Patents by Inventor Hag Sung LEE

Hag Sung LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CLEANING AGENT COMPOSITION FOR SUBSTRATE FOR SEMICONDUCTOR DEVICES AND METHOD FOR CLEANING SUBSTRATE FOR SEMICONDUCTOR DEVICES USING THE SAME
    Publication number: 20240150681
    Abstract: The present disclosure relates to a cleaning agent composition for a substrate for a semiconductor device and a method for cleaning a substrate for a semiconductor device using the same. The cleaning agent composition contains a silicon-based compound represented by Formula 1 and an aprotic organic solvent with a dielectric constant of 10 or less, which can form a surface protective film capable of preventing collapse of the pattern even in a wet cleaning process of fine patterns with high aspect ratios, thereby providing a method for manufacturing a semiconductor device with an improved semiconductor manufacturing yield.
    Type: Application
    Filed: October 16, 2023
    Publication date: May 9, 2024
    Inventors: Hye Ji KIM, JinHo YOU, Hag Sung LEE, MyungHo LEE, Narae YIM, Yu jin HEO, Keon young KIM, Yun sun CHOI, Young mee KANG