purified component includes oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet.
    Type: Grant
    Filed: July 5, 2013
    Date of Patent: February 21, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Garry A. Rose, Gildardo R. Delgado, H. Steven Larson
  • APPARATUS AND METHOD FOR CROSS-FLOW PURGE FOR OPTICAL COMPONENTS IN A CHAMBER
    Publication number: 20140007910
    Abstract: An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.
    Type: Application
    Filed: July 5, 2013
    Publication date: January 9, 2014
    Inventors: Garry Rose, Gildardo Delgado, H. Steven Larson, Daniel R. Hennigan