Patents by Inventor Hae Young Kim

Hae Young Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250017996
    Abstract: The present invention relates to a composition, for preventing, relieving, or treating a muscle weakness-related disease, comprising a celery seed extract. The celery seed extract according to the present invention causes a few or no side effects by using a natural product, may increase muscle mass and muscle strength to not only prevent muscle weakness but also inhibit weight gain and body fat increase, and may reduce serum lipid profiles and hepatotoxicity markers (GOT and GPT), and thus is expected to be utilized for preventing, relieving, or treating muscle weakness-related diseases, metabolic diseases, liver diseases, or the like.
    Type: Application
    Filed: July 26, 2022
    Publication date: January 16, 2025
    Inventors: Eun-Young KWON, Youngji HAN, Ji-Won KIM, Hae-Jin PARK
  • Patent number: 12165918
    Abstract: The disclosed technology generally relates to forming a titanium nitride-based thin films, and more particularly to a conformal and smooth titanium nitride-based thin films and methods of forming the same. In one aspect, a method of forming a thin film comprising one or both of TiSiN or TiAlN comprises exposing a semiconductor substrate to one or more vapor deposition cycles at a pressure in a reaction chamber greater than 1 torr, wherein a plurality of the vapor deposition cycles comprises an exposure to a titanium (Ti) precursor, an exposure to a nitrogen (N) precursor and an exposure to one or both of a silicon (Si) precursor or an aluminum (Al) precursor.
    Type: Grant
    Filed: June 10, 2022
    Date of Patent: December 10, 2024
    Assignee: Eugenus, Inc.
    Inventors: Niloy Mukherjee, Hae Young Kim, Jerry Mack, Jae Seok Heo, Sung-Hoon Jung, Somilkumar J. Rathi, Srishti Chugh, Nariman Naghibolashrafi, Yoshikazu Okuyama, Bunsen B. Nie
  • Publication number: 20240124978
    Abstract: A gas diffuser plate in a cyclic deposition chamber is disclosed. The gas diffuser plate as fabricated comprises a substrate diffuser plate having a substrate emissivity and a coating formed on the substrate diffuser plate. The gas diffuser plate having the substrate diffuser plate coated with the coating has an emissivity higher than the substrate emissivity. The coating comprises a first layer formed on the substrate diffuser plate and comprising a first material configured to modulate the emissivity of the gas diffuser plate, and a second layer comprising a second corrosion-resistant material. The first material comprises titanium nitride oxide (TiNxOy). The emissivity of the gas diffuser plate is at least partially based on the ratio of nitrogen and oxygen in TiNxOy.
    Type: Application
    Filed: October 6, 2023
    Publication date: April 18, 2024
    Inventors: Behzad Mahmoudi, Mats Ingvar Larsson, Selase Torkornoo, Hae Young Kim, Cole Delany Green, Bunsen Nie, James Long Wu, Chan Yong Park, Deoghwan Kim, Siwon Ryu, Jae Jun Jung, Changhun Shin
  • Publication number: 20230395369
    Abstract: The disclosed technology generally relates to forming a titanium nitride layer, and more particularly to forming by atomic layer deposition a titanium nitride layer on a seed layer. In one aspect, a semiconductor structure comprises a semiconductor substrate comprising a non-metallic surface. The semiconductor structure additionally comprises a seed layer comprising silicon (Si) and nitrogen (N) conformally coating the non-metallic surface and a TiN layer conformally coating the seed layer. Aspects are also directed to methods of forming the semiconductor structures.
    Type: Application
    Filed: February 15, 2023
    Publication date: December 7, 2023
    Inventors: Sung-Hoon Jung, Niloy Mukherjee, Hee Seok Kim, Kyu Jin Choi, Moonsig Joo, Hae Young Kim, Yoshikazu Okuyama, Nariman Naghibolashrafi, Bunsen B. Nie, Somilkumar J. Rathi
  • Publication number: 20230215725
    Abstract: The disclosed technology generally relates to forming a thin film comprising titanium nitride (TiN), and more particularly to forming by a cyclical vapor deposition process the thin film comprising (TiN).
    Type: Application
    Filed: September 30, 2022
    Publication date: July 6, 2023
    Inventors: Sung-Hoon Jung, Niloy Mukherjee, Yoshikazu Okuyama, Nariman Naghibolashrafi, Bunsen B. Nie, Hae Young Kim, Somilkumar J. Rathi
  • Patent number: 11587784
    Abstract: The disclosed technology generally relates to forming a titanium nitride layer, and more particularly to forming by atomic layer deposition a titanium nitride layer on a seed layer. In one aspect, a semiconductor structure comprises a semiconductor substrate comprising a non-metallic surface. The semiconductor structure additionally comprises a seed layer comprising silicon (Si) and nitrogen (N) conformally coating the non-metallic surface and a TiN layer conformally coating the seed layer. Aspects are also directed to methods of forming the semiconductor structures.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: February 21, 2023
    Assignee: Eugenus, Inc.
