Patents by Inventor HAE JIN SUNG

HAE JIN SUNG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for treating substrate including process chambers and transfer chamber
    Patent number: 11923216
    Abstract: An apparatus and method for treating a substrate are provided. The apparatus includes at least one first process chamber configured to supply a developer onto the substrate; at least one second process chamber configured to treat the substrate using a supercritical fluid; a transfer chamber configured to transfer the substrate from the at least one first process chamber to the at least one second process chamber, while the developer supplied in the at least one first process chamber remains on the substrate; and a temperature and humidity control system configured to manage temperature and humidity of the transfer chamber by supplying a first gas of constant temperature and humidity into the transfer chamber.
    Type: Grant
    Filed: August 22, 2022
    Date of Patent: March 5, 2024
    Assignees: SAMSUNG ELECTRONICS CO., LTD., SEMES CO., LTD.
    Inventors: Seung Min Shin, Sang Jin Park, Hae Won Choi, Jang Jin Lee, Ji Hwan Park, Kun Tack Lee, Koriakin Anton, Joon Ho Won, Jin Yeong Sung, Pil Kyun Heo
  • Flexible support apparatus for superconducting magnet in superconducting rotating machine
    Patent number: 10320251
    Abstract: The present disclosure relates to a flexible support apparatus for superconducting magnet in superconducting rotating machine. The present disclosure relates to a flexible support apparatus for superconducting magnet in superconducting rotating machine that includes a superconducting magnet that is located in a rotor body of a superconducting rotating machine, a vacuum container that internally stores the superconducting magnet, a first support that supports the superconducting magnet by being internally attached to the vacuum container, a third support that supports the superconducting magnet by being externally attached to the superconducting magnet, and a second support that is located between the first support and the second support and that supports the superconducting magnet by including a flexible material.
    Type: Grant
    Filed: October 25, 2017
    Date of Patent: June 11, 2019
    Assignee: INDUSTRY-ACADEMIC COOPERATION FOUNDATION CHANGWON NATIONAL UNIVERSITY
    Inventors: Min Won Park, In Keun Yu, Hae Jin Sung, Byeong Soo Go, Hyun Kyung Shin
  • FLEXIBLE SUPPORT APPARATUS FOR SUPERCONDUCTING MAGNET IN SUPERCONDUCTING ROTATING MACHINE
    Publication number: 20180175710
    Abstract: The present disclosure relates to a flexible support apparatus for superconducting magnet in superconducting rotating machine. The present disclosure relates to a flexible support apparatus for superconducting magnet in superconducting rotating machine that includes a superconducting magnet that is located in a rotor body of a superconducting rotating machine, a vacuum container that internally stores the superconducting magnet, a first support that supports the superconducting magnet by being internally attached to the vacuum container, a third support that supports the superconducting magnet by being externally attached to the superconducting magnet, and a second support that is located between the first support and the second support and that supports the superconducting magnet by including a flexible material.
    Type: Application
    Filed: October 25, 2017
    Publication date: June 21, 2018
    Inventors: MIN WON PARK, IN KEUN YU, HAE JIN SUNG, BYEONG SOO GO, HYUN KYUNG SHIN