Abstract: The present invention relates to a device wherein fluid or air-induced instability is converted into a flow sensing mechanism by building a CPW (Coplanar Wave Guide) resonator. Depending on the flow rate, periodic transitions between two bistable states emerge. Owing to the dependence of the transition period and the flow rate, the use of this effect for on-chip flow rate sensing is achieved with this invention. Moreover, the present invention ensures a flow rate sensor to be used in the ventilation machines for the treatment of the COVID-19 pandemic.

Abstract: The present invention relates to a device wherein fluid or air-induced instability is converted into a flow sensing mechanism by building a CPW (Coplanar Wave Guide) resonator. Depending on the flow rate, periodic transitions between two bistable states emerge. Owing to the dependence of the transition period and the flow rate, the use of this effect for on-chip flow rate sensing is achieved with this invention. Moreover, the present invention ensures a flow rate sensor to be used in the ventilation machines for the treatment of the COVID-19 pandemic.

Abstract: The present invention relates to a device for determining the mass of a nanoparticle, virus or protein in a suspension or solution in a fluid. This device can be applied in particular to mass spectrometry for ionized species with high collection efficiency (i.e. low limit of detection). According to the present invention, an instrument comprises a first device for electrospraying the fluid to obtain a charged flux comprising at least the particle, a second device for determining the mass of the particle by a frequency measurement and a third device that is fabricated on the same chip with, and surrounding the second device to focus and guide the majority of the incoming charged particles including at least the particle by means of holding charge on itself to act as an electrostatic lens.