    Inventors: Sung-Hoon Jung, Niloy Mukherjee, Hee Seok Kim, Kyu Jin Choi, Moonsig Joo, Hae Young Kim, Yoshikazu Okuyama, Nariman Naghibolashrafi, Bunsen B. Nie, Somilkumar J. Rathi
  • Publication number: 20220415709
    Abstract: The disclosed technology generally relates to forming a titanium nitride-based thin films, and more particularly to a conformal and smooth titanium nitride-based thin films and methods of forming the same. In one aspect, a method of forming a thin film comprising one or both of TiSiN or TiAlN comprises exposing a semiconductor substrate to one or more vapor deposition cycles at a pressure in a reaction chamber greater than 1 torr, wherein a plurality of the vapor deposition cycles comprises an exposure to a titanium (Ti) precursor, an exposure to a nitrogen (N) precursor and an exposure to one or both of a silicon (Si) precursor or an aluminum (Al) precursor.
    Type: Application
    Filed: June 10, 2022
    Publication date: December 29, 2022
    Inventors: Niloy Mukherjee, Hae Young Kim, Jerry Mack, Jae Seok Heo, Sung-Hoon Jung, Somilkumar J. Rathi, Srishti Chugh, Nariman Naghibolashrafi, Yoshikazu Okuyama, Bunsen B. Nie
  • Patent number: 11482413
    Abstract: The disclosed technology generally relates to forming a thin film comprising titanium nitride (TiN), and more particularly to forming by a cyclical vapor deposition process the thin film comprising (TiN).
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: October 25, 2022
    Assignee: Eugenus, Inc.
    Inventors: Sung-Hoon Jung, Niloy Mukherjee, Yoshikazu Okuyama, Nariman Naghibolashrafi, Bunsen B. Nie, Hae Young Kim, Somilkumar J. Rathi
  • Publication number: 20220301929
    Abstract: The disclosed technology generally relates to forming a titanium nitride-based thin films, and more particularly to a conformal and smooth titanium nitride-based thin films and methods of forming the same. In one aspect, a method comprises forming a diffusion barrier comprising TiSiN having a modulus exceeding 290 GPa and a Si content exceeding 2.7 atomic % by exposing a semiconductor substrate to one or more first deposition phases alternating with one or more second deposition phases. Exposing the semiconductor substrate to the one or more first deposition phases comprises alternatingly exposing the semiconductor substrate to a titanium (Ti) precursor and a nitrogen (N) precursor. Exposing the semiconductor substrate to the one or more second deposition phases comprises sequentially exposing the semiconductor substrate to the Ti precursor, followed by a silicon (Si) precursor, followed by the N precursor.
    Type: Application
    Filed: April 6, 2022
    Publication date: September 22, 2022
    Inventors: Ajit Dhamdhere, Hae Young Kim, Hyunchol Cho, Bunsen B. Nie
  • Publication number: 20220301928
    Abstract: The disclosed technology generally relates to forming a titanium nitride-based thin films, and more particularly to a conformal and smooth titanium nitride-based thin films and methods of forming the same. In one aspect, a method of forming a diffusion barrier comprising TiSiN comprises exposing a semiconductor substrate to one or more first deposition phases alternating with one or more second deposition phases. Exposing the semiconductor substrate to the one or more first deposition phases comprises alternatingly exposing the semiconductor substrate to a titanium (Ti) precursor and a nitrogen (N) precursor. Exposing the semiconductor substrate to the one or more second deposition phases comprises sequentially exposing the semiconductor substrate to the Ti precursor and a silicon (Si) precursor without an intervening exposure to the N precursor therebetween, followed by exposing the semiconductor substrate to the N precursor.
    Type: Application
    Filed: April 6, 2022
    Publication date: September 22, 2022
    Inventors: Hae Young Kim, Hyunchol Cho, Ajit Dhamdhere, Bunsen B. Nie
  • Publication number: 20220216060
    Abstract: The disclosed technology generally relates to forming a thin film comprising titanium nitride (TiN), and more particularly to forming by a cyclical vapor deposition process the thin film comprising (TiN). In one aspect, a method of forming a thin film comprising titanium nitride (TiN) by a cyclical vapor deposition process comprises forming on a semiconductor substrate a TiN thin film by exposing the semiconductor substrate to one or more cyclical vapor deposition cycles each comprising an exposure to a Ti precursor at a Ti precursor flow rate and an exposure to a NH3 precursor at a NH3 precursor flow rate, after forming the TiN film, subjecting the semiconductor substrate, without further deposition of the TiN thin film, to a post-deposition exposure of NH3 at a second NH3 flow rate.
