Patents by Inventor Hae Wang Yang

Hae Wang Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8338893
    Abstract: A shallow trench isolation structure for integrated circuits includes a semiconductor substrate having a trench and a buffered oxide layer overlying the semiconductor substrate. A pad nitride layer is overlying the buffered oxide layer. An implanted region is formed around a perimeter of the trench. The trench has a bottom width of less than 0.13 microns and an upper width of less than 0.13 microns. A rounded edge is surrounding a periphery of the trench. The rounded edge has a radius of curvature greater than about 0.02 um. A planarized high density plasma fill material is formed within the trench. The structure has a P-well region within the semiconductor substrate and bordering a vicinity of the trench region. A channel region is within the P-well region within the semiconductor substrate. The implanted region has an impurity concentration of more than double an amount of impurities in the channel region.
    Type: Grant
    Filed: January 7, 2011
    Date of Patent: December 25, 2012
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Hae Wang Yang
  • Publication number: 20110101464
    Abstract: A shallow trench isolation structure for integrated circuits includes a semiconductor substrate having a trench and a buffered oxide layer overlying the semiconductor substrate. A pad nitride layer is overlying the buffered oxide layer. An implanted region is formed around a perimeter of the trench. The trench has a bottom width of less than 0.13 microns and an upper width of less than 0.13 microns. A rounded edge is surrounding a periphery of the trench. The rounded edge has a radius of curvature greater than about 0.02 um. A planarized high density plasma fill material is formed within the trench. The structure has a P-well region within the semiconductor substrate and bordering a vicinity of the trench region. A channel region is within the P-well region within the semiconductor substrate. The implanted region has an impurity concentration of more than double an amount of impurities in the channel region.
    Type: Application
    Filed: January 7, 2011
    Publication date: May 5, 2011
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Hae Wang Yang
  • Patent number: 7880263
    Abstract: A shallow trench isolation structure for integrated circuits. The structure includes a semiconductor substrate and a buffered oxide layer overlying the semiconductor substrate. A pad nitride layer is overlying the buffered oxide layer. An implanted region is formed around a perimeter of the trench region. A trench region is formed within the semiconductor substrate. The trench region has a bottom width of less than 0.13 microns and an upper width of less than 0.13 microns. A rounded edge region is within a portion of the semiconductor substrate surrounding a periphery of the trench region. The rounded edges have a radius of curvature greater than about 0.02 um. A planarized high density plasma fill material is formed within the trench region. The structure has a P-well region within the semiconductor substrate and bordering a vicinity of the trench region. A channel region is within the P-well region within the semiconductor substrate.
    Type: Grant
    Filed: September 25, 2008
    Date of Patent: February 1, 2011
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Hae Wang Yang
  • Patent number: 7678644
    Abstract: A method for fabricating DRAM cells, e.g., dynamic random access memory cells. The method includes providing a semiconductor substrate, e.g., silicon wafer. The method includes forming a plurality of NMOS transistor gate structures. Each of the NMOS gate structures includes an NMOS source region and an NMOS drain region and a plurality of PMOS gate structures. Each of the PMOS gate structures includes a PMOS source region and a PMOS drain region. The NMOS gate structures are formed on P-type well regions and the PMOS gate structures are formed on N-type well regions. An interlayer dielectric layer is overlying each of the gate structures while filling a gap between two or more of the NMOS gate structures.
    Type: Grant
    Filed: August 6, 2007
    Date of Patent: March 16, 2010
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Hae Wang Yang
  • Publication number: 20100001367
    Abstract: A shallow trench isolation structure for integrated circuits. The structure includes a semiconductor substrate and a buffered oxide layer overlying the semiconductor substrate. A pad nitride layer is overlying the buffered oxide layer. An implanted region is formed around a perimeter of the trench region. A trench region is formed within the semiconductor substrate. The trench region has a bottom width of less than 0.13 microns and an upper width of less than 0.13 microns. A rounded edge region is within a portion of the semiconductor substrate surrounding a periphery of the trench region. The rounded edges have a radius of curvature greater than about 0.02 um. A planarized high density plasma fill material is formed within the trench region. The structure has a P-well region within the semiconductor substrate and bordering a vicinity of the trench region. A channel region is within the P-well region within the semiconductor substrate.
    Type: Application
    Filed: September 25, 2008
    Publication date: January 7, 2010
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Hae Wang Yang
  • Publication number: 20080138947
    Abstract: A method for fabricating DRAM cells, e.g., dynamic random access memory cells. The method includes providing a semiconductor substrate, e.g., silicon wafer. The method includes forming a plurality of NMOS transistor gate structures. Each of the NMOS gate structures includes an NMOS source region and an NMOS drain region and a plurality of PMOS gate structures. Each of the PMOS gate structures includes a PMOS source region and a PMOS drain region. The NMOS gate structures are formed on P-type well regions and the PMOS gate structures are formed on N-type well regions. An interlayer dielectric layer is overlying each of the gate structures while filling a gap between two or more of the NMOS gate structures.
    Type: Application
    Filed: August 6, 2007
    Publication date: June 12, 2008
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: HAE WANG YANG