Abstract: A reforming method may include: reforming a hydrocarbon with steam plasma to generate a first synthetic gas, which includes hydrogen and carbon dioxide, from the hydrocarbon; cooling the first synthetic gas to a predetermined temperature, removing water vapor included in the first synthetic gas, and separating hydrogen from the first synthetic gas; reforming the first synthetic gas, from which hydrogen is separated, and a hydrocarbon with steam plasma to generate hydrogen, and generating a second synthetic gas in which carbon dioxide is decreased; and cooling the second synthetic gas to a predetermined temperature, removing water vapor included in the second synthetic gas, and separating hydrogen from the second synthetic gas.

Abstract: The present invention relates to a neutral particle beam processing apparatus. More specifically, the present invention relates to a neutral particle beam processing apparatus comprising a plasma discharging space inside which processing gases are converted to plasma ions through a plasma discharge, a heavy metal plate which converts the plasma ions into neutral particles through collisions, a plasma limiter which prevents plasma ions and electrons from passing through and allows the neutral particles produced by collisions of the plasma ions with the heavy metal plate to pass through, and a treating housing inside which a substrate to be treated is located, wherein the plasma discharging space is sandwiched between the heavy metal plate and the plasma limiter.

Abstract: There is provided a method for producing a solid element plasma from a solid lump and a plasma source used in the method. The method of the present invention comprises colliding a solid lump with accelerated particles or lasers to detach solid atoms from the solid lump within a first chamber inside which sputtering of solid atoms is performed, directing the solid atoms to a second chamber inside which plasma discharge is performed, applying a voltage to the second chamber to produce a plasma of solid atoms through plasma discharge, and contacting the plasma of solid atoms to a target to be treated. The present invention avoids problems caused from impurities and poisonous gases of conventional systems adopting a solid element-containing gas as a source of solid element.

Abstract: The present invention relates to a neutral particle beam processing apparatus. More specifically, the present invention relates to a neutral particle beam processing apparatus comprising a plasma discharging space inside which processing gases are converted to plasma ions through a plasma discharge, a heavy metal plate which converts the plasma ions into neutral particles through collisions, a plasma limiter which prevents plasma ions and electrons from passing through and allows the neutral particles produced by collisions of the plasma ions with the heavy metal plate to pass through, and a treating housing inside which a substrate to be treated is located, wherein the plasma discharging space is sandwiched between the heavy metal plate and the plasma limiter.

Abstract: There are provided an apparatus and a method for producing an ozonated water by a water discharge in a dielectric barrier discharge system. The apparatus comprises high voltage alternating current power supply unit, water supply unit, oxygen supply unit, water discharge unit. The apparatus and the method do not require any dissolving module, contrary to the conventional apparatus. Further, the apparatus and the method makes it possible to produce more highly concentrated ozonated water than the conventional pulsed corona discharge system.