    Type: Application
    Filed: March 21, 2022
    Publication date: July 7, 2022
    Inventors: Hyunchol Cho, Hae Young Kim, Bunsen B. Nie
  • Patent number: 11361992
    Abstract: The disclosed technology generally relates to forming a titanium nitride-based thin films, and more particularly to a conformal and smooth titanium nitride-based thin films and methods of forming the same. In one aspect, a method of forming a thin film comprising one or both of TiSiN or TiAlN comprises exposing a semiconductor substrate to one or more vapor deposition cycles at a pressure in a reaction chamber greater than 1 torr, wherein a plurality of the vapor deposition cycles comprises an exposure to a titanium (Ti) precursor, an exposure to a nitrogen (N) precursor and an exposure to one or both of a silicon (Si) precursor or an aluminum (Al) precursor.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: June 14, 2022
    Assignee: Eugenus, Inc.
    Inventors: Niloy Mukherjee, Hae Young Kim, Jerry Mack, Jae Seok Heo, Sung-Hoon Jung, Somilkumar J. Rathi, Srishti Chugh, Nariman Naghibolashrafi, Yoshikazu Okuyama, Bunsen B. Nie
  • Publication number: 20220172988
    Abstract: The disclosed technology generally relates to forming a thin film comprising titanium nitride (TiN), and more particularly to forming by a cyclical vapor deposition process the thin film comprising (TiN). In one aspect, a method a method of forming a thin film comprising titanium nitride (TiN) by a cyclical vapor deposition process comprises forming on a semiconductor substrate a TiN thin film by exposing the semiconductor substrate to one or more cyclical vapor deposition cycles each comprising an exposure to a Ti precursor at a Ti precursor flow rate and an exposure to a N precursor at a N precursor flow rate, wherein a ratio of the N precursor flow rate to the Ti precursor flow rate exceeds 3.
    Type: Application
    Filed: December 9, 2021
    Publication date: June 2, 2022
    Inventors: Hyunchol Cho, Hae Young Kim, Ajit Dhamdhere, Bunsen B. Nie, Sung-Hoon Jung
  • Publication number: 20210234199
    Abstract: This invention relates to a non-aqueous liquid electrolyte composition suitable for secondary battery cells, especially lithium-ion secondary battery cells. Such electrolyte composition comprises a) at least one non-fluorinated cyclic carbonate and at least one fluorinated cyclic carbonate, b) at least one fluorinated acyclic carboxylic acid ester, c) at least one electrolyte salt, d) at least one lithium borate compound, e) at least one cyclic sulfur compound, and f) optionally at least one cyclic carboxylic acid anhydride, all components being present in specific proportions. It can advantageously be used in batteries comprising a cathode material comprising a lithium nickel manganese cobalt oxide (NMC) or a lithium cobalt oxide (LCO), especially at a high operating voltage.
    Type: Application
    Filed: May 2, 2019
    Publication date: July 29, 2021
    Inventors: Ji-Hye WON, Moon-Hyung CHOI, Mi-Soon OH, Hyun-Cheol LEE, Lawrence Alan HOUGH, Hae-Young KIM
  • Publication number: 20210234200
    Abstract: A liquid electrolyte lithium secondary battery cell comprising: —a positive electrode material comprising a lithium transition metal-based oxide powder having a general formula Li1+a ((Niz (Ni0.5Mn0.5)y Cox)1-k Ak)1-a O2, wherein A is a dopant, ?0.025?a?0.025, 0.18?x?0.22, 0.42?z?0.52, 1.075<z/y<1.625, x+y+z=1 and k?0.01; and—an electrolyte composition comprising: a) at least one cyclic carbonate, b) at least one fluorinated acyclic carboxylic acid ester, c) at least one electrolyte salt, d) at least one lithium compound selected from lithium phosphate compounds, lithium boron compounds, lithium sulfonate compounds and mixtures thereof, e) at least one cyclic sulfur compound, and f) optionally at least one cyclic carboxylic acid anhydride.
    Type: Application
    Filed: May 2, 2019
    Publication date: July 29, 2021
    Applicants: Umicore, Solvay S.A.
    Inventors: JiHye KIM, Jens PAULSEN, AReum PARK, Dae-Hyun KIM, Hee-Sung GIL, Jean-Sébastien BRIDEL, Ji-Hye WON, Moon-Hyung CHOI, Mi-Soon OH, Hyuncheol LEE, Lawrence Alan HOUGH, Hae-Young KIM
  • Publication number: 20210135291
    Abstract: A liquid electrolyte lithium secondary battery cell comprising: a positive electrode including a powderous positive active material having the following chemical formula: Li1?x(Co1-a-b-cNiaMnbM?c)1?xO2 with ?0.01?x?0.01, 0.00?a?0.09, 0.01?b?0.05, and 0.00?c?0.03 wherein M? is either one or more metals of the group consisting of Al, Mg, Ti and Zr; and an electrolyte composition comprising at least one cyclic carbonate; at least one fluorinated acyclic carboxylic acid ester; at least one electrolyte salt; at least one lithium compound selected from lithium phosphates compounds, lithium boron compounds, lithium sulfonates compounds and mixtures thereof; at least one cyclic sulfur compound; and optionally at least one cyclic carboxylic acid anhydride.
    Type: Application
    Filed: May 2, 2019
    Publication date: May 6, 2021
    Inventors: Jeong-Rae KIM, Jong-Ju LEE, Jean-Sébastien BRIDEL, Ji-Hye WON, Moon-Hyung CHOI, Mi-Soon OH, Hyuncheol LEE, Lawrence Alan HOUGH, Hae-Young KIM
  • Publication number: 20210104397
    Abstract: The disclosed technology generally relates to forming a titanium nitride layer, and more particularly to forming by atomic layer deposition a titanium nitride layer on a seed layer. In one aspect, a semiconductor structure comprises a semiconductor substrate comprising a non-metallic surface. The semiconductor structure additionally comprises a seed layer comprising silicon (Si) and nitrogen (N) conformally coating the non-metallic surface and a TiN layer conformally coating the seed layer. Aspects are also directed to methods of forming the semiconductor structures.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 8, 2021
    Inventors: Sung-Hoon Jung, Niloy Mukherjee, Hee Seok Kim, Kyu Jin Choi, Moonsig Joo, Hae Young Kim, Yoshikazu Okuyama, Nariman Naghibolashrafi, Bunsen B. Nie, Somilkumar J. Rathi
  • Publication number: 20210104433
    Abstract: The disclosed technology generally relates to forming a titanium nitride-based thin films, and more particularly to a conformal and smooth titanium nitride-based thin films and methods of forming the same. In one aspect, a method of forming a thin film comprising one or both of TiSiN or TiAlN comprises exposing a semiconductor substrate to one or more vapor deposition cycles at a pressure in a reaction chamber greater than 1 torr, wherein a plurality of the vapor deposition cycles comprises an exposure to a titanium (Ti) precursor, an exposure to a nitrogen (N) precursor and an exposure to one or both of a silicon (Si) precursor or an aluminum (Al) precursor.
    Type: Application
    Filed: October 8, 2019
    Publication date: April 8, 2021
    Inventors: Niloy Mukherjee, Hae Young Kim, Jerry Mack, Jae Seok Heo, Sung-Hoon Jung, Somilkumar J. Rathi, Srishti Chugh, Nariman Naghibolashrafi, Yoshikazu Okuyama, Bunsen B. Nie
  • Publication number: 20210104396
    Abstract: The disclosed technology generally relates to forming a thin film comprising titanium nitride (TiN), and more particularly to forming by a cyclical vapor deposition process the thin film comprising (TiN).
    Type: Application
    Filed: October 8, 2019
    Publication date: April 8, 2021
    Inventors: Sung-Hoon Jung, Niloy Mukherjee, Yoshikazu Okuyama, Nariman Naghibolashrafi, Bunsen B. Nie, Hae Young Kim, Somilkumar J. Rathi
  • Patent number: 10544519
    Abstract: During a pre-treat process, hydrogen plasma is used to remove contaminants (e.g., oxygen, carbon) from a surface of a wafer. The hydrogen plasma may be injected into the plasma chamber via an elongated injector nozzle. Using such elongated injector nozzle, a flow of hydrogen plasma with a significant radial velocity flows over the wafer surface, and transports volatile compounds and other contaminant away from the wafer surface to an exhaust manifold. A protective liner made from crystalline silicon or polysilicon may be disposed on an inner surface of the plasma chamber to prevent contaminants from being released from the surface of the plasma chamber. To further decrease the sources of contaminants, an exhaust restrictor made from silicon may be employed to prevent hydrogen plasma from flowing into the exhaust manifold and prevent volatile compounds and other contaminants from flowing from the exhaust manifold back into the plasma chamber.
    Type: Grant
    Filed: August 25, 2017
    Date of Patent: January 28, 2020
    Assignee: AIXTRON SE
    Inventors: Stephen Edward Savas, Miguel Angel Saldana, Dan Lester Cossentine, Hae Young Kim, Subramanian Tamilmani, Niloy Mukherjee, M Ziaul Karim